From sgchong at snf.stanford.edu Tue Mar 2 01:56:06 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Tue, 2 Mar 2010 01:56:06 -0800 Subject: Problem raith SNF 2010-03-02 01:56:05: alignment issue Message-ID: raith seems to have alignment issues. After the local 3P (11mm x 5mm apart), driving the stage back to the 1st point results in an alignment error of ~2um. From jwc at snf.stanford.edu Tue Mar 2 09:10:26 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 2 Mar 2010 09:10:26 -0800 Subject: Problem raith SNF 2010-03-02 01:56:05: alignment issue Message-ID: This is weird likely student user issue... will look into it today From jwc at snf.stanford.edu Wed Mar 3 10:51:44 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 03 Mar 2010 10:51:44 -0800 Subject: Problem raith SNF 2010-03-02 01:56:05: alignment issue Message-ID: <4B8EAFC0.2050905@snf.stanford.edu> No problems were discovered during a detailed test of the LIStage and the UVW coordinates before and after adjustments. Likely Users optical lithography layer experienced some run out or skew distortion in the mask fabrication. Will be performing a session tomorrow and this afternoon with Soogine to determine if it was procedural issue or sources from the optical mask layer chip positions. JWC jwc at snf.stanford.edu wrote: > This is weird likely student user issue... > will look into it today > > From sgchong at snf.stanford.edu Sat Mar 27 01:37:08 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 27 Mar 2010 01:37:08 -0700 Subject: Shutdown raith SNF 2010-03-27 01:37:08: loadlock failure Message-ID: Not able to pump down loadlock From shott at snf.stanford.edu Sun Mar 28 18:51:15 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 28 Mar 2010 18:51:15 -0700 Subject: Shutdown raith SNF 2010-03-27 01:37:08: loadlock failure Message-ID: Soogine reports: "The loadlock error has been cleared, and it looks like the tool is usable now. The tool is still in shutdown mode, though, and James is not available to put it out of shutdown mode. Maybe you can use the tool with James' permission? Wanted to let everyone know, in case there is any urgent work that needs to be done." As a result I'm clearing this in hopes that someone will actually be able to use it this evening. John