From jwc at snf.stanford.edu Thu Oct 12 12:10:40 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 12:10:40 -0700 Subject: Comment raith SNF 2006-10-12 12:10:40: system in qualification and system test Message-ID: From jwc at snf.stanford.edu Thu Oct 12 16:57:59 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:57:59 -0700 Subject: Comment raith SNF 2006-09-12 17:41:12: Users requested to report their EBL results to raith@snf.stanford.edu Message-ID: From jwc at snf.stanford.edu Thu Oct 12 16:58:07 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:58:07 -0700 Subject: Comment raith SNF 2006-09-13 17:34:21: excellent stitching and resolution on qualification test 9112006 Message-ID: From jwc at snf.stanford.edu Thu Oct 12 16:58:15 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:58:15 -0700 Subject: Comment raith SNF 2006-09-15 10:25:03: 120 um Gun alignment out of specification. Message-ID: From jwc at snf.stanford.edu Thu Oct 12 16:58:26 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:58:26 -0700 Subject: Shutdown raith SNF 2006-09-19 14:56:25: cooling water issues causing Gun trips Message-ID: From jwc at snf.stanford.edu Thu Oct 12 16:58:35 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:58:35 -0700 Subject: Shutdown raith SNF 2006-09-19 15:55:35: elevated gun pressures after water flow failure Message-ID: From jwc at snf.stanford.edu Thu Oct 12 16:58:43 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:58:43 -0700 Subject: Shutdown raith SNF 2006-09-19 16:06:22: RAITH System off line for BAKE OUT OF GUN Message-ID: From jwc at snf.stanford.edu Thu Oct 12 17:22:48 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Oct 2006 17:22:48 -0700 Subject: Comment raith SNF 2006-10-12 17:22:47: Inital phase of qualification complete. RAITH Returns to service Message-ID: Greetings: I have qualified the raith system this afternoon and the system is now writing its first write. All interfaces and sub-system modules are working correctly. Everything looks good with left hand short shots to 14 nm. Image ripple from vibration / magnetic fields / acoustic influences are within the 5 - 7 nm normal range. Maximum resolution of images at 500 kX is 5.2 nm, just slightly above specifications for this system, but I expect this will improve as we increase the Extraction voltage. (Expect 1.5 - 3.5 nm at 10 kV, 1 - 2 nm at 20 kV - system specs. are 4 nm @ 10 kV and < 2 nm at 20 kV) FE-Gun Note: We have a brand new FE-Gun with just 54 hours of run time on it. Emission current values are much lower than the previous FE-Gun. This tip will require some time to run itself in before emission will return to normal levels. 10 kV / 30 um aperture Beam I = 0.1256 nA compared to ~ 0.250 nA previously. Tuesday next week I will increase Extraction V settings to optimal values for EBL. Currently I have left the FE-GUN set to the Factory recommended settings on Zeiss Field Service's request. (4.7 KV) USERS ARE NOT TO GO ABOVE 10 KV ACCELERATION VOLTAGE UNTIL FURTHER NOTICE. (NEXT WEEK WE WILL TEST AT HIGHER ACC .VOLTAGES...) ALL SAMPLES GOING INTO THE SYSTEM MUST BE PRE-BAKED ABOVE 90 DEGREES C FOR 2 MINUTES TO DESORB YOUR SAMPLES. ALL USERS ARE ASKED TO BE VERY CAREFUL TO HELP MAINTAIN CLEANLINESS OF THE SYSTEM AND TO CHANGE GLOVES AS YOU OPEN THE LL CHAMBER AND REACH IN TO RETRIEVE THE SAMPLE HOLDER. RAITH CHAMPIONS ONLY ON THE SYSTEM THROUGH SUN. NOON, UNLESS CLEARED BY JAMES CONWAY. CALL ME IF YOU OBSERVED ANYTHING UNUSUAL OR ENCOUNTER PROBLEMS ON THE TOOL. Many thanks to RAITH USA Field service personnel and application / hardware specialist in Dortmund and Oberkocken, Germany. Thank you to Zeiss SMT Field service for their continuing support. Post morten report due out Monday or Tuesday next week. Thank you for your support during this difficult period, James Conway Ebeam Lab - SNF From koseki at snf.stanford.edu Mon Oct 16 13:04:20 2006 From: koseki at snf.stanford.edu (koseki at snf.stanford.edu) Date: Mon, 16 Oct 2006 13:04:20 -0700 Subject: Problem raith SNF 2006-10-16 13:04:19: LEO 32 IMAGING SW MODULE CORRUPTED Message-ID: USER KOSEKI, ENCOUNTERED A PROBLEMS WITH THE LEO 32 REMOTE IMAGING FIRMWARE -- WHICH FUNCTIONALITY HAD BECOME CORRUPTED. LEO COMPUTER SHUT DOWN AND REBOOT RESOLVED PROBLEMS ON JAMES DIRECTIONS. NEW DEFAULT STATES AND MOULE HAVE BEEN RECORDED AND SAVED TO USERS LOGIN. JWC FOR KOSEKI From jwc at snf.stanford.edu Mon Oct 16 14:03:00 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Oct 2006 14:03:00 -0700 Subject: Comment raith SNF 2006-10-12 12:10:40: system in qualification and system test Message-ID: system passed qualification From jwc at snf.stanford.edu Mon Oct 16 14:03:08 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Oct 2006 14:03:08 -0700 Subject: Comment raith SNF 2006-10-12 17:22:47: Inital phase of qualification complete. RAITH Returns to service Message-ID: From jwc at snf.stanford.edu Mon Oct 16 14:03:19 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Oct 2006 14:03:19 -0700 Subject: Problem raith SNF 2006-10-16 13:04:19: LEO 32 IMAGING SW MODULE CORRUPTED Message-ID: resolved From jwc at snf.stanford.edu Tue Oct 17 12:07:36 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Oct 2006 12:07:36 -0700 Subject: Shutdown raith SNF 2006-10-17 12:07:36: New computer does not hav all confguration and drivers complete on the PC Message-ID: Greetings: WE are again down... Installing the new rebuilt computer onto the RAITH platform and I do not have all the correct drivers for our interface card or hardware. There may be other issues as we encountered last week on the loaner computer. Will return to this task after lunch. But this work should have been completed by RAITH USA Field Service and not myself. Cancelling all sessions for this afternoon. James Conway From jwc at snf.stanford.edu Tue Oct 17 17:21:39 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Oct 2006 17:21:39 -0700 Subject: Shutdown raith SNF 2006-10-17 12:07:36: New computer does not hav all confguration and drivers complete on the PC Message-ID: resolved the windows and raith configurations with the exception of the PIEZOCONTROL.DLL Seeking the proper version of the DLL and attempting to reconfigure the IEE-488 motor controller channel selections to proper channel ( I.E. channel 7) From jwc at snf.stanford.edu Tue Oct 17 17:24:51 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Oct 2006 17:24:51 -0700 Subject: Problem raith SNF 2006-10-17 17:24:50: Piezo and height control modules not enabled -- OK to write by most users Message-ID: I have resolved the windows OS and Raith computer configurations with the exception of the PIEZOCONTROL.DLL Seeking the older version of the DLL and repeatedly attempted to reconfigure the IEE-488 motor controller channel selections to proper channel ( I.E. channel 7 instead of 8). 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From jwc at snf.stanford.edu Wed Oct 18 13:28:15 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 18 Oct 2006 13:28:15 -0700 Subject: Problem raith SNF 2006-10-18 13:28:15: please report immediately if you smell smoke or electrical smell in Ebeam Lab Message-ID: Greetings: VERY IMPORTANT!!! CALL James and report to CORAL if you smell smoke or hot electrical circuits in the Ebeam Lab!!! This last evening I smelled hot electrical or Burning Printed Circuit boards in the area of the rear of the RAITH platform. As that they did not effect any changes in the circuits after the recent death of a PC piggy-back board on the vacuum control card of the LEO SEM; I suspect the problem may resurface with continued usage. Thank you for being vigilant when working in the Lab. James Conway From jwc at snf.stanford.edu Wed Oct 18 15:40:01 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 18 Oct 2006 15:40:01 -0700 Subject: Problem raith SNF 2006-10-17 17:24:50: Piezo and height control modules not enabled -- OK to write by most users Message-ID: I have restablished the modules PIEOCONTROL.DLL AND HEIGHTCONTROL.DLL after successfully reconfiguring the device name and channel configurations for the PZTEDA module. (module 7) There were difficulties in the National Instruments Automation and measurement SW used to config GPIB devices on the IEEE-488.2 buss concurrent with NI's recent upgrade of their A & M software. Raith provided some phone support on this issue this afternoon. Thanks Kevin Burcham and Cole Loomis at RAITH USA Inc. System now up and I am testing functionality before installing next service package patches to current SP for moving up from RAITH 150.exe Version 3 SP7 to SP9. James Conway From jwc at snf.stanford.edu Wed Oct 18 16:12:12 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 18 Oct 2006 16:12:12 -0700 Subject: Problem raith SNF 2006-10-18 16:12:12: patch installation corrupted ebmcurrent.dll Message-ID: GOOD GRIEF: patch installation corrupted ebmcurrent.dll NOW SEEKING CORRECT DLL TO RE-INSTALL JWC From jwc at snf.stanford.edu Thu Oct 19 17:24:43 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Oct 2006 17:24:43 -0700 Subject: Problem raith SNF 2006-10-18 13:28:15: please report immediately if you smell smoke or electrical smell in Ebeam Lab Message-ID: NO reports in last 24 hours. Smell test passed. If I can get ZEISS Field service in to finish up the last service call we will open the chassis and visually inspect the piggy back board. JWC From jwc at snf.stanford.edu Thu Oct 19 17:28:02 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Oct 2006 17:28:02 -0700 Subject: Problem raith SNF 2006-10-18 16:12:12: patch installation corrupted ebmcurrent.dll Message-ID: RESOLVED: There was an SW settings issue with Windows 2000 pro for permissions not propagating across the file system between admin. and the User logins. Users: i.e., POWER USERS... set permissions across the file system utilizing script provided by RAITH today. Now testing and troubleshooting other issues -- see next messages... James From jwc at snf.stanford.edu Thu Oct 19 18:25:30 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Oct 2006 18:25:30 -0700 Subject: Comment raith SNF 2006-10-19 18:25:29: system is up and functional NOT TO EXCEED 10 KV Message-ID: Greetings: All systems and modules are functional. Users are not to go above 10 keV acceleration voltage as we had an EHT TRIP during the first test at 15 kV. Vacuum remains good at 5.8E-010T for gun and 1.6E-006 for chamber. Good Night, JWC From hideoiw at snf.stanford.edu Sat Oct 21 03:57:10 2006 From: hideoiw at snf.stanford.edu (hideoiw at snf.stanford.edu) Date: Sat, 21 Oct 2006 03:57:10 -0700 Subject: Comment raith SNF 2006-10-21 03:57:09: unloading error Message-ID: The error message "It is not possible to pump the loadlock" had appeared already, when I came here. I logged in Coral and clicked a "retry" button several times holding the lid of the loadlock chamber, but the same error appeared. I didn't have any idea how to recover it, so I didn't click "cancel" in order to avoid another trouble. From hideoiw at snf.stanford.edu Sat Oct 21 04:06:01 2006 From: hideoiw at snf.stanford.edu (hideoiw at snf.stanford.edu) Date: Sat, 21 Oct 2006 04:06:01 -0700 Subject: Problem raith SNF 2006-10-21 04:06:01: Unloading error Message-ID: The error message "It is not possible to pump the loadlock" had appeared already, when I came here. I logged in Coral and clicked a "retry" several times holding the lid of the loadlock chamber, but the same error appeared. I didn't have any idea how to recover it, so I didn't click "cancel" in order to avoid other trouble. From gyzhang at snf.stanford.edu Sat Oct 21 10:39:46 2006 From: gyzhang at snf.stanford.edu (gyzhang at snf.stanford.edu) Date: Sat, 21 Oct 2006 10:39:46 -0700 Subject: Comment raith SNF 2006-10-21 10:39:46: sample unloaded Message-ID: The samples left in the chamber by last user was unloaded by restart the turbo pump. Project was saved. From jwc at snf.stanford.edu Mon Oct 23 11:05:34 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 23 Oct 2006 11:05:34 -0700 Subject: Comment raith SNF 2006-10-21 03:57:09: unloading error Message-ID: From jwc at snf.stanford.edu Mon Oct 23 11:05:42 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 23 Oct 2006 11:05:42 -0700 Subject: Problem raith SNF 2006-10-21 04:06:01: Unloading error Message-ID: From jwc at snf.stanford.edu Mon Oct 23 11:05:52 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 23 Oct 2006 11:05:52 -0700 Subject: Comment raith SNF 2006-10-21 10:39:46: sample unloaded Message-ID: From dinhthuc at snf.stanford.edu Thu Oct 26 01:11:21 2006 From: dinhthuc at snf.stanford.edu (dinhthuc at snf.stanford.edu) Date: Thu, 26 Oct 2006 01:11:21 -0700 Subject: Problem raith SNF 2006-10-26 01:11:21: Raith Application won't open Message-ID: When arrived, an error message had appeared on Raith PC, before logging in to Raith Application : "The script takes longer than expected to run..." Double-click on Raith150 icon, application wouldn't open. A few minutes later, pump started, and loading chamber was under vaccum. Called Raith Champions and James. Putting in Yellow light, may be someone would be able to fix this. From jwc at snf.stanford.edu Thu Oct 26 08:33:02 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 26 Oct 2006 08:33:02 -0700 Subject: Problem raith SNF 2006-10-26 01:11:21: Raith Application won't open Message-ID: User initiated a load lock error when he shut down the Raith PC after starting the LL exchange nav procedure, He may have interpretted the lockjed out control panel on the RAITH 150 SW app. as a hung computer. Resolved -- system was unavailable to users from 1:11 AM to 08:30 AM this morning. JWC From jwc at snf.stanford.edu Fri Oct 27 13:18:50 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 27 Oct 2006 13:18:50 -0700 Subject: Comment raith SNF 2006-10-27 13:18:48: User can now operate system to not to exceed 20 kV Message-ID: Greetings: Good Gun vacuum has been est. at <5.5E-010 mBar - 4.5E-010 Torr for nearly a week. Yesterday I ran at 20 kV for six hours without significant increases in Gun pressure. NO EHT trips or other problems. Users are now able to run the accerlation voltage up to but not to exceed 20keV. Further testing at high acc. voltage next week. Thank you for your support! James Conway From jwc at snf.stanford.edu Fri Oct 27 13:21:49 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 27 Oct 2006 13:21:49 -0700 Subject: Comment raith SNF 2006-10-27 13:21:44: Piezo leveling post havew been calibrated. Message-ID: Afternoon, Pieze leveling post have been recalibrated and display little to no hysteresis in either direction of travel. Leveling at the 'centered post position should render flat sample to ~ +- 5 - 12 um. More test and refined measurements next week. Thank you for your support! James Conway From kocabas at snf.stanford.edu Sun Oct 29 15:56:11 2006 From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu) Date: Sun, 29 Oct 2006 15:56:11 -0800 Subject: Problem raith SNF 2006-10-29 15:56:10: Load lock error Message-ID: I started the unload procedure to unload the previous user's sample. There was an error message saying that the system could not pump down. I hit retry, in the mean time saw that the red light on turbo pump panel was on. As suggested by the FAQ1, I hit reset and hit the retry button again. Tried the same procedure two times, the turbo pump did not start. I was not able to unload the previous user's sample. From jwc at snf.stanford.edu Mon Oct 30 11:55:09 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 30 Oct 2006 11:55:09 -0800 Subject: Problem raith SNF 2006-10-29 15:56:10: Load lock error Message-ID: zhangy cleared the LL error when she arrived this morning. I was not able to reach anyone by phone yesterday evening when I came up on the cell grid. JWC From jwc at snf.stanford.edu Mon Oct 30 11:56:32 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 30 Oct 2006 11:56:32 -0800 Subject: Comment raith SNF 2006-10-19 18:25:29: system is up and functional NOT TO EXCEED 10 KV Message-ID: Cleared Users restrictions raised to NOT TO EXCEED 20 keV. Further elevated acceleration voltage testing later this week or early next. JWC