Comment raith SNF 2006-09-13 17:34:21: excellent stitching and resolution on qualification test 9112006

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Sep 13 17:34:21 PDT 2006


greetings:
We achieved excellent stitching and resolution on qualification test EXPOSURE 9112006 AFTER the system was brought up.
Stitching offset WF to WF is better than the measurement gage of the LEO SEM at < 5nm.  Single Pixel lines display supurb line edge roughness once dose to clear the film is reached.
James Conway




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