From bjeletich at snf.stanford.edu Wed Jun 2 15:02:50 2004 From: bjeletich at snf.stanford.edu (bjeletich at snf.stanford.edu) Date: Wed, 2 Jun 2004 15:02:50 -0700 Subject: Problem raith 2004-06-02 15:02:49: Drive Belt Broken Message-ID: Drive belt in the load arm broke inside the loadlock. From bjeletich at snf.stanford.edu Wed Jun 2 15:03:31 2004 From: bjeletich at snf.stanford.edu (bjeletich at snf.stanford.edu) Date: Wed, 2 Jun 2004 15:03:31 -0700 Subject: Shutdown raith 2004-06-02 15:03:30: Drive belt broken Message-ID: Drive belt broke inside of the loadlock. From charley at snf.stanford.edu Thu Jun 3 09:22:25 2004 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Thu, 3 Jun 2004 09:22:25 -0700 Subject: Comment raith 2004-06-03 09:22:22: Airlock problem Message-ID: Joe Klingfus is aware of the problem and has promised a service guy here tomorrow, the 4th. From charley at snf.stanford.edu Fri Jun 4 15:52:40 2004 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Fri, 4 Jun 2004 15:52:40 -0700 Subject: Shutdown raith 2004-06-02 15:03:30: Drive belt broken Message-ID: Drive belt repl'd, several unload/loads were made. See Raith E-mail for details. UP FOR USE! From charley at snf.stanford.edu Fri Jun 4 15:53:03 2004 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Fri, 4 Jun 2004 15:53:03 -0700 Subject: Comment raith 2004-06-03 09:22:22: Airlock problem Message-ID: Airlock working fine From charley at snf.stanford.edu Fri Jun 4 15:53:22 2004 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Fri, 4 Jun 2004 15:53:22 -0700 Subject: Problem raith 2004-06-02 15:02:49: Drive Belt Broken Message-ID: Same problem, OK now. Up fo use. From jwc at snf.stanford.edu Fri Jun 11 12:08:07 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 11 Jun 2004 12:08:07 -0700 Subject: Problem raith 2004-06-11 12:08:06: LEO BLANKER SECTION TEST BAD -- FAILING Message-ID: I TESTED THE RAITH AND LEO BLANKING SECTIONS THIS MORNING TROUBLESHOOTING THE REPORTS OF COMETS AND TRILLIUM SHAPED FEATURES APPEARING ON SOME USERS WRITES. THIS PROBLEM IS SOURCES TO THE LEO BLANKER WHICH COMES ON AT THE END OF WRITES AND ANY TIME YOU IMAGE WITH THE CCD CAMERA. RAITH IS WORKING WITH ME ON THIS AND LEO WILL BE CALLED IN. JWC 1205 HRS 6112004 From jwc at snf.stanford.edu Fri Jun 11 14:42:41 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 11 Jun 2004 14:42:41 -0700 Subject: Problem raith 2004-06-11 12:08:06: LEO BLANKER SECTION TEST BAD -- FAILING Message-ID: From arvind at snf.stanford.edu Wed Jun 16 04:16:52 2004 From: arvind at snf.stanford.edu (arvind at snf.stanford.edu) Date: Wed, 16 Jun 2004 04:16:52 -0700 Subject: Problem raith 2004-06-16 04:16:52: Message-ID: The imaging From arvind at snf.stanford.edu Wed Jun 16 04:18:18 2004 From: arvind at snf.stanford.edu (arvind at snf.stanford.edu) Date: Wed, 16 Jun 2004 04:18:18 -0700 Subject: Problem raith 2004-06-16 04:18:17: Message-ID: I was not able to get an image. I couldn't see the wafer edge. When I tried to do a gun align, I didn't see anything. arvind From jwc at snf.stanford.edu Wed Jun 16 10:51:38 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 16 Jun 2004 10:51:38 -0700 Subject: Problem raith 2004-06-16 04:18:17: Message-ID: From jwc at snf.stanford.edu Wed Jun 16 10:51:42 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 16 Jun 2004 10:51:42 -0700 Subject: Problem raith 2004-06-16 04:16:52: Message-ID: From crozier at snf.stanford.edu Wed Jun 30 15:31:37 2004 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: Wed, 30 Jun 2004 15:31:37 -0700 Subject: Problem raith SNF 2004-06-30 15:31:36: Not working - beam blanking Message-ID: Specimen current with beam blanked by Raith is very high (1400 fA) meas by JWC. Could be cause of "splotch" problem. From jwc at snf.stanford.edu Wed Jun 30 17:34:10 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 30 Jun 2004 17:34:10 -0700 Subject: Problem raith SNF 2004-06-30 15:31:36: Not working - beam blanking Message-ID: From jwc at snf.stanford.edu Wed Jun 30 17:34:47 2004 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 30 Jun 2004 17:34:47 -0700 Subject: Comment raith SNF 2004-06-30 17:34:46: Please carefully inspect your patterns for blanking artifacts Message-ID: