From faraon at snf.stanford.edu Tue Jul 3 13:40:34 2007 From: faraon at snf.stanford.edu (faraon at snf.stanford.edu) Date: Tue, 3 Jul 2007 13:40:34 -0700 Subject: Problem raith SNF 2007-07-03 13:40:34: Robot arm problem - tool unusable Message-ID: There was a problem with the Raith robot arm. Administrator password is needed to get the system back up. System is in a safe state now. From mtang at snf.stanford.edu Tue Jul 3 14:43:54 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 3 Jul 2007 14:43:54 -0700 Subject: Shutdown raith SNF 2007-07-03 14:43:54: Followup on robot arm problem... Message-ID: Hi raith users -- To be on the safe side, not to mention, keep a more accurate record of equipment availability, I'm putting the raith in shutdown. There are calls and emails in to James and various service people at Raith. When a Raith Champion resolves a problem, one of the staff members will take it out of shutdown. Sorry for the inconvenience and thanks for your patience -- Mary From mtang at snf.stanford.edu Wed Jul 4 09:07:54 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 4 Jul 2007 09:07:54 -0700 Subject: Shutdown raith SNF 2007-07-03 14:43:54: Followup on robot arm problem... Message-ID: James is back in phone contact. As per his message, he will help the next user clear the problem over the phone -- please contact him. I'm presuming that everyone is aware of this now, so am clearing the shutdown so the next user can proceed with repair/resetting the system. From mtang at snf.stanford.edu Wed Jul 4 09:16:17 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 4 Jul 2007 09:16:17 -0700 Subject: Problem raith SNF 2007-07-04 09:16:16: Read before using (from James) Message-ID: Hello next Raith user, Call me on the cell 4154124825 if assistance is needed to clear load lock errors. Best JWC Sent via BlackBerry from Cingular Wireless From xinranw at snf.stanford.edu Wed Jul 4 17:22:25 2007 From: xinranw at snf.stanford.edu (xinranw at snf.stanford.edu) Date: Wed, 4 Jul 2007 17:22:25 -0700 Subject: Comment raith SNF 2007-07-04 17:22:24: raith still down... Message-ID: this afternoon I called James and was instructed by him over the phone to try to solve the problem. We were able to pump down the loadlock and chamber to performe load procedure. But unfortunately the robot arm is now stuck in the chamber and is unable to move. It's probably stuck with the sample holder that was inside the chamber. At this moment, raith is still down until further notice, James will contact Raith first thing tomorrow to ask them send some people here. From mtang at snf.stanford.edu Thu Jul 5 11:37:28 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 11:37:28 -0700 Subject: Comment raith SNF 2007-07-05 11:37:27: I'm enabled... Message-ID: Hi everyone -- I enabled over XinRan. He indicated that he didn't want to disble on Coral in case this changed the state of something in the system. So, I've left it enabled in my name, waiting for the next Raith Champrion willing to take on the challenge and call Cole. Mary From mtang at snf.stanford.edu Thu Jul 5 16:16:37 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:16:37 -0700 Subject: Problem raith SNF 2007-07-05 16:16:37: Raith up!! (conditionally!) Message-ID: >From XinRan: Hi All, Good news, raith is back up! I just worked with Cole from Raith USA to recover the system. We manually moved the robot arm out and moved the stage to the exchange position, and was able to unload the sample holder to loadlock. Right now the sample holder is in loadlock. The gun vacuum is higher than normal value( 2.7E-9mBar, probably because of poor chamber vacuum in the last few days), so Cole recommended we operate under low voltage. Since James is not here, I want to be cautious and ask all users to operate below 10KeV . The gun vacuum should be going down gradually. All raith users please carefully monitor the system during your session and inspect your wafer and report and problem to raith.stanford.edu. James will not be here until next week, so let's try to make raith work normally during this time. Thank you. Xinran From mtang at snf.stanford.edu Thu Jul 5 16:18:13 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:18:13 -0700 Subject: Problem raith SNF 2007-07-03 13:40:34: Robot arm problem - tool unusable Message-ID: It's fixed! Thanks to XinRan, Andrei, James, and Cole Loomis from Raith. See next two active problem messages before using. From mtang at snf.stanford.edu Thu Jul 5 16:18:43 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:18:43 -0700 Subject: Problem raith SNF 2007-07-04 09:16:16: Read before using (from James) Message-ID: Raith repaired, thanks to XinRan, Andrei, James, and Cole Loomis. See next two problem messages before using. From mtang at snf.stanford.edu Thu Jul 5 16:18:49 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:18:49 -0700 Subject: Comment raith SNF 2007-07-04 17:22:24: raith still down... Message-ID: From mtang at snf.stanford.edu Thu Jul 5 16:19:59 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:19:59 -0700 Subject: Comment raith SNF 2007-07-05 11:37:27: I'm enabled... Message-ID: Please enable over me. From mtang at snf.stanford.edu Thu Jul 5 16:20:32 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:20:32 -0700 Subject: Problem raith SNF 2007-07-05 16:20:31: I'm enabled. Message-ID: Please enable over me and read XinRan's previous message (in the previous active problem description.) From mtang at snf.stanford.edu Thu Jul 5 17:11:40 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 17:11:40 -0700 Subject: Problem raith SNF 2007-07-05 17:11:40: Down again... Message-ID: Sorry, but mkoto reports the system does not detect unload. Raith Champions have been notified. From mtang at snf.stanford.edu Thu Jul 5 17:12:17 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 17:12:17 -0700 Subject: Problem raith SNF 2007-07-05 16:16:37: Raith up!! (conditionally!) Message-ID: Unload problem reported by mkoto. From mtang at snf.stanford.edu Thu Jul 5 17:12:57 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 17:12:57 -0700 Subject: Problem raith SNF 2007-07-05 16:20:31: I'm enabled. Message-ID: I'm enabled again. Please read next active problem report. From ceggiman at snf.stanford.edu Thu Jul 5 23:33:29 2007 From: ceggiman at snf.stanford.edu (ceggiman at snf.stanford.edu) Date: Thu, 5 Jul 2007 23:33:29 -0700 Subject: Comment raith SNF 2007-07-05 23:33:28: Seems to work properly Message-ID: As Xinran suggested, I loaded my wafer and there was no problem with the load procedure. Resolution is not great yet. Leave Raith in yellow until James is back? From mtang at snf.stanford.edu Fri Jul 6 07:33:58 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:33:58 -0700 Subject: Problem raith SNF 2007-07-05 17:11:40: Down again... Message-ID: Thanks yet again to XinRan, the Raith is working again. Will leave in yellow until resolution is better/James returns. From mtang at snf.stanford.edu Fri Jul 6 07:34:21 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:34:21 -0700 Subject: Problem raith SNF 2007-07-06 07:34:21: Resolution Message-ID: See ceggiman's comment. From jwc at snf.stanford.edu Thu Jul 12 11:18:33 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:18:33 -0700 Subject: Problem raith SNF 2007-07-06 07:34:21: Resolution Message-ID: No resolution issues were noted beam waist is less than 2 nm at 10 keV gun vac 6.6E-010 Torr system vac 8.89E-007 torr EHT I BEAM ON = 189 uA near optimal From jwc at snf.stanford.edu Thu Jul 12 11:18:52 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:18:52 -0700 Subject: Comment raith SNF 2007-07-05 23:33:28: Seems to work properly Message-ID: cleared From kocabas at snf.stanford.edu Sun Jul 15 16:14:05 2007 From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu) Date: Sun, 15 Jul 2007 16:14:05 -0700 Subject: Comment raith SNF 2007-07-15 16:14:05: Leo Mouse Message-ID: The mouse mechanically seems to be fine. However, when I was trying to zoom in and out, response of the leo software seemed to be different when I was zooming in than out. The problem is less visible when working in a restricted window. This anisotropic response from the mouse, makes it rather hard to zoom and correct for astigmation. Ekin From jwc at snf.stanford.edu Mon Jul 16 11:14:44 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Jul 2007 11:14:44 -0700 Subject: Comment raith SNF 2007-07-15 16:14:05: Leo Mouse Message-ID: checked and found OK. But will check to see if the driveer is the current driver for the mouse model JWC From jwc at snf.stanford.edu Mon Jul 16 16:54:32 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Jul 2007 16:54:32 -0700 Subject: Problem raith SNF 2007-07-16 16:54:31: Problems with reduced water flow through Electron Optics board. Message-ID: Water flow error occurred at about 16:30 hours today. Users had been reporting starnge image jumping and drifting side to side over the weekend. Checked chiller unit in basement chase and determined that the water flow loop had been compromised and the water flow has been reduced to 0.4 liters per minute down from 0.8 to 1.2 lpm obesrved several weeks before. Cooler outflow temperature is regulated and in specification at 20 degrees C. -- return line at 23 - 24.8 degrees C. RAITH Field service was called and left voicemail at 16:45 hours. We have a rebuilt chiller in house ready to install -- but likely will wish to replace turbo pump and e/o card components and water supply and return lines at time of installation to prevent reoccurrance of problem. JWC From jwc at snf.stanford.edu Mon Jul 16 17:44:09 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 16 Jul 2007 17:44:09 -0700 Subject: Problem raith SNF 2007-07-16 17:44:09: no 2 E/O card failure due to poor water flow Message-ID: 17:15 RAITH SEM imaging and Electrostatic lens control funtions were lost and the system went into standby and a partial vent of system chamber occurred. Manually stopped the vent by unplugginbg airlock cable and reset the entire hardware on the raith using the yellow light power reset method. Successfully brought up both computers -- started all hardware and firmware iincluding restarted system chamber turbo and reestablished E/o card functionality. tested SEM imaging and handed off to the current User. Users are requested to call JWC upon encountering any further problems this evening. RAITH has been contacted by phone. JWC From kocabas at snf.stanford.edu Mon Jul 16 18:27:02 2007 From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu) Date: Mon, 16 Jul 2007 18:27:02 -0700 Subject: Comment raith SNF 2007-07-16 18:27:01: System seems OK Message-ID: After James brought the system back up, I've done focusing and write field alignment. I've started writing at 18:08. There seemed to be a bit of beam drift, but not as bad as before. Raith seems normal. Ekin From jwc at snf.stanford.edu Tue Jul 17 10:29:31 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Jul 2007 10:29:31 -0700 Subject: Problem raith SNF 2007-07-16 17:44:09: no 2 E/O card failure due to poor water flow Message-ID: recovered E/O functionality and no problems overnight cleared JWC From jwc at snf.stanford.edu Tue Jul 17 10:29:40 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Jul 2007 10:29:40 -0700 Subject: Comment raith SNF 2007-07-16 18:27:01: System seems OK Message-ID: From jwc at snf.stanford.edu Tue Jul 17 10:29:48 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Jul 2007 10:29:48 -0700 Subject: Problem raith SNF 2007-07-16 16:54:31: Problems with reduced water flow through Electron Optics board. Message-ID: From jwc at snf.stanford.edu Tue Jul 17 10:31:20 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 17 Jul 2007 10:31:20 -0700 Subject: Comment raith SNF 2007-07-17 10:31:20: water flow comntinues at reduced levels Message-ID: Water flow to the RAITH subsystems measures at a reduced level of 0.4 lpm down from 1.8 - 2.1 lpm several weeks ago. Have rebuilt chiller waiting and ready to hook up. RAITH filed service will schedule and perform the maintenance. JWC From panjun at snf.stanford.edu Sat Jul 21 23:49:48 2007 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Sat, 21 Jul 2007 23:49:48 -0700 Subject: Comment raith SNF 2007-07-21 23:49:47: Beam On/Off controller problem Message-ID: Beam On/Off controller in Raith software had problem today. Controller showed off, the beam is actually on, and vice versa. The problem has been recovered under James' the remote help. From jwc at snf.stanford.edu Wed Jul 25 18:07:39 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 25 Jul 2007 18:07:39 -0700 Subject: Comment raith SNF 2007-07-25 18:07:39: Electrostatic chuck calibrations completed Message-ID: RAITH adjustments to the ESChuck during the last service call were not completed correctly leaving a total delta WD of 165 - 174 um on 150 mm wafers mounted on the ESChuck. This was not suitable for high resolution EBL and many tests were exposed to some degree of out of focus. Figure of merit for a 100 nm features was determined from 15 runs exposed and inspected by optical microscope HPV. For a 100 nm single pixel line or area write to resolve the sample holder needs to be flat within a total delta WD of < 30 um or less at 10 kV AND 30 um aperture at 5 mm WD. 10 kv 10 um aperture 5 mm working distance limited data indicates total delta WD should be within 15 - 17 nm. more test necessary to render a suitable confidence in these measurements. THE UNIVERSAL SAMPLE HOLDER is still well out of specification and it cannot be adjusted. Measuerments made of 100 mm wafers mounted on this holder exhibit a range of measurements for the same conditions from a total delta WD between 125 and 174 um. data measurements indicate normal wear and tear consistent with usage on this holder, values are steadily increasing. (5 years...) Working with RAITH USA to obtain a new generation Universal sample holder that is adjustable and suitable for leveling on our laser interferometer Stage is in quotation, and further negotiations will determine ultimate cost to SNF. Rx: the universal sample holder is worn out and needs to be replaces as soon as a replacement is available. Thank you for your support! James Conway From jwc at snf.stanford.edu Wed Jul 25 18:24:03 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 25 Jul 2007 18:24:03 -0700 Subject: Comment raith SNF 2007-07-25 18:07:39: NO 2. Electrostatic chuck calibrations completed -- UNIVERSAL SAMPLE HOLDER continues to be out of specification for flatness. Message-ID: <46A7F7B3.8040401@snf.stanford.edu> RAITH adjustments to the Electro Static Chuck (ESChuck)during the last service call were not completed correctly leaving a total delta WD of 165 - 174 um on 150 mm wafers mounted on the ESChuck. This was not suitable for high resolution EBL and many tests were exposed to some degree of out of focus. Figure of Merit for to resolve 100 nm features was determined from 15 runs exposed and inspected by optical microscope HPV and SEM: For a 100 nm single pixel line or area write to resolve the sample holder needs to be flat within a total delta WD of < 30 um or less at 10 keV AND 30 um aperture at 5 mm WD. For 10 keV, 10 um aperture, 5 mm working distance limited data indicates total delta WD should be within 15 - 17 nm. More test necessary to render a suitable confidence in these measurements. THE UNIVERSAL SAMPLE HOLDER is still well out of specification and it cannot be mechanically adjusted. Measurements made of 100 mm wafers mounted on this holder exhibit a range of measurements for the same conditions from a total delta WD between 125 and 174 um. While this was to be corrected during the last service visit by placing shims in P1 and P2 piezo post to correct this problem further testing indicated that this was not completed correctly. My data and measurements have revealed indications of normal wear and tear consistent with usage on the universal sample holder, values are steadily increasing. (5 years...) Working with RAITH USA to obtain a next generation Universal Sample Holder that is adjustable and suitable for leveling on our laser interferometer Stage. Currently in quotation, and further negotiations will determine ultimate cost to SNF. This is a consumable item and not covered within the service contract. Conclusions: The universal sample holder is worn out and needs to be replaces as soon as a replacement is available to ensure high resolution EBL exposures of quality for a majority of our Users. Users are requested to always carefully inspect their Ebeam writes after development and to promptly report their results to this list. Users working with whole wafers interested in using the ESChuck for their writes should see me to schedule training and to do a run together. Thank you for your support! James Conway Ebeam Lab SNF From jwc at snf.stanford.edu Thu Jul 26 09:48:27 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 26 Jul 2007 09:48:27 -0700 Subject: recovered detectors after a EHT arc event on RAITH. Message-ID: <46A8D05B.1040409@snf.stanford.edu> User PanJun reported a loss of detector and SEM functionality at 09:20 AM. James was needed to troubleshoot and return the system to normal functionality. The event was likely a transient signal through the EHT high tension supply or through ground point. It was sensed as a possible FE_GUN arcing event and shut down the EHT to the gun, but did not shut down the FE-GUN. Detectors configuration was lost and I needed administrative level login and a complete computer hardware reset to reread all the SEM modules. LREM module may have been revoked by the SW, this module controls the detectors. I did not see any events recorded in the LEO server or LEOLOG.log or error.log files. System restored to functionality at 09:38 AM. We will closely monitor the conditions in the FE-GUN to see if this problem reoccurs. James Conway for Jun Pan -------------- next part -------------- An HTML attachment was scrubbed... URL: