Problem raith SNF 2005-02-15 02:38:08: stage stuck in loadlock procedure

kychen51 at snf.stanford.edu kychen51 at snf.stanford.edu
Tue Feb 15 02:38:09 PST 2005


stage with sample is stuck in the loading chamber.  Vacuum is still on, unable to complete sequence to unload sample.  On software side, both load/unload sample is in red light mode.




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