From bilee at snf.stanford.edu Sun Oct 5 05:10:08 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Sun, 5 Oct 2008 05:10:08 -0700 Subject: Problem raith SNF 2008-10-05 05:10:08: X motor error Message-ID: X motor error during unloading procedure. Was able to unlaod by clicking 'Retry' several times. From jwc at snf.stanford.edu Mon Oct 6 15:20:48 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 6 Oct 2008 15:20:48 -0700 Subject: Problem raith SNF 2008-10-05 05:10:08: X motor error Message-ID: spurious From kimsangb at snf.stanford.edu Sun Oct 19 17:16:03 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Sun, 19 Oct 2008 17:16:03 -0700 Subject: Problem raith SNF 2008-10-19 17:16:02: unable to finish unload procedure Message-ID: From bilee at snf.stanford.edu Mon Oct 20 03:57:34 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Mon, 20 Oct 2008 03:57:34 -0700 Subject: Problem raith SNF 2008-10-20 03:57:33: X motor error during the exposure Message-ID: From bilee at snf.stanford.edu Mon Oct 20 04:22:30 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Mon, 20 Oct 2008 04:22:30 -0700 Subject: Problem raith SNF 2008-10-20 04:22:29: Motor X Hardware error Message-ID: Could not finish the exposure due to the Motor X error. The error again showed up during the unloading. From jesselu at snf.stanford.edu Mon Oct 20 08:35:02 2008 From: jesselu at snf.stanford.edu (jesselu at snf.stanford.edu) Date: Mon, 20 Oct 2008 08:35:02 -0700 Subject: Shutdown raith SNF 2008-10-20 08:35:01: stage chamber vacuum not ready Message-ID: I got the above error when I tried to load my sample. Called James and he thinks a turbo pump may have failed. He asked me to put the machine in red-light mode. From jwc at snf.stanford.edu Mon Oct 20 11:47:50 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:47:50 -0700 Subject: Shutdown raith SNF 2008-10-20 08:35:01: stage chamber vacuum not ready Message-ID: for whatever reason system stoppped, or was stopped, pumping. User induced likely... JWC From jwc at snf.stanford.edu Mon Oct 20 11:48:09 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:48:09 -0700 Subject: Problem raith SNF 2008-10-20 04:22:29: Motor X Hardware error Message-ID: From jwc at snf.stanford.edu Mon Oct 20 11:48:44 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:48:44 -0700 Subject: Problem raith SNF 2008-10-20 03:57:33: X motor error during the exposure Message-ID: might have tried to move beyond range of travel of the X_Y stage Checking logs... From jwc at snf.stanford.edu Mon Oct 20 11:48:52 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 20 Oct 2008 11:48:52 -0700 Subject: Problem raith SNF 2008-10-19 17:16:02: unable to finish unload procedure Message-ID: From jwc at snf.stanford.edu Tue Oct 28 18:29:40 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 28 Oct 2008 18:29:40 -0700 Subject: Problem raith SNF 2008-10-28 18:29:39: IEEE-488 stage and motor control issues Message-ID: During my session I had difficulty maintaining my coordinate system in UVW both global and local gridds. The mark positions shifted and several times the actual spot moved during focusing. Finally encountered numerous failed target acquisitions and was unable to complete overlay writes on my wafer piece. Users are requested to report to either raith list if they observe contamination dots jumping in increasing V axis or problems in the software control of the XY LIS stage or its controlling SW interfaces. Finally performed several hardware resets of the computers and IEEE-488 Bus card and it is possible this will resolve the issues. james Conway From pgallagh at snf.stanford.edu Tue Oct 28 21:50:28 2008 From: pgallagh at snf.stanford.edu (pgallagh at snf.stanford.edu) Date: Tue, 28 Oct 2008 21:50:28 -0700 Subject: Problem raith SNF 2008-10-28 21:50:27: stage issues Message-ID: can't unload previous user's sample due to stage problems. James will troubleshoot the issue tomorrow. From emyers at snf.stanford.edu Wed Oct 29 08:27:27 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 29 Oct 2008 08:27:27 -0700 Subject: Problem raith SNF 2008-10-28 18:29:39: IEEE-488 stage and motor control issues Message-ID: From jesselu at snf.stanford.edu Wed Oct 29 10:15:00 2008 From: jesselu at snf.stanford.edu (jesselu at snf.stanford.edu) Date: Wed, 29 Oct 2008 10:15:00 -0700 Subject: Shutdown raith SNF 2008-10-29 10:15:00: raith load/unload errors Message-ID: Problems with moving the robot arm in and out during load/unload procedures. From jwc at snf.stanford.edu Wed Oct 29 10:42:59 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 29 Oct 2008 10:42:59 -0700 Subject: Shutdown raith SNF 2008-10-29 10:42:58: multiple system and interface failures Message-ID: multiple module and sub-system failures to stage and vacuum control on the RAITH 150. SYSTEM IS DOWN for today. Loss of Laser Interferometer control through IEEE-488 interface card. Gun failure and now the gun is down waiting suitable vacuum to chamber and gun section. Loss of T axis coordinates on the Load Lock transfer arm.(Stage coder signals and Virtual control module errors) Shutting down the system and will perform a yellow button reset of stage and vacuum controllers. Will need to pump to suitable vacuum for further testing to continue. Good grief! JWC