From cumings at snf.stanford.edu Tue Aug 3 21:52:50 2004 From: cumings at snf.stanford.edu (cumings at snf.stanford.edu) Date: Tue, 3 Aug 2004 21:52:50 -0700 Subject: Comment raith SNF 2004-08-03 21:52:49: LEO PC hung Message-ID: Lost CCD image on LEO software after EHT trip. Tried rebooting the LEO computer, but it just hangs on the Windows startup screen. James says that the next user might be able to fix this and to give him a call. From cumings at snf.stanford.edu Tue Aug 3 21:53:51 2004 From: cumings at snf.stanford.edu (cumings at snf.stanford.edu) Date: Tue, 3 Aug 2004 21:53:51 -0700 Subject: Problem raith SNF 2004-08-03 21:53:51: LEO PC hung Message-ID: Lost CCD image on LEO software after EHT trip. Tried rebooting the LEO computer, but it just hangs on the Windows startup screen. James says that the next user might be able to fix this and to give him a call. From jwc at snf.stanford.edu Wed Aug 4 09:26:54 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Aug 2004 09:26:54 -0700 Subject: Problem raith SNF 2004-08-03 21:53:51: LEO PC hung Message-ID: From jwc at snf.stanford.edu Wed Aug 4 09:27:32 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Aug 2004 09:27:32 -0700 Subject: Problem raith SNF 2004-08-03 21:53:51: LEO PC hung Message-ID: From jwc at snf.stanford.edu Wed Aug 4 09:27:22 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Aug 2004 09:27:22 -0700 Subject: Problem raith SNF 2004-08-03 21:53:51: LEO PC hung Message-ID: From jwc at snf.stanford.edu Wed Aug 4 09:28:42 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Aug 2004 09:28:42 -0700 Subject: Comment raith SNF 2004-08-03 21:52:49: LEO PC hung Message-ID: From jwc at snf.stanford.edu Wed Aug 4 09:28:54 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Aug 2004 09:28:54 -0700 Subject: Comment raith SNF 2004-08-04 09:27:18: PC rebooting troubles -- do not reset LEO PC Message-ID: From jwc at snf.stanford.edu Wed Aug 4 14:23:29 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Aug 2004 14:23:29 -0700 Subject: Problem raith SNF 2004-08-04 14:23:28: Mag Range Three amplifier blown on Electron OPtics board Message-ID: EHT Trip last night resulted in danage to the Electron Optics board on the LEO SEM package. Specifically the Mag Range Three amplifier is blown on Electron Optics board and we cannot perform imaging above 13kX magnification. This will make SEM column alignment and stigamation difficult in not impossible for most users. LEO ?Raith was updated at 7 AM 8-04-04 JWC From jwc at snf.stanford.edu Wed Aug 4 15:15:02 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 04 Aug 2004 15:15:02 -0700 Subject: Problem raith SNF 2004-08-04 14:23:28: Mag Range Three amplifier blown on Electron Optics board Message-ID: <41115FE6.40304@snf.stanford.edu> Raith Users: A 30 keV EHT Trip event on the system last night resulted in damage to the Electron Optics board on the LEO SEM package. Specifically the Magnification Amplifier for Magnification Range Three was blown on Electron Optics board and we cannot perform imaging above 13,250 X magnification. This will make SEM column alignment and stigmation adjustments difficult in not impossible for most users. LEO & Raith was updated on this at 7 AM 8-04-04. I followed up with them escalating to 'system down' in need of immediate response at 1315 hours 080404 through both LEO and Raith Service desk. We will update to this list tomorrow afternoon if more information presents itself. Currently the system is in YELLOW MODE and still available to users wishing to attempt exposures on the system. Thank you for your support! James W. Conway From jwc at snf.stanford.edu Fri Aug 6 09:19:57 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 6 Aug 2004 09:19:57 -0700 Subject: Problem raith SNF 2004-08-04 14:23:28: Mag Range Three amplifier blown on Electron OPtics board Message-ID: new E/O board and alignments performed Thursday at Noon. Good response time from ZEISS and RAITH. From atalasaz at snf.stanford.edu Sun Aug 8 07:27:14 2004 From: atalasaz at snf.stanford.edu (atalasaz at snf.stanford.edu) Date: Sun, 8 Aug 2004 07:27:14 -0700 Subject: Comment raith SNF 2004-08-08 07:27:13: Problem with write field alignment Message-ID: Couln't do the write field alignment even down to 500 (magnification number) From jwc at snf.stanford.edu Tue Aug 10 10:09:03 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 10 Aug 2004 10:09:03 -0700 Subject: Comment raith SNF 2004-08-10 10:09:03: Please do not shut down LEO PC Message-ID: Problems encountered on resetting LEO hardware and it may take several attempts to restore Win200P after resetting. LEO has been notified last week. From jwc at snf.stanford.edu Tue Aug 10 10:09:22 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 10 Aug 2004 10:09:22 -0700 Subject: Comment raith SNF 2004-08-08 07:27:13: Problem with write field alignment Message-ID: From gigi at snf.stanford.edu Tue Aug 10 21:26:15 2004 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Tue, 10 Aug 2004 21:26:15 -0700 Subject: Problem raith SNF 2004-08-10 21:26:15: beam distorsion Message-ID: spot looks good at high mag, but at low mag (<1000) the spot is deformed and becomes 30x100nm. I noticed it becomes worse and worse starting at ~5000 and going down to 600. Since I'm using 600X, I decided not to write. Everything else seems fine. From jwc at snf.stanford.edu Wed Aug 11 13:33:27 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 11 Aug 2004 13:33:27 -0700 Subject: Problem raith SNF 2004-08-10 21:26:15: beam distorsion Message-ID: I tested the system at high(15000/ 150000) and low magnification (600 X) and could not find any image distortion or field perturbations at any mag. range. Imaging Field at 600X is uniform and in fine focus from the center shot dot to the edges of thge write field. JWC 08112004_1335 hrs From jwc at snf.stanford.edu Wed Aug 11 16:56:25 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 11 Aug 2004 16:56:25 -0700 Subject: Problem raith SNF 2004-08-11 16:56:22: charge up seen in column on blank/unblank Message-ID: Gigi first reported elongation in V of the beam spot below 5000X mag. with the spot size reaching nearly 100 x 25 nm. The LEO beam blanker when unblanked shows a slight drift even. This is not be confused with surface sample charge up as experienced by some users over the course of the last few weeks. RX: The column may have become contaminated with HC residuues and we will possibly be needing to perform another PM on the system to resolve this issue. NO Users have reported problems during their writes! Everyone is requested to carefully inspect their writes performed this week both optically and in the SEM and report their results to raith at snf.stanford.edu james Conway jwc 08112004_1657 hrs From jwc at snf.stanford.edu Thu Aug 12 13:54:24 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Aug 2004 13:54:24 -0700 Subject: Shutdown raith SNF 2004-08-12 13:54:23: LEO E/O BOARD FAILURE Message-ID: The scan rotation calibration function used to maintain Orthogonality is failing -- slowly, and now has failed. This is the source of the misshaped shot spots in the V (Y) axis imaging plane. This will require replacement of the E/O Board. We are attempting to locate a calibrated and tested board from ZEISS. James Conway 08122004_1351 hours. From jwc at snf.stanford.edu Fri Aug 13 13:44:17 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 13 Aug 2004 13:44:17 -0700 Subject: Shutdown raith SNF 2004-08-12 13:54:23: LEO E/O BOARD FAILURE Message-ID: From jwc at snf.stanford.edu Fri Aug 13 13:44:51 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 13 Aug 2004 13:44:51 -0700 Subject: Problem raith SNF 2004-08-11 16:56:22: charge up seen in column on blank/unblank Message-ID: From jwc at snf.stanford.edu Fri Aug 13 13:45:06 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 13 Aug 2004 13:45:06 -0700 Subject: Comment raith SNF 2004-08-10 10:09:03: Please do not shut down LEO PC Message-ID: From jwc at snf.stanford.edu Fri Aug 13 13:45:14 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 13 Aug 2004 13:45:14 -0700 Subject: Comment raith SNF 2004-08-04 09:27:18: PC rebooting troubles -- do not reset LEO PC Message-ID: From jwc at snf.stanford.edu Fri Aug 13 13:46:09 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 13 Aug 2004 13:46:09 -0700 Subject: Problem raith SNF 2004-08-13 13:45:57: LEO Blanker leaking -- move before unloading Message-ID: From lgx at snf.stanford.edu Mon Aug 16 16:04:10 2004 From: lgx at snf.stanford.edu (lgx at snf.stanford.edu) Date: Mon, 16 Aug 2004 16:04:10 -0700 Subject: Shutdown raith SNF 2004-08-16 16:04:09: major system malfunction Message-ID: From jwc at snf.stanford.edu Mon Aug 16 17:15:08 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Aug 2004 17:15:08 -0700 Subject: Shutdown raith SNF 2004-08-16 16:04:09: major system malfunction Message-ID: For reasons unknown and unidentified... It appears that we lost all vacuum and control funtion logic. I reset the entire LEO Platform and cycled the mechanical pump power switches. The system is now back up in yellow. JWC From cwhicks at snf.stanford.edu Mon Aug 16 20:35:40 2004 From: cwhicks at snf.stanford.edu (cwhicks at snf.stanford.edu) Date: Mon, 16 Aug 2004 20:35:40 -0700 Subject: Shutdown raith SNF 2004-08-16 20:35:39: Raith shutdown Message-ID: We were unable to get an SEM image on the LEO screen. All we saw was some stripy digital garbage at the top of the screen, and the rest of the image was entirely black, regardless of the brightness/contrast settings or scan speed. We were also unable to get any image on the RAITH150 screen. Restarting the LEO computer had no effect. It appears that an imaging board is broken. We had been attempting to write at 30 kV. We managed to increase the gun voltage to 27 kV. When we tried to increase it to 28 kV we tripped the EHT; we don't know if this is what caused the imaging malfunction. From jwc at snf.stanford.edu Thu Aug 26 19:19:12 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 26 Aug 2004 19:19:12 -0700 Subject: Shutdown raith SNF 2004-08-16 20:35:39: Raith shutdown Message-ID: From jwc at snf.stanford.edu Thu Aug 26 19:19:30 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 26 Aug 2004 19:19:30 -0700 Subject: Problem raith SNF 2004-08-13 13:45:57: LEO Blanker leaking -- move before unloading Message-ID: From jwc at snf.stanford.edu Thu Aug 26 19:20:07 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 26 Aug 2004 19:20:07 -0700 Subject: Problem raith SNF 2004-08-26 19:20:06: qualifications and more calibrations FRIDAY Message-ID: From jwc at snf.stanford.edu Fri Aug 27 18:47:32 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 27 Aug 2004 18:47:32 -0700 Subject: Shutdown raith SNF 2004-08-27 18:47:32: Repaired chiller unit was defective?!! Message-ID: Neslab chiller unit was returned after repairs and immediately failed upon switching on using house power in the service chase. This unit was functioning at NESLAB. Unit returned and exchanged with another known good unit and we are tetsing on pther power sources for funtion before moving to service chase. I expect we will be down for the weekend and into early next week. James Conway 8272004:1847 hrs From jwc at snf.stanford.edu Fri Aug 27 21:15:50 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 27 Aug 2004 21:15:50 -0700 Subject: Shutdown raith SNF 2004-08-27 18:47:32: Repaired chiller unit was defective?!! Message-ID: From jwc at snf.stanford.edu Fri Aug 27 23:27:27 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 Aug 2004 23:27:27 -0700 Subject: Raith UPDATE 8272004: 2245 hrs RAITH system returning to operational status, hopefully access starts SAT afternoon. Message-ID: <413025CF.4070403@snf.stanford.edu> Greetings Raith Users: We worked long into the evening today to ensure we reached operational status this weekend. A number of problems have been encountered and corrected. Please take a look at my white board ion my office if you wish to review the sequence of problems and how we fish boned out a solution. It was an 'interesting' exercise to say the least. Diagnosis: 1. Significant contamination was introduced into the system from Carbon dots, contaminated fixturing and user supplied hold downs, and possibly several instances of unbaked or poorly baked resist being placed into the system. These events occurred August 6, 10, and 11 on SNF users runs. Troubleshooting was complicated by users reports of charging and beam drift in the system but some of these reports came from users working with thick oxide, nitride, and SOI substrates and they were experiencing simple and normal sample surface charging. 2. A problem with the electrical circuit supplying the Neslab chiller unit in the service chase caused the chiller unit to go into a Low Temperature fault condition. The cooling lines to the Electron Optics Card and the turbo pump condensed water on their exterior surfaces and a drop or drop of water dripped into the E/O card loosing control of that subsystem particularly in the Y scan control. This may have been intermittent but the first alarm in the LEO server tripped on Monday August 16, 2004 at 11:37 AM. Repairs were effected to the column by performing another inspect, clean, and vacuuming of the upper section of the LEO column and over 50 hours of bake outs in three sequences to bake out the column and remove contamination, presumably hydrocarbon from this area. The E/O card was replaced. Three known good chiller units were exchanged before we identified the bad circuit in the chase leading to the chiller failures. Tonight we ran an independent AC cord to this last unit (#4) and this corrected the situation. A qualification run made last night on a standby jury rigged water recirculation unit after other repairs and calibrations were completed has met with my satisfaction and has passed High Power Microscope inspection. We appear to be within specifications for the system. We brought the FE-Gun back up at 9:00 PM and will allow it to run overnight and will recalibrate the E/O card and check out the system. We should be back up and available to users by mid afternoon. The following restrictions are in effect until my return September 13, 2004 with no exceptions whatsoever: As that Contamination caused the bulk of the problems we experienced in the last three weeks I am increasing the stringency of cleanliness requirements to normal practices for Ultra High Vacuum systems: ABSOLUTELY NO CARBON DOTS, TAPE, STRIPS OF CARBON OR ADHESIVE ARE TO BE PlACED INTO THE SYSTEM. NO EXCEPTIONS... ABSOLUTELY NO BRASS, BRONZE, OR OTHER HOLD DOWN FIXTURES IN THE SYSTEM. ABSOLUTELY NO ADDITIONAL FIXTURES, HOLDERS, OR MOUNTS ARE TO BE PLACES IN THE SYSTEM. NO RESIST THAT HAS NOT BEEN BAKED AT TEMPERATURES ABOVE 150 DEGREES CELSIUS WILL BE ALLOWED INTO THE SYSTEM. ALL PREVIOUS INDIVIDUAL PERMISSIONS OR EXCEPTIONS TO THESE RULES AR HEREBY REVOKED. IF YOU CANNOT FOLLOW THESE SIMPLE GUIDELINES TAKE YOUR PROJECT ELSEWHERE... UPON MY RETURN, WE WILL REVIEW THESE RESTRICTIONS AND MAY AMEND AND/OR MODIFY AS SUITS THE NEEDS OF THE LAB MEMBERS, AND THE NECESSITY TO MAINTAIN CLEANLINESS AND GOOD VACUUM PRACTICE FOR THE BETTER GOOD AND UTILITY OF THE RAITH USER COMMUNITY AND THE HEALTH OF THE RAITH 150 SYSTEM. Thank you to everyone for your support through this difficult time. I am going on leave and will return Monday September 13, 2004 resuming with my office hour at 8:30 AM. ARVIND and GIGI are in charge during my absence. If you run into problems follow the "Who are you going to call procedures..." posted in the Ebeam Lab and attached... Thank you, James Conway Ebeam Technology Group Stanford Nanofabrication Facility. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded and charset-unspecified text was scrubbed... Name: FAQ_PROBLEMS_Who_are_you_going_to_call.txt URL: From jwc at snf.stanford.edu Sat Aug 28 12:38:05 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sat, 28 Aug 2004 12:38:05 -0700 Subject: Problem raith SNF 2004-08-26 19:20:06: qualifications and more calibrations FRIDAY Message-ID: From jwc at snf.stanford.edu Sat Aug 28 13:00:08 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sat, 28 Aug 2004 13:00:08 -0700 Subject: Problem raith SNF 2004-08-28 13:00:07: NO operations above 10 keV Message-ID: we wish to allow the FE-gun two weeks of conditioning before we resume regular operations. This is to allow the FE-tip to condition itslef and run in properly. System was tested repeatedly to 30 keV with no EHT trips or vacumm ouotgassing above normal levels JWC 08282004:1256 hrs From jwc at snf.stanford.edu Sat Aug 28 13:21:56 2004 From: jwc at snf.stanford.edu (James Conway) Date: Sat, 28 Aug 2004 13:21:56 -0700 Subject: RAITH UDATE2004-08-28 13:00:07: RESTRICTION: NO operations above 10 keV SYSTEM BACK ON LINE Message-ID: <4130E964.6030700@snf.stanford.edu> Greetings: It is my pleasure to announce that the system is back online in normal functionality. Today's qualification run is well within specifications with stitching below spec and superb overlay registration. The chip is in my dry box if you wish to inspect it. 06192003_6.chip QUAL8282004 red sticker on wafer box. 3.3 U 6.2 V position RESTRICTION: NO operations above 10 keV DO NOT operate above 10 keV. See below ... Should there be any problems or EHT trips immediately inform cole loomis at RAITH USA. Zeiss should return later this week to check adjustments made on the system after the system has had several more day to run in. I will be unavailable and will be away from the Lab returning September 13, 2004 Thank you for your support! Please play nicely together, James Conway -------- Original Message -------- Subject: Problem raith SNF 2004-08-28 13:00:07: NO operations above 10 keV Date: Sat, 28 Aug. 2004 13:00:08 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu we wish to allow the FE-gun two weeks of conditioning before we resume regular operations. This is to allow the FE-tip to condition itself and run in properly. System was tested repeatedly to 30 keV with no EHT trips or vacuum out gassing above normal levels. This is just a precaution to ensure a long bright FE-Gun tip life. Thank you for your support! JWC 08282004:1256 hrs -------------- next part -------------- An HTML attachment was scrubbed... URL: