[PT-Ox-pcs] Problem PT-Ox SNF 2013-03-08 19:19:05: He backside pressure

elmere at stanford.edu elmere at stanford.edu
Tue Mar 12 15:11:51 PDT 2013


Polished the electrode and adjusted wafer placement on the electrode.
Ran an the O2 clean recipe and He test with no problems.  He flow at 3 Torr  ~ 5.5sccm , He flow at 4 Torr ~ 8.5 sccm.


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