From edo at snf.stanford.edu Fri Sep 12 04:49:16 2003 From: edo at snf.stanford.edu (edo at snf.stanford.edu) Date: Sep 12, 2003 4:49:16 PM Subject: Problem raith 2003-09-12 16:49:16: Report Problem for raith Message-ID: Load lock arm jammed. From jwc at snf.stanford.edu Mon Sep 15 09:33:21 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 15, 2003 9:33:21 AM Subject: Shutdown raith 2003-09-15 09:33:21: RAITH IS DOWN FOR REPAIRS -- JWC Message-ID: From jwc at snf.stanford.edu Mon Sep 22 08:49:15 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 22, 2003 8:49:15 AM Subject: Problem raith 2003-09-12 16:49:16: Report Clear for raith Message-ID: From jwc at snf.stanford.edu Mon Sep 22 08:49:37 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 22, 2003 8:49:37 AM Subject: Shutdown raith 2003-09-15 09:33:21: RAITH BACK UP:: LEO ISSUES CONTINUE Message-ID: From jwc at snf.stanford.edu Mon Sep 22 06:22:10 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 22, 2003 6:22:10 PM Subject: Problem raith 2003-09-22 18:22:09: Please inspect your patterns and report Message-ID: sub-field stitching and pattern placement errors were encountered on writed performed over the weekend and this morning. Please inspect your patterns carefully after development and report to the raith-pcs at snf.stanford.edu list. LEO computer problems continue but with less frequency than before. We are testing and evaluating both these problems. James Conway From edo at snf.stanford.edu Mon Sep 22 11:21:45 2003 From: edo at snf.stanford.edu (edo at snf.stanford.edu) Date: Sep 22, 2003 11:21:45 PM Subject: Problem raith 2003-09-22 23:21:44: LEO computer problem Message-ID: The LEO computer rebooted unexpectedly 3 times during my asession. From jwc at snf.stanford.edu Wed Sep 24 04:11:48 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 24, 2003 4:11:48 PM Subject: Shutdown raith 2003-09-24 16:11:31: RAITH IS IN RED LIGHT MODE: Fractured pattern writes. Message-ID: We are experiencing intermittant sub field write errors during complex pattern writes on the system. This appears as breaks inn the pattern due fractured sub-fields in the chip pattern write. We have ordered and will be receiving a new pattern generator from RAITH USA, which is due to arrive tomorrow. James Conway From jwc at snf.stanford.edu Wed Sep 24 04:15:02 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 24, 2003 4:15:02 PM Subject: Problem raith 2003-09-22 18:22:09: DO inpect your patterns BEFORE pattern transfer Message-ID: We continue to experience fractured patterns writes presumably due to a problem in the pattern generator. PLEASE BE SURE TO INSPECT YOUR PATTERNS CAREFULLY AND REPORT YOUR RESULTS TO raith-pcs at snf.stanford.edu and to jwc at snf.stanford.edu James Conway From jwc at snf.stanford.edu Fri Sep 26 03:15:37 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 26, 2003 3:15:37 PM Subject: Shutdown raith 2003-09-24 16:11:31: Report Clear for raith Message-ID: From jwc at snf.stanford.edu Fri Sep 26 03:15:43 2003 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sep 26, 2003 3:15:43 PM Subject: Problem raith 2003-09-22 23:21:44: Report Clear for raith Message-ID: From jwc at snf.stanford.edu Fri Sep 26 15:27:30 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 26 Sep 2003 15:27:30 -0700 Subject: RAITH is back up and available to users -- System is in specification. References: <3F7486CF.7A079114@snf.stanford.edu> Message-ID: <3F74BD52.CE7DA17B@snf.stanford.edu> Greetings Raith Users: As of 1500 hours today we are back up and running on the RAITH 150 system. :-) I recovered from the problem encountered in the software yesterday. Thank you to the RAITH team in Dortmund and N.Y. State for fast response to the problem report last evening. The pattern generator card in the ELPHY Plus was removed, cleaned, inspected, and one connection repaired and reinstalled. Likely it was a cable or pin connection that had been causing the intermittent problem. I reset the calibrations for the X-Y stage and updated positions for the faraday cups, latex spheres on chessy and the chessy grid patterns. I realigned the magnification amplifiers on the LEO for proper centering across the three amplifier ranges. I have tested the system for functionality of the stage control and the pattern generator. I ran the same two exposure sequences that crashed on me Monday AM and PM with no problems. Total write of 208 patterns. Write field to write field stitching is acceptable with a mean + 3 sigma error on the order of 31 nm. Overlay layer1 to layer2 is superb and less than we can measure using verniers = <20 nm. More overlay and stitching test will be conducted next week during the Lithography Workshop. System is available to all users scheduled over the weekend. Users are asked to immediately report problems to both the CORAL system and to James Conway by cell phone and email. Thank you for your support! James Conway SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: