From xinranw at snf.stanford.edu Sat Aug 4 12:31:00 2007 From: xinranw at snf.stanford.edu (xinranw at snf.stanford.edu) Date: Sat, 4 Aug 2007 12:31:00 -0700 Subject: Comment raith SNF 2007-08-04 12:30:59: image shift Message-ID: I found the SEM shifts quite a lot when I changed the magnification. Asked by James to shut down the LEO computer and restart it (to reload the modules), and solved the problem. From jwc at snf.stanford.edu Wed Aug 8 11:00:58 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 8 Aug 2007 11:00:58 -0700 Subject: Shutdown raith SNF 2007-08-08 11:00:58: shutdown for maintenance Message-ID: Mirwais Aktary with RAITH USA did not arrive as expected. Will procede with the service schedule as planned on my own No reponse to my pages to him this morning, James From jwc at snf.stanford.edu Thu Aug 9 13:25:30 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 9 Aug 2007 13:25:30 -0700 Subject: Shutdown raith SNF 2007-08-08 11:00:58: shutdown for maintenance Message-ID: FLUSHED out cooling loop and blew 100 psi n2 through in and out cooling lines. reversed and forward flushing of entire loop after proper flow was restored. Replaced chiller unit with rebuilt repaired NESLAB unit. purged chiller loop lines and rotary pump in neslab of air bubbles. tested and measured levelness of loaner Universal Sample Holder. RAITH 150 system in system test and start qualification this afternoon -- return to users expected 18:00 today. JAMES CONWAY From jwc at snf.stanford.edu Thu Aug 9 19:52:18 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 09 Aug 2007 19:52:18 -0700 Subject: Stanford Raith system is up for Users --- **** README: Special Cautions using the Universal Sample Holder. **** Message-ID: <46BBD2E2.7050700@snf.stanford.edu> *Greetings Raith Users,* I am relieved to report the planned repairs have been completed on schedule: * Neslab chiller was replaced with the old rebuilt unit. Flow through the system cooling is 2 liters per minute (.4 gpm) * The new Universal Sample Holder (USH) on loan from RAITH USA has been tested and the pallet is level to within 1 to 2 um across a 90 mm axis in U and V. *READ ME: * *Special Cautions prescribed for use of the Universal Sample Holder:* * * The surface of this sample holder has a excellent surface finish and will allow precision placement and leveling of the USH to yield the optimal focus plane conditions for your EBL Writes. ALL USERS SHOULD MOUNT THEIR SAMPLES AND HANDLE THIS ACCESSORY WITH GREAT CARE SO AS TO NOT SCRATCH OR DEFORM THE SURFACE. ONLY TEFLON COATED SS OR PLASTIC TWEEZERS ARE TO BE USED WHEN LOADING SAMPLES. ALL SAMPLES ARE TO BE PLACED CAREFULLY DOWN ONTO THE USH AND WITHOUT SLIDING WAFERS, AND ESPECIALLY SMALLER CHIPS AND IRREGULAR SAMPLES, ACROSS THE USH'S SURFACE. PLEASE MAKE EVERY EFFORT POSSIBLE TO NOT SCRATCH THIS FIXTURE. The older standard sample holder is on top of the system if you wish to use it for your writes if you cannot load onto the USH or do not wish to risk scratching it. Several Qualification exposure were completed on 300 nm 5% 950K PMMA and I will be performing a full PCM Qualification on 100 nm resist tomorrow morning during the 10 AM - 2 PM session. Todays exposure result passed qualification. Users desiring project or application support, or seeking further fine tuning or training, are welcome to join me and 'Share the Ride' during this session. Thank you for your interest in Ebeam Technologies here at the SNF! Good Evening, James Conway :-) -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangli at snf.stanford.edu Fri Aug 10 14:23:40 2007 From: zhangli at snf.stanford.edu (zhangli at snf.stanford.edu) Date: Fri, 10 Aug 2007 14:23:40 -0700 Subject: Problem raith SNF 2007-08-10 14:23:39: cryo 1 almost 300k Message-ID: From zhangli at snf.stanford.edu Fri Aug 10 14:27:37 2007 From: zhangli at snf.stanford.edu (zhangli at snf.stanford.edu) Date: Fri, 10 Aug 2007 14:27:37 -0700 Subject: Comment raith SNF 2007-08-10 14:27:34: please ignor my rproblem report Message-ID: I meant to report the problem on ebeam Hitachi. Sorry for the confusion From rissman at snf.stanford.edu Mon Aug 13 07:36:27 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Mon, 13 Aug 2007 07:36:27 -0700 Subject: Comment raith SNF 2007-08-10 14:27:34: please ignor my rproblem report Message-ID: ok From rissman at snf.stanford.edu Mon Aug 13 07:36:50 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Mon, 13 Aug 2007 07:36:50 -0700 Subject: Problem raith SNF 2007-08-10 14:23:39: cryo 1 almost 300k Message-ID: user meant the e-beam From jwc at snf.stanford.edu Wed Aug 15 17:55:25 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 15 Aug 2007 17:55:25 -0700 Subject: Comment raith SNF 2007-08-15 17:55:24: Users are requested to report all application halts and crashes Message-ID: Hello: Users are requested to report all application halts and crashes. During the exposure there was an ungraceful exit from the exposure module controlling the EBL Write. I tried to recover by clearing modules but it crashed the application crashed. RESET the hardware and all seems fine. JWC From jwc at snf.stanford.edu Wed Aug 15 17:55:45 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 15 Aug 2007 17:55:45 -0700 Subject: Comment raith SNF 2007-07-17 10:31:20: water flow comntinues at reduced levels Message-ID: resolved From jwc at snf.stanford.edu Wed Aug 15 17:56:03 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 15 Aug 2007 17:56:03 -0700 Subject: Comment raith SNF 2007-07-21 23:49:47: Beam On/Off controller problem Message-ID: resolved From jwc at snf.stanford.edu Wed Aug 15 17:56:13 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 15 Aug 2007 17:56:13 -0700 Subject: Comment raith SNF 2007-07-25 18:07:39: Electrostatic chuck calibrations completed Message-ID: From jwc at snf.stanford.edu Wed Aug 15 17:56:22 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 15 Aug 2007 17:56:22 -0700 Subject: Comment raith SNF 2007-08-04 12:30:59: image shift Message-ID: resolved From newsletter at discount-educational-software.com Wed Aug 15 22:30:08 2007 From: newsletter at discount-educational-software.com (Academic Software News) Date: Thu, 16 Aug 2007 01:30:08 -0400 Subject: Academic Software News - August 2007 Message-ID: Computer Products for Eduation is pleased to provide Educational Software News to qualified students, faculty, staff, and schools for current news on pricing and availability of Academic Edition Software from Microsoft, Adobe, Autodesk, Corel, Quark, EndNote, FileMaker, and many other major software manufacturers. 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Purchase Orders may be faxed from schools to: 800-679-6996. Educational Software has the exact same features and functionality as the full priced retail Commercial Full-Versions of the software. Visit our website to view thousands of other computer products and accessories available from CPE at similar discounts. All software products from CPE are authentic original software from the manufacturer. These are not pirated software copies. All software comes in original manufacturer's packaging and contains a valid verifiable license. ------------------------- Volume Licensing: ------------------------- For software licensing information for schools for quantities of five to ten (5-10) or more units of software, depending on the product, please call 800-679-7007 for complete infomation. ---------------------------------------- Qualified Educational Buyers: ---------------------------------------- The following are defined as Qualified Education Buyers. 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Please call for more details. ------------------------- Verification: ------------------------- Purchasers must provide fax-verification of status as being a current faculty, staff, or student. After placing your order, you simply fax to CPE either: (a) a copy of a current picture School I.D. Card; or, (b) a current paycheck stub with an alternative picture I.D. (drivers license, etc.) Sensitive information may be blacked out; or (c) Schools may purchase by faxing a valid school purchase order. For more details, call us or visit our website. ------------------------- CPE is an Authorized Education Reseller for Microsoft, Adobe, Macromedia, AutoDesk, Corel, Sony, Avid, Pinnacle, Symantec and many other major software manufacturers. CPE is a national software distributor committed to providing the best prices and the best customer service to the Education Community!! Prices generally remain unchanged until the end of the month. However, all prices and availability are subject to change without notice, due to factors outside our control. __________________________ We hope you have found this message valuable. However, if you do not wish to recieve any more newletters from CPE, please use the following link: http://www.discount-educational-software.com/rem.asp?a=remv&e=raith-pcs at snf.stanford.edu Or call 800-679-7007 for additional options. __________________________ Sincerely, Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 Fax: 800-679-6996 news at discount-educational-software.com ___________________ THANK YOU!!! From jwc at snf.stanford.edu Mon Aug 20 11:23:34 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 20 Aug 2007 11:23:34 -0700 Subject: [Fwd: raith free] Message-ID: <46C9DC26.5010206@snf.stanford.edu> Good Morning, If other Users are seeing similar problems on their logins please let me know. This afternoon I will examine the file system and memory on the computer before I perform a total backup of the system. Thank you, James Conway -------- Original Message -------- Subject: raith free Date: Fri, 17 Aug 2007 19:36:40 -0700 From: Frank Jaeckel To: Raith SNF Mailing list semiautomatic alignment mark scan leads to repeated raith software crashes -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu internet: http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at snf.stanford.edu Wed Aug 22 00:33:25 2007 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Wed, 22 Aug 2007 00:33:25 -0700 Subject: Problem raith SNF 2007-08-22 00:33:24: water flow failure Message-ID: Water flow failed at 11:56 p.m. and was not restored by 12:30 a.m. Water flow had failed twice earlier between 9 and 10 p.m., but was restored within 10 minutes both times. Talked to James after first two failures. Left samples in chamber and coral enabled. From jwc at snf.stanford.edu Wed Aug 22 09:48:10 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 22 Aug 2007 09:48:10 -0700 Subject: Problem raith SNF 2007-08-22 00:33:24: water flow failure Message-ID: increased pressure on chiller to 90 psi which is safe maximum. Water flow reduced to 0.6 lpm (50% od specification.) This is likely a recurrent problems until RAITH can resolve this issue with replacement of E/O card cooling manifolds. JWC From jwc at snf.stanford.edu Wed Aug 22 09:48:19 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 22 Aug 2007 09:48:19 -0700 Subject: Problem raith SNF 2007-08-22 00:33:24: water flow failure Message-ID: From jwc at snf.stanford.edu Wed Aug 22 09:49:35 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 22 Aug 2007 09:49:35 -0700 Subject: Comment raith SNF 2007-08-22 09:49:35: Water flow cooling loop issues -- reduced flow Message-ID: Today I increased pressure on chiller to 90 psi which is safe maximum. Water flow reduced to 0.6 lpm (50% od specification.) This is likely a recurrent problems until RAITH can resolve this issue with replacement of E/O card cooling manifolds. Users are requested to report all alarms of this nature. James From koseki at snf.stanford.edu Sat Aug 25 16:48:06 2007 From: koseki at snf.stanford.edu (koseki at snf.stanford.edu) Date: Sat, 25 Aug 2007 16:48:06 -0700 Subject: Problem raith SNF 2007-08-25 16:48:05: No TV / Inlens image Message-ID: No TV / Inlens image are obtained. The starting up log of the LEO-SRV says "L-REM is not responding". From okilic at snf.stanford.edu Mon Aug 27 01:54:09 2007 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Mon, 27 Aug 2007 01:54:09 -0700 Subject: Problem raith SNF 2007-08-27 01:54:08: Vaccum problem Message-ID: Last three users had same error: Error 3 - Vaccum in stage chamber not ready Can't clear error. Doesn't allow to load sample. From jwc at snf.stanford.edu Mon Aug 27 11:03:25 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 27 Aug 2007 11:03:25 -0700 Subject: Problem raith SNF 2007-08-25 16:48:05: No TV / Inlens image Message-ID: shut down and restart of the SEM computer resolved this problem. Users are reminded to always shut down and not simply restart the PC when encountering communication issues. JWC From jwc at snf.stanford.edu Mon Aug 27 11:11:13 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 27 Aug 2007 11:11:13 -0700 Subject: Problem raith SNF 2007-08-27 01:54:08: Vaccum problem Message-ID: Cleared. A previous user may have vented the system chamber, possibly in an attempt to abort a Load Lock procedure in progress. Users are instructed to NEVER attempt to 'VENT' the system chamber by pressing VENT in the SEM Control Panel ==> Vacuum Tab. MOST Users cannot abort a Load Lock Procedure once started. All are instructed to allow the LOAD LOCK routine to complete the load cycle and only then unload your sample, if needed. James Conway