From jwc at snf.stanford.edu Thu May 1 14:08:31 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 1 May 2008 14:08:31 -0700 Subject: Shutdown raith SNF 2008-04-25 19:08:07: XY STAGE MALFUNCTION Message-ID: From jwc at snf.stanford.edu Thu May 1 14:08:45 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 1 May 2008 14:08:45 -0700 Subject: Shutdown raith SNF 2008-04-25 17:31:31: Sample stage trouble Message-ID: From jwc at snf.stanford.edu Thu May 1 14:08:50 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 1 May 2008 14:08:50 -0700 Subject: Comment raith SNF 2008-04-25 04:37:44: 2% 950k PMMA is running out Message-ID: From jwc at snf.stanford.edu Tue May 6 16:00:45 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 6 May 2008 16:00:45 -0700 Subject: Problem raith SNF 2008-04-23 19:15:49: calibration are required to piezo post and mech. adjustments to all sample holders need to be completed Message-ID: USH now levels within 2.7 to 3.4 um across 90 mm across wafer transit. tested twice with same result. Universal Sample holder should be used by all Users to ensure suitable focus plane for high resolution EBL. Testing in a device write to 25 nm features... JWC From newsletter at discount-educational-software.net Fri May 9 03:10:52 2008 From: newsletter at discount-educational-software.net (Education Software News) Date: Fri, 9 May 2008 06:10:52 -0400 Subject: Education Software News - May 2008 Message-ID: <0f46c5eee9fdc551a3c9f6f0b0b063@bmw> Computer Products for Education is pleased to provide Academic Software News to qualified students, faculty, staff, and schools for current news on pricing and availability of Academic Edition Software from Microsoft, Adobe, Autodesk, Corel, Quark, FileMaker, EndNote and many other major software manufacturers. Windows Vista Service Pack 1 (SP1) has been released and is now included in all Vista versions. Full versions of Windows Vista are now available in 32-bit and 64-bit editions at discounted educational prices. 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From jwc at snf.stanford.edu Tue May 13 18:14:47 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 13 May 2008 18:14:47 -0700 Subject: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing Message-ID: today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... monitoring overnight James From jwc at snf.stanford.edu Tue May 13 18:29:37 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 13 May 2008 18:29:37 -0700 Subject: [Fwd: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing] Message-ID: <482A4081.9060205@snf.stanford.edu> Greetings Users: The system just came down with problems in the Laser stage virtual motor control software or possibly a real hardware issue with the X-Y Laser stage assemblies. Xinran W. could not complete his Load Lock Procedure and currently his sample and the transfer arm are inside the system chamber. System is down for users overnight while I figure out the best approach to resolve this problem. I also just email Raith USA Inc. So have a nice quiet evening, James -------- Original Message -------- Subject: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing Date: Tue, 13 May 2008 18:14:47 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... monitoring overnight ... James -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ball.gif Type: image/gif Size: 1653 bytes Desc: not available URL: From xinranw at stanford.edu Tue May 13 19:36:28 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 13 May 2008 18:36:28 -0800 Subject: [Fwd: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing] In-Reply-To: <482A4081.9060205@snf.stanford.edu> References: <482A4081.9060205@snf.stanford.edu> Message-ID: <22ffcd060805131936o65a3f5ebsb0636fc6dd48556c@mail.gmail.com> Hi James, Actually after hitting the retry button for ~20times I was able to finish the loading procedure. So I tried to do the exposure as normal, but I found that if I want to move the stage in a relatively large distance, eg. from a clip to farady cup on sample holder, the stage some times stopped in the middle and there is an error message with virtual motor control. So I decided to unload my sample. During the way out, the same error in loading procedure appeared a couple of times ("it's not possible to reach the upper exchange position. X: -6.700") but after I hit retry the stage is now out. I also noticed that on the raith hardware module the "frequency locked" light is flashing rather than on steady. I'm not sure what caused this. Hope this information is useful for tomorrow trouble shooting. Best, Xinran On Tue, May 13, 2008 at 5:29 PM, James Conway wrote: > Greetings Users: > > The system just came down with problems in the Laser stage virtual motor > control software or possibly a real hardware issue with the X-Y Laser stage > assemblies. > Xinran W. could not complete his Load Lock Procedure and currently his > sample and the transfer arm are inside the system chamber. > > System is down for users overnight while I figure out the best approach > to resolve this problem. I also just email Raith USA Inc. > > So have a nice quiet evening, > > James > > > > > > -------- Original Message -------- Subject: Comment raith SNF 2008-05-13 > 18:14:46: x y Laser stage motor issues surfacing Date: Tue, 13 May 2008 > 18:14:47 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu > > today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. > This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... > > monitoring overnight ... > James > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ball.gif Type: image/gif Size: 1653 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed May 14 08:56:41 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 14 May 2008 08:56:41 -0700 Subject: Problem raith SNF 2008-05-14 08:56:41: x motor on stage erroring Message-ID: Several users reported problems with the X motor on the Laser Stage overnight From jwc at snf.stanford.edu Wed May 14 12:25:40 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 14 May 2008 12:25:40 -0700 Subject: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing Message-ID: From jwc at snf.stanford.edu Wed May 14 12:26:48 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 14 May 2008 12:26:48 -0700 Subject: Problem raith SNF 2008-05-14 08:56:41: x motor on stage erroring Message-ID: Changed VBD datea base settings for motor speeds scheduling a service visit after motor arrives from germany. plan is for next tuesday but still need to confirm with raith USA Field service. JWC From ahazeghi at snf.stanford.edu Wed May 14 18:06:22 2008 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 14 May 2008 18:06:22 -0700 Subject: Problem raith SNF 2008-05-14 18:06:21: X-stage motor limit error Message-ID: Stage does not move more than 1.00mm in x using joystick or move command. From ytcheng at snf.stanford.edu Thu May 15 14:31:22 2008 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Thu, 15 May 2008 14:31:22 -0700 Subject: Comment raith SNF 2008-05-15 14:31:21: Laser interferometer frequency is locked now Message-ID: James just called in and told me to reset the laser interferometer source, and the frequency is locked now. From jwc at snf.stanford.edu Fri May 16 09:25:36 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 16 May 2008 09:25:36 -0700 Subject: Comment raith SNF 2008-05-15 14:31:21: Laser interferometer frequency is locked now Message-ID: From jwc at snf.stanford.edu Fri May 16 09:25:51 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 16 May 2008 09:25:51 -0700 Subject: Problem raith SNF 2008-05-14 18:06:21: X-stage motor limit error Message-ID: cleared From jwc at snf.stanford.edu Fri May 16 13:25:13 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 16 May 2008 13:25:13 -0700 Subject: Shutdown raith SNF 2008-05-16 13:25:13: maintenance shutdown back up this afternoon Message-ID: Cooling system repairs and troubleshooting in progress Best estimate days end back to users From jwc at snf.stanford.edu Fri May 16 19:20:17 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 16 May 2008 19:20:17 -0700 Subject: Shutdown raith SNF 2008-05-16 13:25:13: maintenance shutdown back up this afternoon Message-ID: From jwc at snf.stanford.edu Fri May 16 19:21:16 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 16 May 2008 19:21:16 -0700 Subject: Comment raith SNF 2008-05-16 19:21:16: just running gun up and it all looks normal Message-ID: next users go ahead and try it out and call me if you have problems. Thank you for your support! james From jwc at snf.stanford.edu Mon May 19 17:18:39 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 19 May 2008 17:18:39 -0700 Subject: Comment raith SNF 2008-05-16 19:21:16: just running gun up and it all looks normal Message-ID: From bdai at snf.stanford.edu Thu May 22 12:59:46 2008 From: bdai at snf.stanford.edu (bdai at snf.stanford.edu) Date: Thu, 22 May 2008 12:59:46 -0700 Subject: Problem raith SNF 2008-05-22 12:59:46: Unable to Unload Sample Message-ID: I tried to unload the previous user's sample. After clicked 'unload', a warning immediately popped up saying "Loadlock error: The vacuum in the stage chamber is not ready". Retried pumping several times but it didn't work. Had to cancel my session. From jwc at snf.stanford.edu Thu May 22 14:23:37 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 22 May 2008 14:23:37 -0700 Subject: Shutdown raith SNF 2008-05-22 14:23:37: majors systems malfunction Message-ID: Loss of cooling, venting of system chanber, mechanical issues. Did some one trip off the NESLAB chiller unit?!!! Investigating and will attempt to recover ASAP JWC From jwc at snf.stanford.edu Thu May 22 16:36:10 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 22 May 2008 16:36:10 -0700 Subject: Shutdown raith SNF 2008-05-22 14:23:37: majors systems malfunction Message-ID: water flow error brought system down and it vented chamber to 500 torr and placed in standby. water flow at reduced levels at 0.4 - 0.8 lpm. possibl;e blockage or obstruction in cooling loop which was just rebuilt last friday. Tested stage and Lasers , motors for current, and recalibrated stage positions and travel limits. system back up for users. Ready to go. jwc From jwc at snf.stanford.edu Thu May 22 16:37:28 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 22 May 2008 16:37:28 -0700 Subject: Problem raith SNF 2008-05-22 12:59:46: Unable to Unload Sample Message-ID: vacuum was insufficient to perform load lock exchange due to water flow error and system problems this morning. contacted RAITH Field service and they may return next week if problem reoccurs. JWC From jwc at snf.stanford.edu Thu May 22 21:15:31 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 22 May 2008 21:15:31 -0700 Subject: Problem raith SNF 2008-05-22 21:15:31: problems during load lock exchanges - T robot arm isues Message-ID: From jwc at snf.stanford.edu Thu May 22 22:27:14 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 22 May 2008 22:27:14 -0700 Subject: Problem raith SNF 2008-05-22 22:27:13: update 2224 hours 52208 Message-ID: I rehomed and recalibrated the T arm using the find home positions routine. delta offsets were varying from 0.090 to 0.04545 mm. should be delta 0... after the homing and check of T rod we were able to load sucessfully. Loaded two users samples to allow them to work overnight. RAITH has been called and left VM and email. Will speak with them tomorrow morning. JWC outta here... From mtang at snf.stanford.edu Fri May 23 09:52:45 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 23 May 2008 09:52:45 -0700 Subject: Problem raith SNF 2008-05-22 21:15:31: problems during load lock exchanges - T robot arm isues Message-ID: See next problem report and its resolution. From mtang at snf.stanford.edu Fri May 23 09:52:53 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 23 May 2008 09:52:53 -0700 Subject: Problem raith SNF 2008-05-22 22:27:13: update 2224 hours 52208 Message-ID: From mtang at snf.stanford.edu Fri May 23 09:55:34 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 23 May 2008 09:55:34 -0700 Subject: Comment raith SNF 2008-05-23 09:55:33: Problem 2008/05/22 22:27:13 Message-ID: (Sorry, I cleared the problem before typing.) krivoire, as per James, has been able to successfully load samples at least twice. So, I'm clearing this problem according to James' instructions. Kelly will be sending out a note shortly. From ytcheng at snf.stanford.edu Sat May 24 13:16:53 2008 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Sat, 24 May 2008 13:16:53 -0700 Subject: Shutdown raith SNF 2008-05-24 13:16:53: Vacuum is lost Message-ID: When I was using the SEM, suddently, the status of Vac on the right moniter showed "off", and the electron gun shut down by itself. I also can't unload my sample because the Raith program showed "The vacuum in the stage chamber is not ready. Please start pumping and, if ready, press RETRY?" I retry again and again, but I can't fix this problem. From shott at snf.stanford.edu Sat May 24 19:06:50 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 24 May 2008 19:06:50 -0700 Subject: Shutdown raith SNF 2008-05-24 13:16:53: Vacuum is lost Message-ID: Based on the email that I've received from Linyou and Bing, I'm removing the shutdown as one they understand what they need to do to run the system properly. Thanks, John From bdai at snf.stanford.edu Sat May 24 22:50:51 2008 From: bdai at snf.stanford.edu (bdai at snf.stanford.edu) Date: Sat, 24 May 2008 22:50:51 -0700 Subject: Problem raith SNF 2008-05-24 22:50:49: Vacuum Issue Message-ID: System vacuum was off during the write field alignment. Repumping worked OK and I was able to start my writing. However, vacuum and EHT were off again during the exposure. Gun vacuum is low as well (~e-7Pa). From kathrynt at snf.stanford.edu Sun May 25 12:07:34 2008 From: kathrynt at snf.stanford.edu (kathrynt at snf.stanford.edu) Date: Sun, 25 May 2008 12:07:34 -0700 Subject: Problem raith SNF 2008-05-25 12:07:33: shutdown: turbo failure Message-ID: System vacuum was vented when we started our session. We pumped down the chamber, but the turbo spun down and vented again during the session. Gun vacuum was ok (<2 e-9) throughout. In consultation with James, we're yellow lighting the system so that Raith can work on repairs Monday, but this should be considered as a shutdown. From shott at snf.stanford.edu Tue May 27 10:02:11 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 27 May 2008 10:02:11 -0700 Subject: Problem raith SNF 2008-05-25 12:07:33: shutdown: turbo failure Message-ID: From shott at snf.stanford.edu Tue May 27 10:06:35 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 27 May 2008 10:06:35 -0700 Subject: Problem raith SNF 2008-05-27 10:06:35: Oops .... accidentally cleared problem ... Message-ID: Oops, I accidentally cleared this problem .... and it should not have been cleared yet. Sorry .... John System vacuum was vented when we started our session. We pumped down the chamber, but the turbo spun down and vented again during the session. Gun vacuum was ok (<2 e-9) throughout. In consultation with James, we're yellow lighting the system so that Raith can work on repairs Monday, but this should be considered as a shutdown. From shott at snf.stanford.edu Tue May 27 13:31:43 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 27 May 2008 13:31:43 -0700 Subject: Shutdown raith SNF 2008-05-27 13:31:43: Shutdown to address cooling issue .... Message-ID: Lev from Raith Field Service is here to look at the raith cooling problems. Cooling flow to the turbo is almost non-existent. John From shott at snf.stanford.edu Tue May 27 17:01:04 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 27 May 2008 17:01:04 -0700 Subject: Shutdown raith SNF 2008-05-27 13:31:43: Shutdown to address cooling issue .... Message-ID: Clearing because Lev has repaired the cooling problem. John From bilee at snf.stanford.edu Wed May 28 03:25:02 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Wed, 28 May 2008 03:25:02 -0700 Subject: Problem raith SNF 2008-05-28 03:25:01: X motor error Message-ID: Got this message when unloading the sample: "it is not possible to drive to the upper exchange position(x:-6.7)" Unloaded my sample by clicking "Retry" a couple of times. I think it's the same problem we had several days ago. From xinranw at snf.stanford.edu Wed May 28 13:21:04 2008 From: xinranw at snf.stanford.edu (xinranw at snf.stanford.edu) Date: Wed, 28 May 2008 13:21:04 -0700 Subject: Problem raith SNF 2008-05-28 13:21:02: x motor problem again Message-ID: I encountered the x motor problem during unload. "It's not possible to drive to the upper exchange position (X:-6.700)" I hit ~10 times retry and now the unload procedure is finished. Please be cautious and always hit retry in the pop up window. If the next user has the same problem, we should probably shut down raith and contact the raith service. From shott at snf.stanford.edu Fri May 30 11:59:37 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 30 May 2008 11:59:37 -0700 Subject: Shutdown raith SNF 2008-05-30 11:59:36: Purging cooling lines .... Message-ID: Lev Markov is here to thoroughly clean the cooling lines in the turbo pump and related items .... Thanks, John From shott at snf.stanford.edu Fri May 30 16:43:44 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 30 May 2008 16:43:44 -0700 Subject: Shutdown raith SNF 2008-05-30 11:59:36: Purging cooling lines .... Message-ID: Cooling water resolved, we believe. Current flow is 2.2-2.4 l/min @47 PSI. John From shott at snf.stanford.edu Fri May 30 22:36:56 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 30 May 2008 22:36:56 -0700 Subject: Problem raith SNF 2008-05-24 22:50:49: Vacuum Issue Message-ID: I believe that resolution of the cooling water problems has cleared this problem. John From shott at snf.stanford.edu Fri May 30 22:38:28 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 30 May 2008 22:38:28 -0700 Subject: Problem raith SNF 2008-05-27 10:06:35: Oops .... accidentally cleared problem ... Message-ID: This was a problem related to the cooling-water induced vacuum problems and has been resolved by finding and fixing a kink in the water line to the electronics. Particularly when the door closes, the line tended to kink. John From kimsangb at snf.stanford.edu Fri May 30 23:18:10 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 30 May 2008 23:18:10 -0700 Subject: Problem raith SNF 2008-05-30 23:18:08: Robot arm error Message-ID: While unloading and loading, I encountered robot arm error. The error message says "Manual procedure to bring the robot arm back in its outer position. Please follow the instruction." I followed the instruction and the it cause fatal error while closing gate valve. I had to call James and he helped me to clear the error. The system is ok but you might encounter the same error. From linyoucao at snf.stanford.edu Sat May 31 01:00:54 2008 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Sat, 31 May 2008 01:00:54 -0700 Subject: Shutdown raith SNF 2008-05-31 01:00:54: Loadlock valve problem Message-ID: It cannot be closed.