[PT-Ox-pcs] Shutdown PT-Ox SNF 2013-03-21 11:37:13: He leak problem

hong at siliciumenergy.com hong at siliciumenergy.com
Thu Mar 21 11:37:13 PDT 2013


Hi,
one of my wafer came out with a chipped edge near the flat eddge. After that, I could not get He pressure. 
Thanks,
Young Rae


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