From jwc at snf.stanford.edu Tue Aug 2 17:56:13 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 02 Aug 2005 17:56:13 -0700 Subject: FYI: RAITH Pattern and SEM4160 computer is down and will not reboot. Message-ID: <42F0162D.6080803@snf.stanford.edu> Hello All: This notice is to inform you that the RAITH off line pattern PC computer that is also hooked to the SEM4160 for SEM image acquisition is down for the count. Seems that the system cannot locate the SCSI BIOS boot section during startup. This computer has been slowly degrading in performance over the course of the last few months and recently we have observed a number of viral attacks on this system. The spy sweeper and adaware SE personal software has been running in the back ground and weekly I have been quarantining tens of sites each week. This may have been the result of a virus attack as it went down rather suddenly this afternoon. I will need some help to get this hurting unit back up and on line for all users. Thank you for your support! Yours, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Aug 4 17:52:10 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 4 Aug 2005 17:52:10 -0700 Subject: Comment raith SNF 2005-07-11 16:12:05: Users restricted to no more than 20 kV acceleration voltage Message-ID: cleared for all operations to 25 kV acceleration voltages. 30 kv testing will be performed next week JWC: From jwc at snf.stanford.edu Wed Aug 10 14:21:10 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 10 Aug 2005 14:21:10 -0700 Subject: Problem raith SNF 2005-08-10 14:21:09: Someone used epoxy or corrosive materials on STD. SAMPLE HOLDER!!! Message-ID: Attention RAITH Users: Will the user whom used conductive epoxy or other adhesives to mount their small pieces to the Std. Sample Holder -- PLEASE SEE ME IMMEDIATELY! Evidently a User working with small pieces on positions 1 outer, two inner, both three inner and outer, and five outer on the STD. SAMPLE HOLDER employed either conductive epoxy, or a corrosive residue on the wafer backside, which has left residues which I cannot remove with normal solvents! The result is that wafers and all pieces now cannot be mounted level onto the sample holder. This is very poor behaviour to the RAITH community; likely we have to replace the standard sample holder. (COST 10 -15K euro. est.) James Conway 08102005:14:25 If you were that user or know whom this might be -- please contact me immediately. From jwc at snf.stanford.edu Thu Aug 11 17:48:51 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 11 Aug 2005 17:48:51 -0700 Subject: Problem raith SNF 2005-08-11 17:48:50: ALERT for Users working in overlay Message-ID: Three times now in the last tenb days, I have had problems picking up targets during WF target acquisition for OVERLAY writes. Measured offsets of these acquisition site do not correspond with any normal offset postion values. Users are requested to report to this list if they are experiencing simular problems. James Conway 08112005:17:50:00.00 From jwc at snf.stanford.edu Mon Aug 15 15:57:06 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 15 Aug 2005 15:57:06 -0700 Subject: Problem raith SNF 2005-08-10 14:21:09: Someone used epoxy or corrosive materials on STD. SAMPLE HOLDER!!! Message-ID: From jwc at snf.stanford.edu Wed Aug 17 17:01:19 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 17 Aug 2005 17:01:19 -0700 Subject: Problem raith SNF 2005-08-11 17:48:50: ALERT for Users working in overlay Message-ID: tested the system for overlay on 100 um fields and two pattern types and overlay seems to procede without problems with target acquisition. Will report additional on High power Visual Inspection (HPV) James Conway 08172005: 17:01:00.00 From goetzi at snf.stanford.edu Thu Aug 18 21:58:45 2005 From: goetzi at snf.stanford.edu (goetzi at snf.stanford.edu) Date: Thu, 18 Aug 2005 21:58:45 -0700 Subject: Shutdown raith SNF 2005-08-18 21:58:45: one stage motor does not work Message-ID: working distance is not adjustable in a proper way From jwc at snf.stanford.edu Fri Aug 19 11:02:39 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Aug 2005 11:02:39 -0700 Subject: Shutdown raith SNF 2005-08-18 21:58:45: one stage motor does not work Message-ID: there was a loss of the stage calibration concurrent with installation of RAITH SW Version 3 SP 5, 6, 7. Reset system and found all home positions and checked calibration of XYZ stage. ALL is now OK -- system is back up! James Conway 08192005:11:02:00.00 From xinranw at snf.stanford.edu Sat Aug 20 16:28:04 2005 From: xinranw at snf.stanford.edu (xinranw at snf.stanford.edu) Date: Sat, 20 Aug 2005 16:28:04 -0700 Subject: Problem raith SNF 2005-08-20 16:28:03: error code 593 Message-ID: After I loaded my sample, there is an error code 593 "water flow has failed". I logged out and back in and the error was gone, but I could not get any image when the beam is unblancked, so I unloaded my sample without going further. From jwc at snf.stanford.edu Mon Aug 22 11:00:55 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 22 Aug 2005 11:00:55 -0700 Subject: Problem raith SNF 2005-08-20 16:28:03: error code 593 Message-ID: No problems found. Checked system and gun vacuum levels and then water cooling system. All is normal. RAITH back to green lights status. JWC