Shutdown r2t2 2003-01-28 14:15:09: stage is not moving
charley at snf.stanford.edu
charley at snf.stanford.edu
Wed Jan 29 02:40:32 PST 2003
Stage is moving OK now. In auto mode, all 'stops' on
wafer are made, but no display of results. Useable in
manual mode.
More information about the r2t2-pcs
mailing list