Comment raith SNF 2006-10-12 17:22:47: Inital phase of qualification complete. RAITH Returns to service

jwc at snf.stanford.edu jwc at snf.stanford.edu
Thu Oct 12 17:22:48 PDT 2006


Greetings:
I have qualified the raith system this afternoon and the system is now writing its first write.  All interfaces and sub-system modules are working correctly.  Everything looks good with left hand short shots to 14 nm. Image ripple from vibration / magnetic fields / acoustic influences are within the 5 - 7 nm normal range. Maximum resolution of images at 500 kX is 5.2 nm, just slightly above specifications for this system,  but I expect this will improve as we increase the Extraction voltage. 
(Expect 1.5 - 3.5 nm at 10 kV, 1 - 2 nm at 20 kV  - system specs. are 4 nm @ 10 kV and < 2 nm at 20 kV)
FE-Gun Note: We have a brand new FE-Gun with just 54 hours of run time on it.  Emission current values are much lower than the previous FE-Gun. This tip will require some time to run itself in before emission will return to  normal levels.  10 kV / 30 um aperture Beam I = 0.1256 nA compared to ~ 0.250 nA previously.  Tuesday next week I will increase Extraction V settings to optimal values for EBL. Currently I have left the FE-GUN set to the Factory recommended settings on Zeiss Field Service's request.  (4.7 KV)
USERS ARE NOT TO GO ABOVE 10 KV ACCELERATION VOLTAGE UNTIL FURTHER NOTICE. (NEXT WEEK WE WILL TEST AT HIGHER ACC .VOLTAGES...)
ALL SAMPLES GOING INTO THE SYSTEM MUST BE PRE-BAKED ABOVE 90 DEGREES C FOR 2 MINUTES TO DESORB YOUR SAMPLES.
ALL USERS ARE ASKED TO BE VERY CAREFUL TO HELP MAINTAIN CLEANLINESS OF THE SYSTEM AND TO CHANGE GLOVES AS  YOU OPEN THE LL CHAMBER AND REACH IN TO RETRIEVE THE SAMPLE HOLDER.
RAITH CHAMPIONS ONLY ON THE SYSTEM THROUGH SUN. NOON, UNLESS CLEARED BY JAMES CONWAY.
 CALL ME IF YOU OBSERVED ANYTHING UNUSUAL OR ENCOUNTER PROBLEMS ON THE TOOL.
Many thanks to RAITH USA Field service personnel  and application / hardware specialist in Dortmund and Oberkocken, Germany.
Thank you to Zeiss SMT Field service for their continuing support.  Post morten report due out Monday or Tuesday next week.
Thank you for your support during this difficult period,
James Conway
Ebeam Lab - SNF




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