Problem raith SNF 2008-02-18 08:23:18: unload error

dejia at snf.stanford.edu dejia at snf.stanford.edu
Mon Feb 18 08:23:18 PST 2008


There was an error during unload routine for previous user. The error was " could not pump loadlock". Repeated attempts to overcome this was unsuccessful. Previous user's sample still in chamber. Jwc has been informed.




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