Comment raith SNF 2007-12-06 18:26:54: completed stage leveling test on 6 and 4 inch wafer on ESChuck
jwc at snf.stanford.edu
jwc at snf.stanford.edu
Fri Dec 14 09:14:57 PST 2007
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Comment raith SNF 2007-12-06 18:26:54: completed stage leveling test on 6 and 4 inch wafer on ESChuck
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Comment raith SNF 2007-12-06 18:26:54: completed stage leveling test on 6 and 4 inch wafer on ESChuck
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Shutdown raith SNF 2007-12-06 21:41:08: robot arm error; raith not usable right now
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