Problem raith SNF 2008-01-13 19:52:48: Stage Chamber Vacuum problem

koseki at koseki at
Sun Jan 13 19:52:48 PST 2008

I got the load lock error, and could not load the sample.
When I tried to load the sample, the Raith computer 
gave me "Error Load Lock" tab saying "Vacuum in 
the stage chamber is not ready. Please start pumping 
and if ready press retry." 
The Vac status (SEM computer -> SEM control 
-> Vacuum tab) is "At air". So, I hit "pump", and the 
turbo pump started, but after 5mins it stopped and
the vacuum status is still "at air".
Vacuum Ready lamp is off at the Airlock Control 
unit (left side of the Raith machine).
I hit the red reset button there, but the situation 
did not improve.
(Error lamp is flashing green)

More information about the raith-pcs mailing list