From jwc at snf.stanford.edu Mon Jan 6 11:17:00 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Jan 6, 2003 11:17:00 AM Subject: Shutdown raith 2003-01-06 11:16:58: Message-ID: From jwc at snf.stanford.edu Tue Jan 14 06:33:57 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Jan 14, 2003 6:33:57 PM Subject: Shutdown raith 2003-01-06 11:16:58: Message-ID: From jwc at snf.stanford.edu Tue Jan 14 06:34:37 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Jan 14, 2003 6:34:37 PM Subject: Comment raith 2003-01-14 18:34:36: RAITH is being tested. full report WED. Message-ID: From jwc at snf.stanford.edu Tue Jan 14 06:36:01 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Jan 14, 2003 6:36:01 PM Subject: Problem raith 2003-01-14 18:36:01: RAITH IS BEING TESTED FULL REPORT WED. Message-ID: From jwc at snf.stanford.edu Fri Jan 17 09:21:35 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 17 Jan 2003 09:21:35 -0800 Subject: RAITH UPDATE Friday Jan. 17, 2003 Message-ID: <3E283B9F.CE12DC7@snf.stanford.edu> Greetings from the E-beam Technology Group: RAITH remains in yellow light mode for the coming week. Your results may vary... LEO SEM PACKAGE on the RAITH 150: The LEO SEM package is now working optimally after running in the new FE-Gun. We are now back to where we should be for beam brightness and emission level. Gun Vacuum has also been excellent, after bake out of the column gun section last weekend. (8.0 E -10 Torr with EHT off, 1.2 E -9 with EHT on) Beam spot sizes as small as 15 nm have been measured. Typical noise levels as imaged by examining the FWHM image ripple on a latex sphere at high magnification is on the order of 5 - 7 nm for a total beam spot size during a write of ~ 20 - 22 nm. This is a optimal set up for EBL on this system. RAITH 150 Write Field to Write Field Stitching Issues: We are continuing to evaluate and seeking a means to correct the Write Field to Write Field Stitching offset errors that we have been experiencing since early December. A number of users have encountered the problem but have been slow to report it. This problem seems to be intermittent, and we are performing a number of EBL test to determine if it is caused by a problem with the ELPHY Plus pattern generator, or within the laser interferometry stage control package. All RAITH users are request to make extra careful inspections of all patterns they have written since December 1, 2002 using SEM, and to immediate report the results of these inspections to me. Particularly useful would be measurements in X-Y (U,V) of the offset error magnitude, and supporting images you can collect during your inspections. Raith GmbH, RAITH USA and I are working diligently to quickly determine the cause and correct this situation before any more engineering materials or time are wasted due to this problem. Your comments invited. Thank you for your support! James Conway E-beam Technology Group Stanford Nanofabrication Facility 650-725-7075 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jan 17 06:46:09 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Jan 17, 2003 6:46:09 PM Subject: Shutdown raith 2003-01-17 18:46:08: No access -- no use... call 415-412-4825 Message-ID: From jwc at snf.stanford.edu Sat Jan 18 05:44:42 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Jan 18, 2003 5:44:42 PM Subject: Shutdown raith 2003-01-17 18:46:08: Message-ID: