From jwc at snf.stanford.edu Fri Feb 4 09:00:03 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 4 Feb 2005 09:00:03 -0800 Subject: Comment raith SNF 2005-01-14 13:55:23: NO operations above 15 kV acceleration voltage Message-ID: Cleared Changing limits of operation to 20 kV maximum. From jwc at snf.stanford.edu Fri Feb 4 09:00:16 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 4 Feb 2005 09:00:16 -0800 Subject: Comment raith SNF 2005-02-04 09:00:14: NO OPERATIONS ABOVE 20 KV Message-ID: From jwc at snf.stanford.edu Tue Feb 8 09:39:24 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 8 Feb 2005 09:39:24 -0800 Subject: Problem raith SNF 2005-02-08 09:39:24: Reports of increased scattering or leakage when blanked Message-ID: Greetings: Yesterday with Dirk Englund we observed an increase in the scattering from the Raith blanker on the RAITH 150 EBL system. Parameters: 10 kV, 20 um aperture, beam I Raith blanker 'on' (Beam Off) = 0.023 nA. Beam I Raith 'off' (Beam ON) = ~ 0.087 nA. Users are requested to measure their beam Currents both with and without the blanker 'on' and record the values observed in the RAITH users logbook. Raith USA and I are working to promptly address this concern. JWC 02082005 09:39 From jwc at snf.stanford.edu Tue Feb 8 10:02:50 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 08 Feb 2005 10:02:50 -0800 Subject: [Fwd: Problem raith SNF 2005-02-08 09:39:24: Reports of increased scattering or leakage when blanked] Message-ID: <4208FECA.9080203@snf.stanford.edu> Revised value due to typo: Parameters: 10 kV, 20 um aperture, beam I Raith blanker 'on' (Beam Off) = 0.0023 nA. Beam I Raith 'off' (Beam ON) = ~ 0.087 nA. -------- Original Message -------- Subject: Problem raith SNF 2005-02-08 09:39:24: Reports of increased scattering or leakage when blanked Date: Tue, 8 Feb 2005 09:39:24 -0800 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Greetings: Yesterday with Dirk Englund we observed an increase in the scattering from the Raith blanker on the RAITH 150 EBL system. Parameters: 10 kV, 20 um aperture, beam I Raith blanker 'on' (Beam Off) = 0.0023 nA. Beam I Raith 'off' (Beam ON) = ~ 0.087 nA. Users are requested to measure their beam Currents both with and without the blanker 'on' and record the values observed in the RAITH users logbook. Raith USA and I are working to promptly address this concern. JWC 02082005 09:39 -------------- next part -------------- An HTML attachment was scrubbed... URL: From Savings at software-for-education.com Tue Feb 8 14:00:18 2005 From: Savings at software-for-education.com (Education Discount Software) Date: Tue, 8 Feb 2005 14:00:18 -0800 Subject: Adobe & Microsoft @ up to 70% OFF for Education Message-ID: <15529eb77660a11ab547d6b2ae5912@none-r8voc5boyu> Adobe Video Collection Pro at 54% OFF, Microsoft Office 2003 Standard at 63% OFF, Adobe Illustrator CS 11.0 at 76% OFF, Microsoft OneNote 2003 at 75% OFF, EndNote 7.0 at 67% OFF, *** EXCLUSIVELY available to Qualified Students, Faculty, and Staff of Higher Education and K-12 institutions. (see below for details) *** COMPUTER PRODUCTS FOR EDUCATION, Inc. is pleased to offer to qualified faculty, staff, and students, the best service and prices on all ACADEMIC EDITION SOFTWARE from MICROSOFT, ADOBE, SYMANTEC, COREL, AUTODESK, ENDNOTE, FILEMAKER, and several OTHER MAJOR SOFTWARE MANUFACTURERS - AT DISCOUNTS UP TO 91% OFF STANDARD RETAIL PRICES!!! To order, please visit our website at: www.education-discounts.com or call 800-679-7007. ****** PRICES VALID THROUGH FEBRUARY 28, 2005 ******** ---------------------- Education Standard You ADOBE (for Windows & Mac) Price Retail Save! ---------------------- --------- ------ ----- Creative Suite Premium 1.3 $394.95 $999 60% (Includes: InDesign,Photoshp,Illustr,Golive,AcrobatProf) Acrobat 7.0 Standard $94.95 $299 78% Acrobat 7.0 Professional* $149.95 $449 76% After Effects 6.5 Standard $289.95 $699 59% Illustrator CS 11.0 $94.95 $399 77% InDesign CS 3.0 $189.95 $699 73% PageMaker 7.0.2 $289.95 $499 42% Photoshop CS 8.0 $279.95 $649 55% Photoshop Elements 3.0 $68.95 $99 33% Premiere Pro 1.5 WinXP $239.95 $699 66% Video Collection Standard 2.5 $479.95 $999 54% Visit: www.education-discounts.com --------------------------- Education Standard You MICROSOFT: Price Retail Save! --------------------------- --------- ------ ----- Office 2003 Professional $194.95 $499 60% Office 2003 Std Students&Teachers $148.95 $399 63% Office Mac 2004 Students&Teachers $149.95 $499 70% FrontPage 2003 $98.95 $199 50% OneNote 2003 $48.95 $199 75% Publisher 2003 $97.95 $169 42% Project 2003 Professional $189.95 $999 80% Project 2003 Standard $69.95 $599 88% Visio 2003 Professional $148.95 $499 70% Visio 2003 Standard $64.95 $199 66% Visual Studio.Net Pro 2003 $94.95 $1079 91% Windows XP Professional Upg $96.95 $199 52% *Office 2003 Professional includes: Word, Excel, PowerPoint, Outlook, Access, and Publisher. **Office 2003 for Students & Teachers includes: Word, Excel, Powerpoint, and Outlook. Visit: www.education-discounts.com ---------------------- Education Standard You MACROMEDIA (for Windows & Mac) Price Retail Save! ---------------------- --------- ------ ----- Studio MX 2004 Pro $248.95 $999 75% Studio MX 2004 Standard $198.95 $799 75% Dreamweaver MX 2004 $ 99.95 $299 67% Fireworks MX 2004 $ 99.95 $199 50% Flash MX 2004 $ 99.95 $499 80% Flash MX Pro 2004 $149.95 $699 79% FreeHand MX $ 99.95 $399 75% Director MX 2004 $489.95 $1999 59% RoboDemo 5 $199.95 $499 60% Contribute 3 $ 89.95 $149 40% Visit: www.education-discounts.com --------------------------- Education Standard You SYMANTEC: Price Retail Save! --------------------------- --------- ------ ----- Norton Antivirus 2005 $36.95 $49 26% Norton Antivirus 9.0 Mac $57.95 $69 17% Norton Systemworks 2004 $59.95 $69 14% Norton Utilities 8.0 Mac $79.95 $99 20% --------------------------- Education Standard You COREL: Price Retail Save! --------------------------- --------- ------ ----- Corel WordPerfect Office 12 $98.95 $299 67% Corel Draw 12.0 $97.95 $399 72% Corel Painter 8.0 $97.95 $299 67% Visit: www.education-discounts.com --------------------------- Education Standard You AutoDesk: Price Retail Save! --------------------------- --------- ------ ----- AutoCAD 2005 Full Ver 2D+3D* $379.95 $3470 89% AutoCAD 2005 LT $147.95 $725 80% AutoCAD Architectural Dsktp 2005* $379.95 $4195 91% AutoCAD Land Desktop 2005* $459.95 $4695 90% Map 3D 2005* $479.95 $4295 89% VIZ 2005* $299.95 $1895 85% *Price for Students, Faculty, & Staff for personal use - pricing for schools for institutional use is different. Please call 800-679-7007 for more information. Visit: www.education-discounts.com --------------------------- Education Standard You EndNote: Price Retail Save! --------------------------- --------- ------ ----- EndNote 8.0-Students $109.95 $299 63% EndNote 8.0-Teacher/Schools $198.95 $299 33% Visit: www.education-discounts.com --------------------------- Education Standard You FILEMAKER: Price Retail Save! --------------------------- --------- ------ ----- FileMaker Pro 7 $149.95 $299 50% --------------------------- Education Standard You SONY: Price Retail Save! --------------------------- --------- ------ ----- Acid Music Studio $54.95 n/a Sound Forge Audio Studio $54.95 n/a Vegas Movie Studio+DVD $54.95 n/a Audio Visual Essentials Kit $99.95 n/a --------------------------- Education Standard You AVID (Hi-tech Video): Price Retail Save! --------------------------- --------- ------ ----- Avid Xpress Pro 4.3 $299.95 $1695 82% For more information, visit our website at: www.education-discounts.com or call 800-679-7007. PURCHASE ORDERS may be FAXED to: 800-679-6996 (727-530-7994). Academic Edition software is exactly the same as the Full-Retail versions** except that it has been deeply discounted for Qualified Education Buyers. For hundreds of other software products available from CPE at similar discounts, call us at 800-679-7007. All software sold by CPE is authentic original software from the manufacturer. THESE ARE NOT PIRATED COPIES. ALL SOFTWARE COMES IN ORIGINAL MANUFACTURER'S BOXES AND INCLUDES A VALID VERIFIABLE LICENSE. ---------- LICENSING: ---------- For school purchases of five to ten (5-10) or more units, depending on the product, please call 800-679-7007 for even deeper discounts on license packs. --------------------------- QUALIFIED EDUCATION BUYERS: --------------------------- The following are defined as Qualified Education Buyers. QEB?s must provide the below verification upon making any purchase. 1. Students of Higher Education - All enrolled college, junior college, community college, technical school, vocational school, and university students. 2. K-12 Students - K-12 students are eligible for most, but not all, academic-edition software products. 3. Teachers - All K-12 school and Higher Education institution teachers. 4. Faculty - All K-12 school and Higher Education institution faculty. 5. Staff - All K-12 school and Higher Education institution staff. 6. Schools - All elementary, middle and high schools (K-12 schools); vocational and technical schools; correspondence schools, including Internet correspondence schools, and all colleges, including junior and community colleges, and universities. 7. Home Schools - Home schools are now eligible to purchase most Academic Edition software. Home schools must be approved on a case by case basis. Please call for more details. ------------------------- VERIFICATION: ------------------------- Purchasers must provide fax-verification of status as being a current faculty, staff, or student. After placing your order, you simply fax to CPE either: (a) a copy of a current picture School I.D. Card; or, (b) a current paycheck stub with an alternative picture I.D. (drivers license, etc.) Sensitive information may be blacked out; or (c) Schools may purchase by faxing a valid school purchase order. For more details, call us or visit our website. No verification is required for purchases of Microsoft Office 2003 Standard or Office Mac 2004 for Students and Teachers. ------------------------- CPE is an Authorized Education Reseller for Microsoft, Adobe, AutoDesk, Corel, Symantec and many other major software manufacturers. CPE is a national software distributor committed to providing the lowest prices possible to the Education community with the best customer service!! Prices generally remain unchanged until the end of the month. However, all prices and availability are subject to change without notice, due to factors outside our control. **Some Academic Edition boxes may not include supplemental materials, such as extra fonts, image libraries, or third-party(OEM) products, which are included in the Full-Retail versions. However, the core-programs themselves are exactly the same. __________________________ If you would like to receive monthly updates of special offers, and pricing updates, please subscribe to our monthly mailer by clicking on the following link: http://www.education-discounts.com/subscrb.pl?email=raith-pcs at snf.stanford.edu&done=subscrb.htm __________________________ U-N-S-U-S-C-R-I-B-E LINK: We hope you have found this message valuable. However, if you do not wish to recieve any more offer from CPE, please click on the following link: http://www.education-discounts.com/rem.pl?email=raith-pcs at snf.stanford.edu&done=rem.htm Or call 800-679-7007 and ask to be deleted from our list. __________________________ Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 / 727-530-1709 Fax: 800-679-6996 / 727-530-7994 ___________________ Thank you, kindly!! 14520812174219 From kychen51 at snf.stanford.edu Tue Feb 15 02:38:09 2005 From: kychen51 at snf.stanford.edu (kychen51 at snf.stanford.edu) Date: Tue, 15 Feb 2005 02:38:09 -0800 Subject: Problem raith SNF 2005-02-15 02:38:08: stage stuck in loadlock procedure Message-ID: stage with sample is stuck in the loading chamber. Vacuum is still on, unable to complete sequence to unload sample. On software side, both load/unload sample is in red light mode. From jwc at snf.stanford.edu Tue Feb 15 11:15:38 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 15 Feb 2005 11:15:38 -0800 Subject: Raith: stage stuck in limbo In-Reply-To: <20050215103424.44210.qmail@web51403.mail.yahoo.com> References: <20050215103424.44210.qmail@web51403.mail.yahoo.com> Message-ID: <42124A5A.1040709@snf.stanford.edu> Hello: Sorry I was not reach able early this morning. I will be going in and working on it. Kenneth Chen wrote: >Hi James, > >During in the initial load procedure, I received an >error 6 indicating the robot arm was unable to reach a >certain point and indicated it requires manual >adjustment of the arm using the joystick and the T >button. > >It asked me to move the robot arm to the outermost >position so I just moved the joystick downward and >watched the T numbers go up until it reached around >600ish um then it said the uppermost limit reached. > >I went ahead and pressed OK on the screen and the >software indicated the robot arm was not in the >outermost position and asked if i wished to retry. I >did, but software wouldn't let me get past the 600ish >um position. > >After several futile iterations, I went ahead and said >No. No indicated that it will not proceed with >complete load/unload procedure. So I watched the >stage and the sample move back out into viewing >position. > >Now the problem is that the sequence seems to have >halted. Both the Load Sample and Unload Sample is lit >as Red and on the hardware side, the Vacuum Ready >light stays on as green. Pushing reset button next to >turbo-error doesn't seem to do anything. > >I called Arvind at 02:30 and essentially told him what >I typed above. He asked me if I held down the door as >the initial loading sequence was starting up. I did >not. He said that is probably what is causing the >problem and it requires you to clear whatever errors >there are. > > >- Kenneth Chen >coral:kychen51 > > > >__________________________________ >Do you Yahoo!? >Read only the mail you want - Yahoo! Mail SpamGuard. >http://promotions.yahoo.com/new_mail > > From jwc at snf.stanford.edu Tue Feb 15 11:46:10 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 15 Feb 2005 11:46:10 -0800 Subject: Problem raith SNF 2005-02-15 02:38:08: stage stuck in loadlock procedure Message-ID: Cleared: Emergency error no 2: PRESUMABLY communication faliure fron transfer arm inner limit switch . emergency error level 6: presumably time out on turbo pump. May have been a previous turbo time out or not reach vacuum setpoint error. Could not find in log files. JWC 02152005:11:39:00 From jwc at snf.stanford.edu Tue Feb 15 11:49:19 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 15 Feb 2005 11:49:19 -0800 Subject: Problem raith SNF 2005-02-08 09:39:24: Reports of increased scattering or leakage when blanked Message-ID: Cleared: NO new users reports of this problem, or follow ups from users. I will continue to evaluate this problem and make more measuurements of scattering from various apertures. Photonic crystal users and users working within one write field for a long write period are encouraged to spread their patterns out, spacing write field areas greater than 500 um apart to minimize this effect. JWC 02152005:11:42:00 From jwc at snf.stanford.edu Tue Feb 15 13:44:11 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 15 Feb 2005 13:44:11 -0800 Subject: Problem raith SNF 2005-02-15 13:44:11: Elevated Gun pressures observed today Message-ID: greetings: elevated gun pressures have been observed today and it is suspected that poorly cured resist was placed into the system over the last 72 hours. Friday gun vaccuum was in the range of 5.6E-010 mbar and Monday afternoon we observed 1.9E-010 mbar pressures. The emission of the FE-gun has also fallen off from nearly 100 uA to 90 uA and is slowly recovering. Users are encouraged to ensure that all resist brought into teh system has been baked to at least 180 degrees C on the hotplate or fro longer duration bakes in teh Blue M oven and must be over 150 degrees C. ALL USERS: ALL SAMPLES going into the system should be given a 1 - 2 minute at 90 - 130 degrees Celsius hotplate bake before loading into the Raith system. Please see me during my office hour if you have concerns or questions. James Conway 02152005:13:37:00 From jwc at snf.stanford.edu Tue Feb 15 17:24:21 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 15 Feb 2005 17:24:21 -0800 Subject: Problem raith SNF 2005-02-15 17:24:20: 20 um aperture scatter when blanked is above spec. Message-ID: Today I made further measurements of the blanked emission value or scatter coming down the column. EHT I values at 10 kV 20 um aperture, 5 mm WD. EHT I values with beam centered in faraday cup at 600X mag. Both RAITH and LEO Blanked: min 0.0003 max 0.0006 nA typically 0.0005 nA (up from 0.0003 nA observed in past. Raith blanked and LEO unblanked: min 0.0019 - 0.0021 typically 0.0020 nA Raith unblanked and LEO unblanked 0.0693 nA and stable. This is ~2.88% level when the specification is less than 0.5% emmision when blanked of the Beam I total value unblanked. OUT OF SPECIFCATION FOR THIS APERTURE. JWC 02152005:17:25:00 From jwc at snf.stanford.edu Tue Feb 15 17:40:09 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 15 Feb 2005 17:40:09 -0800 Subject: [Fwd: Problem raith SNF 2005-02-15 13:44:11: Elevated Gun pressures observed today BAKE YOUR RESIST TO SPECIFIED PROCESS TEMPS! Message-ID: <4212A479.8030507@snf.stanford.edu> Hello: Gun pressures are quickly coming down to normal levels and I expect to clear this flag tomorrow. Currently Gun is 1.6E -009 mbar and system is 1.56E-006 mbar. ALL USERS please follow the resist baking temperature limitations carefully. Please pre-bake your samples coming into the system just before loading on the hot plate. Note: All it will take is one contamination event with poorly cured resist contaminating the gun section and apertures in the column and all the good work and nice adjustments that were performed in the PM routine in December and January will be for naught. The system will not be able to reach performance criteria that currently we are exceeding. All users are reminded that this is a Ultra High Vacuum system and thus you must ALWAYS handle all substrates and system assemblies and holders with clean new latex gloves and clean tweezers upon opening the chamber. Again one finger print could ruin it all. I normally wear two pairs and strip off the first pair just before picking up the sample holders. Please read the message below: -------- Original Message -------- Subject: Problem raith SNF 2005-02-15 13:44:11: Elevated Gun pressures observed today Date: Tue, 15 Feb 2005 13:44:11 -0800 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Corrections made to spelling and pressure values with this update. Greetings: elevated gun pressures have been observed today and it is suspected that poorly cured resist was placed into the system over the last 72 hours. Friday gun vacuum was in the range of 5.6E-010 mbar and Monday afternoon we observed 1.9E-009 mbar pressures. The emission of the FE-gun has also fallen off from nearly 100 uA to 90 uA and is slowly recovering. Users are encouraged to ensure that all resist brought into the system has been baked to at least 180 degrees C on the hot plate or for longer duration bakes in the Blue M oven and temperature must be over 150 degrees C. ALL USERS: ALL SAMPLES going into the system should be given a 1 - 2 minute at 90 - 130 degrees Celsius hot plate bake before loading into the Raith system. Please see me during my office hour if you have concerns or questions. James Conway 02152005:13:37:00 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Feb 16 15:41:38 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 16 Feb 2005 15:41:38 -0800 Subject: Problem raith SNF 2005-02-15 13:44:11: Elevated Gun pressures observed today Message-ID: Clear this event in coral Gun pressures have returned to base ppressures normally encountered. Today at 13:30 hours WITH EHT ON AT 10kV: GUN PRESSURE 7.73E-010 TORR OR 9.8E-010 mBAR SYSTEM BASE PRESSURE 1.9E-006 TORR FIVE MINUTES AFTER LOAD LOCK EXCHANGE. JWC 15:34:00 From jwc at snf.stanford.edu Thu Feb 17 17:57:34 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 17 Feb 2005 17:57:34 -0800 Subject: Problem raith SNF 2005-02-15 17:24:20: 20 um aperture scatter when blanked is above spec. Message-ID: Cleared as no further reports of user problems reported. Scattering at elevated levels for this aperture continue. RAITH has requested further mesurements before any action from them will occur. This likely will take the long term to correct the root of the problem. JWC 02172005:17:58:00 From jwc at snf.stanford.edu Sun Feb 27 01:17:13 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 27 Feb 2005 01:17:13 -0800 Subject: Problem raith SNF 2005-02-27 01:17:12: EHT trip this afternoon system back up at 0114 Message-ID: Previous user encountered EHT trip at 10:41 AM. Computer problems resulted in communications and ELPHY + logic and several resets were required to restore system functions and beam blanking operations. LEO detector configuration repairs and saved to defaults and SEM detector function was restored.(FAQ No. 3) System up 1:00 AM user will come on at 4:00 AM and the queue will remain as it is on CORAL with this offset. JWC 02-27-2005:0121