From bdai at snf.stanford.edu Mon Apr 13 05:05:19 2009 From: bdai at snf.stanford.edu (bdai at snf.stanford.edu) Date: Mon, 13 Apr 2009 05:05:19 -0700 Subject: Shutdown raith SNF 2009-04-13 05:05:19: Loadlock Fatal Error Message-ID: A fatal error "Error 214: CloseValve" popped up during unloading. Couldn't unload my wafer and had to shut down Raith. From jwc at snf.stanford.edu Mon Apr 13 11:49:18 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:49:18 -0700 Subject: Shutdown raith SNF 2009-04-13 05:05:19: Loadlock Fatal Error Message-ID: gate valve between load lock and system chamber did not get signal tone to close during load lock automatic procedure. spurious communication wait or hang. tested remcon and homed stage with no problems evident. a web browser was running in the background of the WIN XP OS but their is no network connection on that machine... system up and ready for next user From faraon at snf.stanford.edu Fri Apr 17 10:23:00 2009 From: faraon at snf.stanford.edu (faraon at snf.stanford.edu) Date: Fri, 17 Apr 2009 10:23:00 -0700 Subject: Shutdown raith SNF 2009-04-17 10:23:00: raith shut down due to repeated loadlock errors Message-ID: I put the system in a safe mode with help over the phone from RaithUSA. It seems that the robot arm belt is worn out. It will need to be either tightened or replaced. A field technician may come to Stanford to take care of that. Andrei From mtang at snf.stanford.edu Fri Apr 17 15:36:26 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Apr 2009 15:36:26 -0700 Subject: Shutdown raith SNF 2009-04-17 10:23:00: raith shut down due to repeated loadlock errors Message-ID: The field service rep replaced and tightened the belt. He also saw a water flow error, so flushed the cooling lines. According to him, the system is available to use. Please check equipment status and setup carefully before using. And many thanks to Andrei! Have fun writing! From sanaka at snf.stanford.edu Mon Apr 20 22:06:31 2009 From: sanaka at snf.stanford.edu (sanaka at snf.stanford.edu) Date: Mon, 20 Apr 2009 22:06:31 -0700 Subject: Problem raith SNF 2009-04-20 22:06:30: Raith Load locked Message-ID: Raith load locked. 6 samples are still inside. From jwc at snf.stanford.edu Tue Apr 21 12:09:29 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 21 Apr 2009 12:09:29 -0700 Subject: Problem raith SNF 2009-04-20 22:06:30: Raith Load locked Message-ID: it was a water flow error. Field service has been called to resolve this situation which has been regular and recurring... cleared Vac and Gun errors from system and have User sanaka on system to test From jwc at snf.stanford.edu Tue Apr 21 12:10:14 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 21 Apr 2009 12:10:14 -0700 Subject: Shutdown raith SNF 2009-04-21 12:10:14: continuing water cooling issues possible damage to Turbo PUMP Message-ID: I will look more closely into this issue after a break and lunch system off line to Users JWC From jwc at snf.stanford.edu Wed Apr 22 16:53:32 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 22 Apr 2009 16:53:32 -0700 Subject: Comment raith SNF 2009-04-22 16:53:31: chilling loop repairs completed Message-ID: Neslab chiller was taken out of the cooling loop tested and found to be fine with full flow on a simple Teflon hose loop. > 4 lpm conductance. Drained system by pressure back into output side removing a fair amount of debris from the system cooling loop. Likely field service last week to this loop was a simply to drain and refill with no pressure flushing. Back flushed and forward flushed ~10 gallons of city water through the cooling loop to the system and then drained completely. Refilled with 50 grain acetic acid and pure water (5% acetic acid solution) and let it circulate for two hours then drained and refilled with same concentration of this solution. The solution as it runs through the lines is now clear of particles and black fungal debris. I am continuing to recirculate this solution through the system and neslab chiller cooling loop overnight which should effectively descale any remaining scale and debris. Flow is currently set to 100 psi and 2.5 lpm. Encountered several I/O and IEE-488 comm. issues on system start up and currently recalibrating the X-Y-Z axis to the Lazer Interferometer Stage. I am having problems with the Z motor software limits and am troubleshooting this while I pump the system chamber down and start the Ion Pumps. I hope have the system up and running for Users after 7 PM; albeit with reduced emission and Beam I until the FE-Gun runs back in. Never a dull moment. JWC From jwc at snf.stanford.edu Wed Apr 22 17:26:30 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 22 Apr 2009 17:26:30 -0700 Subject: Comment raith SNF 2009-04-22 16:53:31: chilling loop repairs completed Message-ID: completed testing good to go for users From jwc at snf.stanford.edu Wed Apr 22 17:27:48 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 22 Apr 2009 17:27:48 -0700 Subject: Shutdown raith SNF 2009-04-21 12:10:14: continuing water cooling issues possible damage to Turbo PUMP Message-ID: chiller loop working fine Had to reestablish Z height coordinate limits in SW and reset coders my find all home positions routine. defragmented both PCs in preparation for back up next week. System up for Users From jwc at snf.stanford.edu Thu Apr 23 09:09:05 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 23 Apr 2009 09:09:05 -0700 Subject: Comment raith SNF 2009-04-23 09:09:04: Cooling loop flow check 9 AM 4-23-09 Message-ID: I am pleased to report that my efforts to picke the cooling line loop to th eraith appears to be sucessful. After repairs were completed last evening the measured flow rate was 2.5 lpm at ~ 100 psi measured on the output side of the chiller. This morning inspection measured 3.0 lpm plus and a very nice flow of clean solution is circulating through the loop. I am going to continue allowing this solution to circulate through the system over the weekend until RAITH Field Service personnel are available to check the system out and flush and refill with normal solutions. We will monitor flow rate and pressure twice each working day, or upon problem occurance on the tool. JWC From pgallagh at snf.stanford.edu Sat Apr 25 17:28:22 2009 From: pgallagh at snf.stanford.edu (pgallagh at snf.stanford.edu) Date: Sat, 25 Apr 2009 17:28:22 -0700 Subject: Comment raith SNF 2009-04-25 17:28:21: LREM problem - reset fixed Message-ID: Couldn't get an image during WFA. LREM module probably didn't initialize properly. Reset LEO side at James' advice--this fixed the problem.