From jwc at snf.stanford.edu Fri Feb 2 09:46:47 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 2 Feb 2007 09:46:47 -0800 Subject: Problem raith SNF 2007-02-02 09:46:47: EHT trip brought gun down and 09:25 Message-ID: Upon unloading the system an EHT trip event occurred and brought down the FE_GUN. We are restarting and bringing up the FE-Gun at this time. JWC From jwc at snf.stanford.edu Fri Feb 2 13:43:18 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 2 Feb 2007 13:43:18 -0800 Subject: Problem raith SNF 2007-02-02 09:46:47: EHT trip brought gun down and 09:25 Message-ID: EHT trip was caused by an unknown transient signal no problems found resolved JWC From zhangdw at snf.stanford.edu Sun Feb 4 16:04:00 2007 From: zhangdw at snf.stanford.edu (zhangdw at snf.stanford.edu) Date: Sun, 4 Feb 2007 16:04:00 -0800 Subject: Problem raith SNF 2007-02-04 16:04:00: software fatal error Message-ID: when i unloaded my wafer, there was a software fatal error popped up. After I clicked a couple of oks and started the computer, it's still unable to unload the wafer. The error code is: 65535. From fjaeckel at snf.stanford.edu Mon Feb 5 07:41:34 2007 From: fjaeckel at snf.stanford.edu (fjaeckel at snf.stanford.edu) Date: Mon, 5 Feb 2007 07:41:34 -0800 Subject: Comment raith SNF 2007-02-05 07:41:33: software error cleared Message-ID: cleared software error with JWC on the phone at 7.40 AM From jwc at snf.stanford.edu Mon Feb 5 11:07:55 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 5 Feb 2007 11:07:55 -0800 Subject: Problem raith SNF 2007-02-04 16:04:00: software fatal error Message-ID: resoolved through phone support early this morning. JWC From jwc at snf.stanford.edu Mon Feb 5 11:08:09 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 5 Feb 2007 11:08:09 -0800 Subject: Comment raith SNF 2007-02-05 07:41:33: software error cleared Message-ID: From sanjah at snf.stanford.edu Sat Feb 10 14:24:06 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Sat, 10 Feb 2007 14:24:06 -0800 Subject: Comment raith SNF 2007-02-10 14:24:05: Fixed load lock error over the phone with jwc Message-ID: From news at discount-educational-software.com Mon Feb 12 13:37:51 2007 From: news at discount-educational-software.com (Educational Software Newsletter) Date: Mon, 12 Feb 2007 16:37:51 -0500 Subject: Educational Software Sale - February 2007 Message-ID: Computer Products for Eduation is pleased to provide Educational Software News to qualified students, faculty, staff, and schools for current news on pricing and availability of Academic Edition Software from Microsoft, Adobe, Corel, Autodesk, Quark, EndNote, FileMaker, and many other major software manufacturers. 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From jwc at snf.stanford.edu Wed Feb 14 16:21:22 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 14 Feb 2007 16:21:22 -0800 Subject: Problem raith SNF 2007-02-14 16:21:21: Standard sample holder not landing onto piezo post properly Message-ID: Attention All RAITH Users: PROBLEM ON RAITH: STANDARD SAMPLE HOLDER NOT LANDING ON KINETIC MOUNTS -- DAMAGED PIEZO POST... I have been troubleshooting several user reports of irregularly shaped or poorly defined written structures on the exposures made since January 11, 2007. This issue has become more apparent through the month, and as we perform Hi resolution measurements of our structures in SEM reviewwritten in early January. I have observed several incidents of out of focus or poorly focused structures written at the extreme edges of wafers ( EG targets and SPLines @ 0, -45 UV :: 0 +45 UV) Within the normal +- 10 mm range I often write within, I also observed significant changes in working distance as I moved through this small range of positions. Monday and today we made measurements of the surface of both a 100 mm wafer clipped to the standard sample holder and upon the Std. sample holder itself and have collected data that the holder is not landing precisely flat into the kinetic mounts. The range of non-flatness is ~ 0.500 mm! Visual and SEM inspection of the ceramic balls and points or 'jewel' tips in the Piezo post yield information that indicated that Piezo one post ceramic ball may have also become damaged and the point may be missing. All piezo post exhibit wear on their surfaces Users are requested to be vigilant of their actual working distances, and to report their WD data for specific positions across their samples and promptly report to this list if you see significant changes in WD as you move across your wafers greater than 250 um. RAITH has been contacted last Friday and we will strive to correct this issue ASAP. System is now in YELLOW Light Mode. Thank you for your support! James Conway From jwc at snf.stanford.edu Thu Feb 15 09:33:59 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 15 Feb 2007 09:33:59 -0800 Subject: Comment raith SNF 2007-02-10 14:24:05: Fixed load lock error over the phone with jwc Message-ID: From jwc at snf.stanford.edu Thu Feb 15 09:36:04 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 15 Feb 2007 09:36:04 -0800 Subject: Comment raith SNF 2007-02-15 09:36:03: load lock error cleared by JWC Message-ID: Users koseki abd kristiaan encountered a load lock error and a pattern generator not ready error during their load. SYS ADM access wqas required to clear the LL errors and reinitialize the IEE-488 comm. bus. to teh ELPHY+ digital pattern generator. System back up for users... JWC From jwc at snf.stanford.edu Thu Feb 15 17:43:50 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 15 Feb 2007 17:43:50 -0800 Subject: Problem raith SNF 2007-02-15 17:43:49: Std sample holder out of level on Piezo post Message-ID: The RAITH 150's Std sample holder is out of level as it lands on Piezo post mounts by a total delta WD of 0.514 mm. The delta WD going from 0,0 UV to 1, 2.2 U,V on the standard layout for 100 mm wafers is + 0.0072 mm, increasing in the V axis. Work around method until we repair the P1 Piezo post, which is damaged or simply worn out, is to do all your writes in U direction over a +- 2 mm range in V, then move to next V increment and adjust focus and write field alignment. Users should carefully SEM and measure their patttern CD's to specification BEFORE PATTERN TRANSFER. JAMES CONWAY From sqliu at snf.stanford.edu Sat Feb 17 02:11:50 2007 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Sat, 17 Feb 2007 02:11:50 -0800 Subject: Problem raith SNF 2007-02-17 02:11:49: Raith150 Beam blank out of sync Message-ID: The Raith 150 beak blanking control was displaying the opposite of the beam status. Could not obtain a SEM signal for write field alignment (presumably b/c the beam was blanked?) From fjaeckel at snf.stanford.edu Sat Feb 17 10:35:22 2007 From: fjaeckel at snf.stanford.edu (fjaeckel at snf.stanford.edu) Date: Sat, 17 Feb 2007 10:35:22 -0800 Subject: Comment raith SNF 2007-02-17 10:35:21: inverted blanker Message-ID: issue with inverted blanker resolved with help from Ilya; just toggled beam switch on Raith pattern processor From renshen at snf.stanford.edu Mon Feb 19 21:22:18 2007 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Mon, 19 Feb 2007 21:22:18 -0800 Subject: Problem raith SNF 2007-02-19 21:22:18: Loadlock error 5 Message-ID: Had an loadlock error during unload. Cannot fix it. From jwc at snf.stanford.edu Tue Feb 20 11:54:54 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 Feb 2007 11:54:54 -0800 Subject: Problem raith SNF 2007-02-19 21:22:18: Loadlock error 5 Message-ID: From jwc at snf.stanford.edu Tue Feb 20 11:55:01 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 Feb 2007 11:55:01 -0800 Subject: Comment raith SNF 2007-02-15 09:36:03: load lock error cleared by JWC Message-ID: From jwc at snf.stanford.edu Wed Feb 21 13:04:21 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 21 Feb 2007 13:04:21 -0800 Subject: Comment raith SNF 2007-02-17 10:35:21: inverted blanker Message-ID: From jwc at snf.stanford.edu Wed Feb 21 13:04:31 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 21 Feb 2007 13:04:31 -0800 Subject: Problem raith SNF 2007-02-17 02:11:49: Raith150 Beam blank out of sync Message-ID: From tomassikola at snf.stanford.edu Fri Feb 23 19:51:37 2007 From: tomassikola at snf.stanford.edu (tomassikola at snf.stanford.edu) Date: Fri, 23 Feb 2007 19:51:37 -0800 Subject: Problem raith SNF 2007-02-23 19:51:36: Load lock problem - resolved Message-ID: I had the problem to unload my sample during today's afternoon session.Tthe door was not held at the beginning of pumping and the software kept announcing a vacuum error even after resettng the computers. Resolved via phone assistance of JWC. From jwc at snf.stanford.edu Mon Feb 26 11:27:25 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 26 Feb 2007 11:27:25 -0800 Subject: Problem raith SNF 2007-02-23 19:51:36: Load lock problem - resolved Message-ID: resolved through phone support to user From jwc at snf.stanford.edu Mon Feb 26 11:32:22 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 26 Feb 2007 11:32:22 -0800 Subject: Problem raith SNF 2007-02-26 11:32:22: Water temperature/flow error Message-ID: high E/O card temperature event today at 10:10 AM. Loss of Electron optics card condenser lens control. (off state) Checked cooler temp 20 degrees C. E/O card temp 27.1 OK, within limits == assume transient reading to E/O monitoring. Action taken: yellow light reset to raith and leo hardward after shutting down system gracefully. Events cleared and restarted turbo/gun and LEO firmware. Checked E/O and focusinf optics now OK. James Conway.