Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2

James Conway jwc at snf.stanford.edu
Tue Jun 3 18:46:24 PDT 2008


Hello Kathryn and Raith Users:

Thank you for your report!

I checked the LIS stage today and did not measure any significant drift 
or shifting of either the image or the stage SEMing an SOI chip covered 
with Espacer.
The sample holder may have had a bad landing due to existing issues with 
the T loader transfer arm, or your sample could have been charging.
How did the EBL exposure come out?

kathrynt at snf.stanford.edu wrote:
> Image was drifting ~.25 microns/sec Monday night after manual load procedure.
>
>   
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