From uli at snf.stanford.edu  Tue Jan 28 02:15:14 2003
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Jan 28, 2003 2:15:14 PM
Subject: Shutdown r2t2 2003-01-28 14:15:09: stage is not moving
Message-ID: <mailman.2.1356282707.4448.r2t2-pcs@snf.stanford.edu>




From charley at snf.stanford.edu  Wed Jan 29 02:40:32 2003
From: charley at snf.stanford.edu (charley at snf.stanford.edu)
Date: Jan 29, 2003 2:40:32 PM
Subject: Shutdown r2t2 2003-01-28 14:15:09: stage is not moving
Message-ID: <mailman.3.1356282707.4448.r2t2-pcs@snf.stanford.edu>

Stage is moving OK now. In auto mode, all 'stops' on
wafer are made, but no display of results. Useable in
manual mode.



From uli at snf.stanford.edu  Wed Jan 29 04:32:46 2003
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Jan 29, 2003 4:32:46 PM
Subject: Shutdown r2t2 2003-01-29 16:32:43: stage needs to be cleaned
Message-ID: <mailman.4.1356282707.4448.r2t2-pcs@snf.stanford.edu>

broken pieces



From vilanova at snf.stanford.edu  Fri Jan 31 09:39:39 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jan 31, 2003 9:39:39 AM
Subject: Shutdown r2t2 2003-01-29 16:32:43: stage needs to be cleaned
Message-ID: <mailman.5.1356282707.4448.r2t2-pcs@snf.stanford.edu>

Stage Cleaned and tested , Working Ok , ready to use .