Problem raith SNF 2007-05-07 11:02:28: LOAD LOCK ERROR

jwc at snf.stanford.edu jwc at snf.stanford.edu
Mon May 7 11:02:29 PDT 2007

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10:30 AM TODAY LWCHANG ENCOUNTERED A LOAD LOCK ERROR WHEN LL DOOR WAS CLOSED AFTER THE PUMPING CYCLE WAS STARTED.

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