From khu834 at snf.stanford.edu Wed Jul 7 00:26:56 2010 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Wed, 7 Jul 2010 00:26:56 -0700 Subject: Shutdown raith SNF 2010-07-07 00:26:56: loadlock error Message-ID: Unloading process interrupted by Error 212 Move Robot Arm In Error 214 Close Valve The load lock chamber finished pumping down, the robot arm moved inside (did not reach desired position), the lower load lock position did not initiate. From jwc at snf.stanford.edu Wed Jul 7 08:14:28 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 7 Jul 2010 08:14:28 -0700 Subject: Shutdown raith SNF 2010-07-07 00:26:56: loadlock error Message-ID: From jwc at snf.stanford.edu Wed Jul 7 09:22:16 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 7 Jul 2010 09:22:16 -0700 Subject: Shutdown raith SNF 2010-07-07 09:22:16: Load Lock robot arm and belt problems Message-ID: A User overnight had a load Lock error due to robot arm inner position not being reached in software settings. A recovery dialog Pop up box came up and User followed the prompts and damaged the belt once it reached hard mechanical stops which likely damaged belt as it was driven beyond the mechanical stops stretching the belt or morelikely chewing up the belt cogs. (very bad from mechancal and particulate standpoint...) This pop up should not be presented to new users other than users at system administrator level and is a known issue in version 4 software -- now obsolete as we are now the only system to have NOT upgradesd. This software needs to be updated as we have encountering several periods of downtime in the last months due to these issues. Otherwise uptime would be ~ 95% plus... RAITH is trying to locate the correct part number for a load lock belt as my stock was depleted of spare belt and parts during last event now a month ago. JWC From jwc at snf.stanford.edu Wed Jul 7 13:39:45 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 7 Jul 2010 13:39:45 -0700 Subject: Shutdown raith SNF 2010-07-07 09:22:16: Load Lock robot arm and belt problems Message-ID: system under test belt was tightened and checked for wear. This belt may be replaced if problem continues afetr testing. From jwc at snf.stanford.edu Wed Jul 7 17:46:09 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 7 Jul 2010 17:46:09 -0700 Subject: Comment raith SNF 2010-07-07 17:46:08: all robot arm issues resolved ready for your work Message-ID: From jwc at snf.stanford.edu Thu Jul 8 16:56:13 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 8 Jul 2010 16:56:13 -0700 Subject: Comment raith SNF 2010-07-08 16:56:13: robot arm error encountered Message-ID: I was manually loading my sample this afternoon in order to test the robot arm and LIStage. But left the logic state settings in the wrong state. the next user whom was sharing the ride with me encountered errors on the attempt to load when he really wanted to unload and crashed into the wafer holder pallet. (USH) I manually unloaded his samples using system login and manual controls in single steps and am now testinmg the robot arm travel and positions. had I had training on this tool this would have never have likely happened. JWC From jwc at snf.stanford.edu Thu Jul 8 17:18:20 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 8 Jul 2010 17:18:20 -0700 Subject: Comment raith SNF 2010-07-08 17:18:20: robot arm tested and OK to use Message-ID: I unloaded the last users sample and tested thoroughly the T robot arm positions after finding the correct home position and zeroing the coders. Tested load and unload sequence five times and the T robot arm delta position is 0.045 mm -- passes the test OK for Users this evening and I have asked them to call me directly if they encounter problems of any kind with the robot arm. JWC From dlee76 at snf.stanford.edu Tue Jul 13 00:51:41 2010 From: dlee76 at snf.stanford.edu (dlee76 at snf.stanford.edu) Date: Tue, 13 Jul 2010 00:51:41 -0700 Subject: Shutdown raith SNF 2010-07-13 00:51:40: robot arm error message Message-ID: When I load my samples, I encounter the error message about the T-robot arm. From jwc at snf.stanford.edu Tue Jul 13 09:28:11 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 13 Jul 2010 09:28:11 -0700 Subject: Shutdown raith SNF 2010-07-13 00:51:40: robot arm error message Message-ID: coder error on inner robot arm position. checke d and went in and out 25 times to result in offset of only 0.103 mm. SW flag brought the system down to protest the system JWC From carterlin at snf.stanford.edu Tue Jul 13 10:46:12 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Tue, 13 Jul 2010 10:46:12 -0700 Subject: Problem raith SNF 2010-07-13 10:46:11: Beam current low Message-ID: it was 0.019nA last night but only 0.014nA today for 10 micron apecture From jwc at snf.stanford.edu Wed Jul 14 09:22:22 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 14 Jul 2010 09:22:22 -0700 Subject: Problem raith SNF 2010-07-13 10:46:11: Beam current low Message-ID: This is just a measurement issue. Beam Current si fine... JWC From carterlin at snf.stanford.edu Sun Jul 18 13:46:47 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sun, 18 Jul 2010 13:46:47 -0700 Subject: Problem raith SNF 2010-07-18 13:46:47: loadlock error Message-ID: Loadlock error when loading my sample. Tried to call James but he is not picking up. The next users please contact him and clear the error. Please also unload my chip at clip4. Thank you and sorry for the inconvenience From jwc at snf.stanford.edu Tue Jul 20 08:17:41 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 20 Jul 2010 08:17:41 -0700 Subject: Problem raith SNF 2010-07-18 13:46:47: loadlock error Message-ID: <4C45BE15.6050303@snf.stanford.edu> I was reached by the next user and after a long session on the phone we rehomed the robot arm, reset the inner and outer robot arm positions and tested in two load lock sequences. The first in manual control and the second in the automated controls. Resolved for a day or two or until the accumulated coder error > 0.100 mm. JWC On 7/18/2010 1:46 PM, carterlin at snf.stanford.edu wrote: > Loadlock error when loading my sample. Tried to call James but he is not picking up. The next users please contact him and clear the error. Please also unload my chip at clip4. Thank you and sorry for the inconvenience > From jwc at snf.stanford.edu Tue Jul 20 08:52:09 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 Jul 2010 08:52:09 -0700 Subject: Problem raith SNF 2010-07-18 13:46:47: loadlock error Message-ID: From jwc at snf.stanford.edu Tue Jul 20 08:52:14 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 Jul 2010 08:52:14 -0700 Subject: Comment raith SNF 2010-07-08 17:18:20: robot arm tested and OK to use Message-ID: From jwc at snf.stanford.edu Tue Jul 20 08:52:17 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 Jul 2010 08:52:17 -0700 Subject: Comment raith SNF 2010-07-08 16:56:13: robot arm error encountered Message-ID: From jwc at snf.stanford.edu Tue Jul 20 08:52:22 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 Jul 2010 08:52:22 -0700 Subject: Comment raith SNF 2010-07-07 17:46:08: all robot arm issues resolved ready for your work Message-ID: From arkam at snf.stanford.edu Thu Jul 22 20:03:45 2010 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Thu, 22 Jul 2010 20:03:45 -0700 Subject: Comment raith SNF 2010-07-22 20:03:45: Robot Arm Error Message-ID: Fixed it with James's help From jwc at snf.stanford.edu Fri Jul 23 11:23:36 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 23 Jul 2010 11:23:36 -0700 Subject: Comment raith SNF 2010-07-22 20:03:45: Robot Arm Error Message-ID: resolved with phone support from JWC Four calls last night each time we completed the emergency recovery procedure and then found new home T robot arm outer position. At the 6 AM call from bryan e we reset the inner RA position and continue testing through today. RAith Field service is scheduled and they may be able to come in today instead of next Tuesday JWC From fanpy at snf.stanford.edu Tue Jul 27 01:00:40 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Tue, 27 Jul 2010 01:00:40 -0700 Subject: Shutdown raith SNF 2010-07-27 01:00:40: unload error: unable to turn off EHT Message-ID: error message popped up the first step of unloading, saying that it's not able to switch off EHT. Tried log in with different accounts on both raith and leo, and not able to clear the error. Previous user's sample stuck in the chamber. From jwc at snf.stanford.edu Tue Jul 27 08:39:49 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 27 Jul 2010 08:39:49 -0700 Subject: Shutdown raith SNF 2010-07-27 01:00:40: unload error: unable to turn off EHT Message-ID: