Problem raith SNF 2008-04-22 18:17:11: problem encounter by several users getting level sample holders

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Apr 22 18:17:12 PDT 2008


Caution to ALL USERS:
Both the Std. sample holder and now the Universal Sample Holder USH) are not landing onto the piezo mounts correctly. We are measuring ~ 0.770 - 0.880 mm total delta working distance across a 100 mmm wafer -- when it should be less than 0.124 mm on the std. sample holder and less than 2 um on the USH.
Users are requested to reply if they encountered a stage or loading sample holder crash or misfortune during their operations over the last two weeks.  
Users writing on the system the last two weeks are requested to carefully inspect their patterns before pattern transfer to confirm their CD's are to specifications.  Please report to the raith at snf.stanford.edu list your observations.
Immediate field service request has been from RAITH USA Inc.
Thank you,
JWC




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