From shott at snf.stanford.edu Sun Jun 1 07:12:15 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 1 Jun 2008 07:12:15 -0700 Subject: Shutdown raith SNF 2008-05-31 01:00:54: Loadlock valve problem Message-ID: Moving to yellow for testing purposes. A tentative new load/unload procedure has been posted near the machine. John From vsih at snf.stanford.edu Sun Jun 1 09:50:37 2008 From: vsih at snf.stanford.edu (vsih at snf.stanford.edu) Date: Sun, 1 Jun 2008 09:50:37 -0700 Subject: Problem raith SNF 2008-06-01 09:50:37: T motor error Message-ID: While using the modified load procedure, I get the following error when I try to drive the T motor to its home position: Find Home motor T failed(-1)! From jwc at snf.stanford.edu Mon Jun 2 10:57:13 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 2 Jun 2008 10:57:13 -0700 Subject: Problem raith SNF 2008-06-01 09:50:37: T motor error Message-ID: This error can be ignored. All Users with novice log on level will not be able to complete this task nor during a loade Lock exchange. This is because the TRANSFER ARM ROBOT IS LOCKED OUT OF OPERATIONS by the SW when the LL door is closed. System and administrator level log ons can complete this task. Coders home and reset with delta values obtained before the error message occurs. JWC From jwc at snf.stanford.edu Mon Jun 2 10:57:30 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 2 Jun 2008 10:57:30 -0700 Subject: Problem raith SNF 2008-05-30 23:18:08: Robot arm error Message-ID: resolved and monitoring From jwc at snf.stanford.edu Mon Jun 2 10:58:22 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 2 Jun 2008 10:58:22 -0700 Subject: Problem raith SNF 2008-05-28 13:21:02: x motor problem again Message-ID: resolve and monitoring. Chanegs were made to the system VDB settings to resolve the issue after X motor and coder were replaced. From jwc at snf.stanford.edu Mon Jun 2 10:58:28 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 2 Jun 2008 10:58:28 -0700 Subject: Problem raith SNF 2008-05-28 03:25:01: X motor error Message-ID: From jwc at snf.stanford.edu Mon Jun 2 10:58:43 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 2 Jun 2008 10:58:43 -0700 Subject: Comment raith SNF 2008-05-23 09:55:33: Problem 2008/05/22 22:27:13 Message-ID: From jwc at snf.stanford.edu Mon Jun 2 14:07:32 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 2 Jun 2008 14:07:32 -0700 Subject: Problem raith SNF 2008-06-02 14:07:32: users may encounter T loader arm issues Message-ID: we are able to load several times before encoder and belt issues start to trip errors in the SW. Cautioning users to operate the system carefully and to no start any recovery procedures that require manual moves of the loader arm without contacting JWC. We will be replacing belt and other components of the Loader when it arrives later this week. JWC From yiyang at snf.stanford.edu Tue Jun 3 00:32:39 2008 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Tue, 3 Jun 2008 00:32:39 -0700 Subject: Problem raith SNF 2008-06-03 00:32:39: arm stuck in chamber again Message-ID: could not contact James to start manual removal procedure. Will wati until morning to get arm back out From jwc at snf.stanford.edu Tue Jun 3 10:22:01 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 3 Jun 2008 10:22:01 -0700 Subject: Problem raith SNF 2008-06-03 00:32:39: arm stuck in chamber again Message-ID: From jwc at snf.stanford.edu Tue Jun 3 16:24:18 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 3 Jun 2008 16:24:18 -0700 Subject: Problem raith SNF 2008-06-03 16:24:18: Transfer belt damaged -- only JWC will load system Message-ID: The transfer loading belt has become worn and is now slipping resulting in uncertainty in its positions as it reaches the inner or outer LL exchange positions. These positions are wildly verying at each transfer. Until this can be resolved, tomorrow evening hopefully, only James will be able to perform the LL exchange procedure as it is a manual procedure. I will be loading sample holder at 5 - 5:15 PM for all users seeking to writer this evening or overnight. All the Best, JWC From kathrynt at snf.stanford.edu Tue Jun 3 17:36:18 2008 From: kathrynt at snf.stanford.edu (kathrynt at snf.stanford.edu) Date: Tue, 3 Jun 2008 17:36:18 -0700 Subject: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2 Message-ID: Image was drifting ~.25 microns/sec Monday night after manual load procedure. From jwc at snf.stanford.edu Tue Jun 3 18:46:24 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Jun 2008 18:46:24 -0700 Subject: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2 Message-ID: <4845F3F0.70901@snf.stanford.edu> Hello Kathryn and Raith Users: Thank you for your report! I checked the LIS stage today and did not measure any significant drift or shifting of either the image or the stage SEMing an SOI chip covered with Espacer. The sample holder may have had a bad landing due to existing issues with the T loader transfer arm, or your sample could have been charging. How did the EBL exposure come out? kathrynt at snf.stanford.edu wrote: > Image was drifting ~.25 microns/sec Monday night after manual load procedure. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kathrynt at snf.stanford.edu Tue Jun 3 19:06:14 2008 From: kathrynt at snf.stanford.edu (Kathryn Todd) Date: Tue, 3 Jun 2008 19:06:14 -0700 Subject: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2 In-Reply-To: <4845F3F0.70901@snf.stanford.edu> References: <4845F3F0.70901@snf.stanford.edu> Message-ID: <4070ecc80806031906p52c3db48w4e603bf09db63cc9@mail.gmail.com> I didn't try the exposure, because the drift seemed so bad. This sample isn't different from the other samples I write, which don't generally have this drifting issue, so maybe it was a bad landing. There was (I believe) an incorrect (not zero) signal from the faraday cup on the sample holder too--I don't know if you expect this, or if it would go along with a bad landing. -Kathryn On Tue, Jun 3, 2008 at 6:46 PM, James Conway wrote: > Hello Kathryn and Raith Users: > > Thank you for your report! > > I checked the LIS stage today and did not measure any significant drift or > shifting of either the image or the stage SEMing an SOI chip covered with > Espacer. > The sample holder may have had a bad landing due to existing issues with the > T loader transfer arm, or your sample could have been charging. > How did the EBL exposure come out? > > kathrynt at snf.stanford.edu wrote: > > Image was drifting ~.25 microns/sec Monday night after manual load > procedure. > > From jwc at snf.stanford.edu Wed Jun 4 18:47:30 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Jun 2008 18:47:30 -0700 Subject: Problem raith SNF 2008-06-02 14:07:32: users may encounter T loader arm issues Message-ID: From jwc at snf.stanford.edu Wed Jun 4 18:49:34 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Jun 2008 18:49:34 -0700 Subject: Problem raith SNF 2008-06-03 16:24:18: Transfer belt damaged -- only JWC will load system Message-ID: replaced loader belt that did not show signs of any significant wear -- saved as spare. Identified problem as a slipping coupling in the T motor shaft. testing system this evening when repairs are completed. JWC From jwc at snf.stanford.edu Wed Jun 4 18:50:15 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Jun 2008 18:50:15 -0700 Subject: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2 Message-ID: sample holder likely didn't land properly on the stage From zhangy at snf.stanford.edu Fri Jun 6 22:40:22 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Fri, 6 Jun 2008 22:40:22 -0700 Subject: Problem raith SNF 2008-06-06 22:40:21: load/unload problem Message-ID: During unloading and loading my sample today, an error occurs at the "Robot arm out" step, with a message saying that "manual procedure has to be followed to bring the robot arm to outer position". However, I checked the loadlock and found out the robot arm had been totally out. Then I clicked "OK" to all the message box without doing anything real to the system. The gate valve successfully closed afterwards, and the system went back to normal. From bilee at snf.stanford.edu Sun Jun 8 08:01:54 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Sun, 8 Jun 2008 08:01:54 -0700 Subject: Problem raith SNF 2008-06-08 08:01:54: Error213 MoveRobotArm error Message-ID: encountered moverobotarm error during unloading From bilee at snf.stanford.edu Sun Jun 8 08:10:55 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Sun, 8 Jun 2008 08:10:55 -0700 Subject: Problem raith SNF 2008-06-08 08:10:53: Cannot unload. releasing the session Message-ID: Cannot unload previous user's sample. released the session till 11:30am From jwc at snf.stanford.edu Tue Jun 10 09:20:12 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 10 Jun 2008 09:20:12 -0700 Subject: Shutdown raith SNF 2008-06-10 09:20:11: turbo issues Message-ID: From jwc at snf.stanford.edu Tue Jun 10 10:18:31 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 10 Jun 2008 10:18:31 -0700 Subject: Shutdown raith SNF 2008-06-10 10:18:30: turbo pump failed Message-ID: Lev markov with raith will be in shortly to evaluate. I could not maintain turbo pumping to system. likely a time to reach suitable speed interlock failed. system will be off line to users until replacement has been switched out in system. JWC From jwc at snf.stanford.edu Tue Jun 10 18:31:51 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 10 Jun 2008 18:31:51 -0700 Subject: Shutdown raith S turbo / mechanical pump failed Message-ID: <484F2B07.1000308@snf.stanford.edu> Raith is Shutdown for all overnight operations. Early this morning we lost pumping capability on the system when either the Turbo pump or the mechanical pump backing the turbo lost functionality. We tested both and are still unsure as to the cause but we will be switching out the mechanical pump tomorrow morning and attempting to get the system back up for afternoon sessions after 2 PM. We have replacement turbo lined up but wish to cover all bases to rectify the situation. Thank you for your support! James Conway From jwc at snf.stanford.edu Fri Jun 13 12:37:15 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 13 Jun 2008 12:37:15 -0700 Subject: Problem raith SNF 2008-06-08 08:10:53: Cannot unload. releasing the session Message-ID: From jwc at snf.stanford.edu Thu Jun 19 09:03:11 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Jun 2008 09:03:11 -0700 Subject: Shutdown raith SNF 2008-06-10 10:18:30: turbo pump failed Message-ID: replaced pump twice first pump did not perform under load From jwc at snf.stanford.edu Thu Jun 19 09:03:21 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Jun 2008 09:03:21 -0700 Subject: Shutdown raith SNF 2008-06-10 09:20:11: turbo issues Message-ID: previous message From jwc at snf.stanford.edu Thu Jun 19 09:03:32 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Jun 2008 09:03:32 -0700 Subject: Problem raith SNF 2008-06-08 08:01:54: Error213 MoveRobotArm error Message-ID: testing From jwc at snf.stanford.edu Thu Jun 19 09:03:36 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Jun 2008 09:03:36 -0700 Subject: Problem raith SNF 2008-06-06 22:40:21: load/unload problem Message-ID: From jwc at snf.stanford.edu Thu Jun 19 09:04:53 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Jun 2008 09:04:53 -0700 Subject: Problem raith SNF 2008-06-19 09:04:52: FE_GUN running up Message-ID: System will be qualified this morning and afternoon as we allow the FE-GUN to run in and for Gun vacuum to improve to normal vacuum pressures. Hope to resume the coral schedule at 4 PM today JWC From jwc at snf.stanford.edu Thu Jun 19 18:32:45 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 19 Jun 2008 18:32:45 -0700 Subject: Problem raith SNF 2008-06-19 09:04:52: FE_GUN running up Message-ID: system qualified for use to 10 keV