Comment raith SNF 2009-09-14 17:01:07: Cleared a load lock error

jwc at snf.stanford.edu jwc at snf.stanford.edu
Mon Sep 14 17:01:08 PDT 2009


Users on the tool alerted me to a Load Lock error that occurred when the turbo pump to the load lock timed out for an unknown reason.  Either it did not reach the vacuum or turbine speed set points in the time allowed by the software.  likely spurious event no cause identified so far.
Users requested to call me direct if this occurs again this evening.
James 




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