From tham at siliciumenergy.com  Fri Mar  8 19:19:06 2013
From: tham at siliciumenergy.com (tham at siliciumenergy.com)
Date: Fri, 8 Mar 2013 19:19:06 -0800 (PST)
Subject: [PT-Ox-pcs] Problem PT-Ox SNF 2013-03-08 19:19:05: He backside
	pressure
Message-ID: <14669240.8.1362799146407.JavaMail.coral@snc-coraldb.stanford.edu>

Backside He pressure is not stabilizing even after multiple tries. Suggest a PM to check the chuck condition.

From elmere at stanford.edu  Mon Mar 11 13:12:17 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 11 Mar 2013 13:12:17 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-11 13:12:16: High helium
	leak rate
Message-ID: <18438269.32.1363032737308.JavaMail.coral@snc-coraldb.stanford.edu>


From elmere at stanford.edu  Tue Mar 12 15:11:45 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Tue, 12 Mar 2013 15:11:45 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-11 13:12:16: High helium
	leak rate
Message-ID: <6130315.36.1363126305330.JavaMail.coral@snc-coraldb.stanford.edu>

Polished the electrode and adjusted wafer placement on the electrode.
Ran an the O2 clean recipe and He test with no problems.  He flow at 3 Torr  ~ 5.5sccm , He flow at 4 Torr ~ 8.5 sccm.

From elmere at stanford.edu  Tue Mar 12 15:11:51 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Tue, 12 Mar 2013 15:11:51 -0700 (PDT)
Subject: [PT-Ox-pcs] Problem PT-Ox SNF 2013-03-08 19:19:05: He backside
	pressure
Message-ID: <31852738.37.1363126311354.JavaMail.coral@snc-coraldb.stanford.edu>

Polished the electrode and adjusted wafer placement on the electrode.
Ran an the O2 clean recipe and He test with no problems.  He flow at 3 Torr  ~ 5.5sccm , He flow at 4 Torr ~ 8.5 sccm.

From jimkruger at yahoo.com  Wed Mar 13 18:16:57 2013
From: jimkruger at yahoo.com (jimkruger at yahoo.com)
Date: Wed, 13 Mar 2013 18:16:57 -0700 (PDT)
Subject: [PT-Ox-pcs] Problem PT-Ox SNF 2013-03-13 18:16:56: wafer stuck in
	system
Message-ID: <24938708.32.1363223817018.JavaMail.coral@snc-coraldb.stanford.edu>

Jim McV used "Manual" to load, no I can't get it out.
Just needs manual unload

From elmere at stanford.edu  Wed Mar 13 19:46:37 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 13 Mar 2013 19:46:37 -0700 (PDT)
Subject: [PT-Ox-pcs] Problem PT-Ox SNF 2013-03-13 18:16:56: wafer stuck
	in system
Message-ID: <9803493.34.1363229197601.JavaMail.coral@snc-coraldb.stanford.edu>

Moved user's wafer out.

From jimkruger at yahoo.com  Fri Mar 15 14:42:46 2013
From: jimkruger at yahoo.com (jimkruger at yahoo.com)
Date: Fri, 15 Mar 2013 14:42:46 -0700 (PDT)
Subject: [PT-Ox-pcs] Comment PT-Ox SNF 2013-03-15 14:42:45: Rubber anti-skid
 pads added to paddle--no solvent clean of paddle
Message-ID: <28415779.56.1363383766669.JavaMail.coral@snc-coraldb.stanford.edu>

Wafer seems to stay better in-place on paddle => better backside He.

From pnataraj at snf.stanford.edu  Tue Mar 19 17:36:10 2013
From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu)
Date: Tue, 19 Mar 2013 17:36:10 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-19 17:36:09: Wafer got stuck
 in the chamber!!
Message-ID: <6614808.27.1363739770199.JavaMail.coral@snc-coraldb.stanford.edu>


From elmere at stanford.edu  Wed Mar 20 12:30:52 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 20 Mar 2013 12:30:52 -0700 (PDT)
Subject: [PT-Ox-pcs] Comment PT-Ox SNF 2013-03-20 12:30:51: Update
Message-ID: <6621437.40.1363807852425.JavaMail.coral@snc-coraldb.stanford.edu>

Cleaned the chamber and replaced the broken clamp. Now heating up the chamber. Still need to run a chamber clean

From elmere at stanford.edu  Wed Mar 20 14:33:02 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 20 Mar 2013 14:33:02 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-19 17:36:09: Wafer got
 stuck in the chamber!!
Message-ID: <13553865.45.1363815182882.JavaMail.coral@snc-coraldb.stanford.edu>

Cleaned the chamber, replaced the broken clamp and ran an O2 clean.

From elmere at stanford.edu  Wed Mar 20 14:33:11 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 20 Mar 2013 14:33:11 -0700 (PDT)
Subject: [PT-Ox-pcs] Comment PT-Ox SNF 2013-03-20 12:30:51: Update
Message-ID: <19409906.46.1363815191913.JavaMail.coral@snc-coraldb.stanford.edu>

Archived

From hong at siliciumenergy.com  Thu Mar 21 11:37:13 2013
From: hong at siliciumenergy.com (hong at siliciumenergy.com)
Date: Thu, 21 Mar 2013 11:37:13 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-21 11:37:13: He leak problem
Message-ID: <9615804.82.1363891033578.JavaMail.coral@snc-coraldb.stanford.edu>

Hi,
one of my wafer came out with a chipped edge near the flat eddge. After that, I could not get He pressure. 
Thanks,
Young Rae

From elmere at stanford.edu  Thu Mar 21 15:15:04 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Thu, 21 Mar 2013 15:15:04 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-21 11:37:13: He leak
	problem
Message-ID: <3163126.92.1363904104744.JavaMail.coral@snc-coraldb.stanford.edu>

Cleaned the electrode and the loadlock..  Ran an O2 plasma recipe.

From elmere at stanford.edu  Fri Mar 22 15:25:01 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Fri, 22 Mar 2013 15:25:01 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-22 15:25:00: wafer alignment
Message-ID: <14707456.116.1363991101538.JavaMail.coral@snc-coraldb.stanford.edu>

Need to complete alignment of water to the electrode.

From elmere at stanford.edu  Mon Mar 25 11:09:33 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 25 Mar 2013 11:09:33 -0700 (PDT)
Subject: [PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-22 15:25:00: wafer
	alignment
Message-ID: <27789127.6.1364234973257.JavaMail.coral@snc-coraldb.stanford.edu>

Adjusted the loader arm to center the wafer on the electrode. Ran an O2 clean.