Shutdown raith SNF 2005-01-11 14:01:46: System performance failed to pass qualification

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Jan 11 14:01:46 PST 2005


High resolution features failed to be resolved and all features appear grossly overdosed.  Smallest single pixel lines at dose factor 1 are approximately 1 - 3 um (optical micr. 1000X PL)
system placed into shut down mode. 
JWC 01112005:1356 hrs




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