Comment raith SNF 2007-12-06 18:26:54: completed stage leveling test on 6 and 4 inch wafer on ESChuck

jwc at snf.stanford.edu jwc at snf.stanford.edu
Thu Dec 6 18:26:55 PST 2007


was able to level all but the 100 mm 4" wafer.
I will test another 4 inch wafer before shuit down before making any changes to the chuck adjustable kinetic mounts.
Nice beam today save parameters for 10 kv 20 um apt. onto system.
jwc




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