[Fwd: Problem raith SNF 2005-02-15 13:44:11: Elevated Gun pressures observed today BAKE YOUR RESIST TO SPECIFIED PROCESS TEMPS!
jwc at snf.stanford.edu
Tue Feb 15 17:40:09 PST 2005
Gun pressures are quickly coming down to normal levels and I expect to
clear this flag tomorrow. Currently Gun is 1.6E -009 mbar and system is
ALL USERS please follow the resist baking temperature limitations
carefully. Please pre-bake your samples coming into the system just
before loading on the hot plate.
Note: All it will take is one contamination event with poorly cured
resist contaminating the gun section and apertures in the column and all
the good work and nice adjustments that were performed in the PM routine
in December and January will be for naught. The system will not be able
to reach performance criteria that currently we are exceeding.
All users are reminded that this is a Ultra High Vacuum system and thus
you must ALWAYS handle all substrates and system assemblies and holders
with clean new latex gloves and clean tweezers upon opening the
chamber. Again one finger print could ruin it all. I normally wear two
pairs and strip off the first pair just before picking up the sample
Please read the message below:
-------- Original Message --------
Subject: Problem raith SNF 2005-02-15 13:44:11: Elevated Gun pressures
Date: Tue, 15 Feb 2005 13:44:11 -0800
From: jwc at snf.stanford.edu
To: raith-pcs at snf.stanford.edu
Corrections made to spelling and pressure values with this update.
elevated gun pressures have been observed today and it is suspected that poorly cured resist was placed into the system over the last 72 hours. Friday gun vacuum was in the range of 5.6E-010 mbar and Monday afternoon we observed 1.9E-009 mbar pressures. The emission of the FE-gun has also fallen off from nearly 100 uA to 90 uA and is slowly recovering.
Users are encouraged to ensure that all resist brought into the system has been baked to at least 180 degrees C on the hot plate or for longer duration bakes in the Blue M oven and temperature must be over 150 degrees C.
ALL SAMPLES going into the system should be given a 1 - 2 minute at 90 - 130 degrees Celsius hot plate bake before loading into the Raith system.
Please see me during my office hour if you have concerns or questions.
James Conway 02152005:13:37:00
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