Problem raith SNF 2005-08-11 17:48:50: ALERT for Users working in overlay

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Aug 17 17:01:19 PDT 2005


tested the system for overlay on 100 um fields and two pattern types and overlay seems to procede without problems with target acquisition. Will report additional on High power Visual Inspection (HPV)
James Conway 08172005: 17:01:00.00




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