Problem raith SNF 2009-02-14 05:09:08: fetal error of the light source

[tkodama at snf.stanford.edu]

During the previous user's fabrication process, there might be a break down of the gun. The scanning event had been stopped when I came here and the error message was show .
"During the last stitch field, there was a break down of the gun.See protocol file for time".