Problem raith SNF 2004-08-11 16:56:22: charge up seen in column on blank/unblank

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Aug 11 16:56:25 PDT 2004


Gigi first reported elongation in V of the beam spot below 5000X mag. with the spot size reaching nearly 100 x 25 nm.  The LEO beam blanker when unblanked shows a slight drift even.
This is not be confused with surface sample charge up as experienced by some users over the course of the last few weeks.
RX: The column may have become contaminated with HC residuues and we will possibly be needing to perform another PM on the system to resolve this issue.
NO Users have reported problems during their writes!  
Everyone is requested to carefully inspect their writes performed this week both optically and in the SEM and report their results to raith at snf.stanford.edu 
james Conway
jwc 08112004_1657 hrs




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