Comment raith SNF 2006-01-25 16:30:17: Electrostatic Chuck and Piezo post controls calibrated

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Jan 25 16:30:21 PST 2006


The ESChuck and the piezo post positions used for leveling routines have been recalibrated and updated calibrations saved onto the system defaults.  Further testing on wafers on the Std. Sample Holder will be tested tomorrow.  Users may not a change to the center piezo positions with no concerns. 
James Conway




More information about the raith-pcs mailing list