Problem raith SNF 2007-03-30 10:24:33: Stage piezo post heights are different cannot level samples

jwc at snf.stanford.edu jwc at snf.stanford.edu
Fri Mar 30 10:24:34 PDT 2007


Stage Piezo post height P1~ 245 um too high resultsing in the standard sample holder not landing flat onto the X_Y stage .
We are working to resolve this situation 
Users are recommended to layout their patterns along the U axis and stay within a 10 mm V area or re focus and align write field alignment every 10 mm in V.  Stitching and overlay registration ius out of specification.
JWC'




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