From gyzhang at snf.stanford.edu Wed Sep 6 15:30:26 2006 From: gyzhang at snf.stanford.edu (gyzhang at snf.stanford.edu) Date: Wed, 6 Sep 2006 15:30:26 -0700 Subject: Shutdown raith SNF 2006-09-06 15:30:25: power off Message-ID: Power is off for all parts except the monitor when i came in. From rcrane at snf.stanford.edu Thu Sep 7 15:18:25 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 7 Sep 2006 15:18:25 -0700 Subject: Problem raith SNF 2006-08-26 11:00:34: Beam current measurement Message-ID: noted From rcrane at snf.stanford.edu Thu Sep 7 15:20:04 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 7 Sep 2006 15:20:04 -0700 Subject: Comment raith SNF 2006-09-07 15:20:04: System on and stabilizing Message-ID: I have been working with Cole Loomis of Raith to perform a cold turn-on. The system has responded well vacuum wise and the gun is now on. Extractor current is 20% low and will need to stabilize overnight. I will check it Friday morning at 0615. Assuming extractor current has risen to 249uA, I will then need a superuser to declare the tool to be operational. Any helpers? Dick From rcrane at snf.stanford.edu Fri Sep 8 08:15:37 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 8 Sep 2006 08:15:37 -0700 Subject: Shutdown raith SNF 2006-09-06 15:30:25: power off Message-ID: Had a sucessful power-on for gun and vacuum systems. A superuser will be checking overall operation this morning. Dick From rcrane at snf.stanford.edu Fri Sep 8 08:17:03 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 8 Sep 2006 08:17:03 -0700 Subject: Problem raith SNF 2006-09-08 08:16:59: Needs superuser checkout Message-ID: System is almost ready for use. Is waiting for superuser checkout later this morning. Dick From gyzhang at snf.stanford.edu Fri Sep 8 16:37:44 2006 From: gyzhang at snf.stanford.edu (gyzhang at snf.stanford.edu) Date: Fri, 8 Sep 2006 16:37:44 -0700 Subject: Shutdown raith SNF 2006-09-08 16:37:43: sample can't be unloaded Message-ID: A message appeared when unloading my sample, says: 1. "It is not possible to reach the inner robot arm." Click OK, and next the messages says 2. "Mannual procedure to bring the robot arm back in its outer possition. Please, follow the instructions" Click Ok, and the next messages is 3. "Press the T-button on the Joystick" Press it, click OK, 4. "Move the robot arm with the joystck as far as possible to the outer possition" Move the T possible to zero, and click OK, 5. "Outer position reached! Press X- and Y- button on the joystick" Press the X- and Y- button and click OK, Then, No messages appeared, and the load and unload button on 'Navigator exchange' becomes red and unusable. So, i leave my sample still in the chamber and shut down the raith untill someone knows how to solve this problem. From jwc at snf.stanford.edu Mon Sep 11 10:59:58 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Sep 2006 10:59:58 -0700 Subject: Comment raith SNF 2006-07-28 11:18:11: 30 kV test completed Users can use any ACCELERATION Voltage 0.3 to 30 KV Message-ID: From jwc at snf.stanford.edu Mon Sep 11 11:00:16 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Sep 2006 11:00:16 -0700 Subject: Comment raith SNF 2006-09-07 15:20:04: System on and stabilizing Message-ID: From jwc at snf.stanford.edu Mon Sep 11 11:00:29 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Sep 2006 11:00:29 -0700 Subject: Problem raith SNF 2006-09-08 08:16:59: Needs superuser checkout Message-ID: From jwc at snf.stanford.edu Mon Sep 11 11:00:54 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Sep 2006 11:00:54 -0700 Subject: Shutdown raith SNF 2006-09-08 16:37:43: sample can't be unloaded Message-ID: From jwc at snf.stanford.edu Mon Sep 11 11:02:13 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Sep 2006 11:02:13 -0700 Subject: Problem raith SNF 2006-09-11 11:02:12: system check out in progress .. coral schedule resumes this afternoon. Message-ID: Greetings: Just returned from vacation... Will checek out the system with expectation that we can resume normal operations later this afternoon. James Conway From jwc at snf.stanford.edu Tue Sep 12 17:38:03 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 12 Sep 2006 17:38:03 -0700 Subject: Problem raith SNF 2006-09-11 11:02:12: system check out in progress .. coral schedule resumes this afternoon. Message-ID: From jwc at snf.stanford.edu Tue Sep 12 17:41:13 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 12 Sep 2006 17:41:13 -0700 Subject: Comment raith SNF 2006-09-12 17:41:12: Users requested to report their EBL results to raith@snf.stanford.edu Message-ID: Greetings, Yesterday I returned to SNF from vacation and requalified the RAITH system in a PCM QUALIFICATION RUN after recent down time. First look all EBL features appear fine and I am changing to green light status on coral. SEM these features later this week, seeking cancellation on the system to complete my work in progress. Users are requested to carefully inspect their EBL results BEFORE pattern transfer and report back to the raith at snf.stanford.edu mail list. Thank you for your support! James Conway From jwc at snf.stanford.edu Wed Sep 13 17:34:21 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 13 Sep 2006 17:34:21 -0700 Subject: Comment raith SNF 2006-09-13 17:34:21: excellent stitching and resolution on qualification test 9112006 Message-ID: greetings: We achieved excellent stitching and resolution on qualification test EXPOSURE 9112006 AFTER the system was brought up. Stitching offset WF to WF is better than the measurement gage of the LEO SEM at < 5nm. Single Pixel lines display supurb line edge roughness once dose to clear the film is reached. James Conway From jwc at snf.stanford.edu Fri Sep 15 10:25:04 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 15 Sep 2006 10:25:04 -0700 Subject: Comment raith SNF 2006-09-15 10:25:03: 120 um Gun alignment out of specification. Message-ID: Good Morning, User Topinka and DGG group reported that the 120 um Gun alignment settings were approaching the limits of the adjustment range. Today I checked this out and determined that we will need to perform a mechanical gun realignment before we can properly align the 120 um aperture Gun alignment setting properly. This may or may not have been resultant from last week's Power drop to the system -- but likley just a normal consequence of running in the FE-GUN. (Current time on FE Gun -s 1537 hours emission time.) Note: After the recent FE_GUN tip exchange ZEISS Field Service DID NOT return to complete the final aperture and gun alignments. The was no further reponse to our request at that time. 2 phone calls were left unaswered. I called RAITH USA today and requested they schedule a service visit for us on next Friday to perform adjustments and update the system settings. (Joel at RAITH USA Inc.) James Conway From sanaka at snf.stanford.edu Tue Sep 19 09:29:11 2006 From: sanaka at snf.stanford.edu (sanaka at snf.stanford.edu) Date: Tue, 19 Sep 2006 09:29:11 -0700 Subject: Problem raith SNF 2006-09-19 09:29:10: Raith right PC Message-ID: The the camera display of Raith right PC does not work now. From jwc at snf.stanford.edu Tue Sep 19 11:18:43 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 Sep 2006 11:18:43 -0700 Subject: Problem raith SNF 2006-09-19 09:29:10: Raith right PC Message-ID: reset LEO computer to resolve From jwc at snf.stanford.edu Tue Sep 19 12:20:07 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 Sep 2006 12:20:07 -0700 Subject: Problem raith SNF 2006-09-19 12:20:06: transient signals to Column Chamber Valve and problems measuring pico ammeter Message-ID: Greetings: Strange gremlins today: Column Chamber valve is opening and closing at random times. EHT gun trip error 519 sensed as pressure in gun section exceeds > 5.0e-009 GUN restarted and allowing to stabilize. Pico ammeter reading unstable and very noisy. Checking on power to the system for signals -- after lunch. Strange very stange... James From jwc at snf.stanford.edu Tue Sep 19 14:56:26 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 Sep 2006 14:56:26 -0700 Subject: Shutdown raith SNF 2006-09-19 14:56:25: cooling water issues causing Gun trips Message-ID: Second inspection of the cooling water loop found coolant level reduced from last inspection a month ago. Added water to ethylene glycol:water mixture. ~ 200 - 500 ml Next steps are to reset power to system and reevaluate the problem. FE_GUN IS DOWN - system presently offline to Users. James Conway From jwc at snf.stanford.edu Tue Sep 19 15:55:35 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 Sep 2006 15:55:35 -0700 Subject: Shutdown raith SNF 2006-09-19 15:55:35: elevated gun pressures after water flow failure Message-ID: From jwc at snf.stanford.edu Tue Sep 19 15:56:07 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 Sep 2006 15:56:07 -0700 Subject: Problem raith SNF 2006-09-19 12:20:06: transient signals to Column Chamber Valve and problems measuring pico ammeter Message-ID: From jwc at snf.stanford.edu Tue Sep 19 16:06:23 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 19 Sep 2006 16:06:23 -0700 Subject: Shutdown raith SNF 2006-09-19 16:06:22: RAITH System off line for BAKE OUT OF GUN Message-ID: Several water flow and water temperature problems this afternoon caused an automatic vent of the system chamber to air after a 1 hour time out. I was unable to troubleshoot and effect repairs to the NESLAB chiller before the time out initiated(60 minutes). 200 - 500 ml of H20 was added to the chiller today to bring up to normal 'full' level. Water flow cannot be verified to volume-- but water is flowing. The Gun pressures are elevated and the FE-Gun trips off when we bring it up due to sudden increases in Gun section pressures. RAITH Field Service suggest performing a overnight bake out and will initiate a service request with ZEISS SMT in the morning. I expect to have this system back up and available to users tomorrow afternoon or evening at best. Never a dull moment! Thank you for your support! James Conway