From sgchong at snf.stanford.edu Sun Oct 10 15:03:06 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 10 Oct 2010 15:03:06 -0700 Subject: Problem raith SNF 2010-10-10 15:03:06: robot arm error Message-ID: While loading, I got the error message, "It is not possible to reach the inner position of the robot arm." I followed the procedure given in the pop-up message, pressing "T" on the joystick and driving it all the way to the outermost position, but then got the error message, "It is not possible to reach the outer position of the robot arm." Then the software was telling me that the loadlock could be in a critical state and that I should consult the manual. I tried driving the robot arm to the outermost position once more (following the pop-up instructions), and this time the pop-up message disappeared. However, when I press "load sample," it gives me an error message, telling me to fix the error in the previous procedure. From sgchong at snf.stanford.edu Sun Oct 10 15:38:06 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 10 Oct 2010 15:38:06 -0700 Subject: Comment raith SNF 2010-10-10 15:38:05: inner/outer robot arm set to proper position Message-ID: From jwc at snf.stanford.edu Mon Oct 11 13:03:21 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Oct 2010 13:03:21 -0700 Subject: Problem raith SNF 2010-10-10 15:03:06: robot arm error Message-ID: From jwc at snf.stanford.edu Mon Oct 11 13:03:29 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 11 Oct 2010 13:03:29 -0700 Subject: Comment raith SNF 2010-10-10 15:38:05: inner/outer robot arm set to proper position Message-ID: From bilee at snf.stanford.edu Tue Oct 12 01:59:35 2010 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Tue, 12 Oct 2010 01:59:35 -0700 Subject: Shutdown raith SNF 2010-10-12 01:59:34: Robot arm/load lock error Message-ID: Robot arm / load lock error occurred. "fatal error loadlock: the system can be in a critical state". From jwc at snf.stanford.edu Tue Oct 12 08:11:18 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 12 Oct 2010 08:11:18 -0700 Subject: Shutdown raith SNF 2010-10-12 01:59:34: Robot arm/load lock error Message-ID: From jwc at snf.stanford.edu Tue Oct 12 08:57:20 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 12 Oct 2010 08:57:20 -0700 Subject: Comment raith SNF 2010-10-12 08:57:20: user error tripped load lock error last evening Message-ID: user mistake in proceduresn caused trip of load lock error last evening They didn't hold down the load lock door or later hit cancel on the error flag in the software for load lock could not be pumped down... From kavehm at snf.stanford.edu Tue Oct 12 11:24:05 2010 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Tue, 12 Oct 2010 11:24:05 -0700 Subject: Comment raith SNF 2010-10-12 11:24:04: Beam current Message-ID: In order to measure the beam current, we need to use the "Faraday cup on the stage", instead of "Faraday cup on the holder" From dlee76 at snf.stanford.edu Tue Oct 12 11:27:09 2010 From: dlee76 at snf.stanford.edu (dlee76 at snf.stanford.edu) Date: Tue, 12 Oct 2010 11:27:09 -0700 Subject: Problem raith SNF 2010-10-12 11:27:09: Beam current Message-ID: In order to measure the beam current, we need to use the "Faraday cup on the stage", instead of "Faraday cup on the holder" From jwc at snf.stanford.edu Tue Oct 12 14:39:18 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 12 Oct 2010 14:39:18 -0700 Subject: Comment raith SNF 2010-10-12 11:24:04: Beam current Message-ID: From jwc at snf.stanford.edu Wed Oct 13 16:21:32 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 13 Oct 2010 16:21:32 -0700 Subject: Problem raith SNF 2010-10-13 16:21:31: problem 2 this week: TMC gimbal isolation post No 3 went flat... Message-ID: Second problem on the tool identified this week. On my TMC Quiet Island Vibration Isolation system, the third of three iso-stats which is a pneumatic isolation post and gimbal was discovered flat and did not have sufficient pressure available or a leak present in order to float the RAITH 150 platform. This is why we are obaserving slightly higher than normal vibration on the tooling. It is presumed that this is simply a maintenance issue or normal wear and tear as its nearly ten years old. Need assistance to trace out the pressure lines and servos that control this unit to ensure they are functioning before seeking replacement or repair to the iso-stat itself. Will reevaluate when I have some time available tomorrow... hopefully with Ted assistance. :-) JWC From jwc at snf.stanford.edu Wed Oct 13 18:02:06 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 13 Oct 2010 18:02:06 -0700 Subject: Comment raith SNF 2010-10-12 08:57:20: user error tripped load lock error last evening Message-ID: From jwc at snf.stanford.edu Wed Oct 13 18:02:52 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 13 Oct 2010 18:02:52 -0700 Subject: Problem raith SNF 2010-10-12 11:27:09: Beam current Message-ID: checked and cleaned groundung stub to Universal sample holder all is fine now after many test From jwc at snf.stanford.edu Thu Oct 14 16:27:02 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 14 Oct 2010 16:27:02 -0700 Subject: Problem raith SNF 2010-10-14 16:27:01: faraday cup on USH does not measure consistently -spurious Message-ID: Today load of Universal Sample holder for exposure failed the test of the faraday cup on holder. This seems to be a spurious problem and may be related to a change in the position of the contact slider below the sample holder on the stage. The readings while often correct exhiobit a large unacceptable sigma in the measurements (N = 10 for each FC position) while FARADAY CUP on stage reads consistently within range of 0.00005 nA. Raith has been contacted and I upgrade a service request today. Users of the STD. Sample holder are requested to check and coompare Beam I reading from each FC tyo assist me. James From jwc at snf.stanford.edu Wed Oct 20 08:08:25 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 20 Oct 2010 08:08:25 -0700 Subject: Problem raith SNF 2010-10-14 16:27:01: faraday cup on USH does not measure consistently -spurious Message-ID: tested again Tuesday evening and al is OK clearing this problem From jwc at snf.stanford.edu Wed Oct 20 10:36:03 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 20 Oct 2010 10:36:03 -0700 Subject: Problem raith SNF 2010-10-13 16:21:31: problem 2 this week: TMC gimbal isolation post No 3 went flat... Message-ID: adjusted the gimbal leveling control arms to compensate for normal compression of the foam inserts on the height sensors through the last nine years of usage. Platform is now floating at specified pressures and fly heights with sufficent free space around the gimbal plates as to not touch the restraint cage. ALL IS GOOD -- CLEARED THE PROBLEM JWC From jwc at snf.stanford.edu Wed Oct 20 16:39:13 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 20 Oct 2010 16:39:13 -0700 Subject: Comment raith SNF 2010-10-20 16:39:12: Suburb results on PCM test 10-19-2010 Message-ID: excellent stitching focus and resolution to sub 15 nm gaps were acheived on the tool yesterday while writing standard test and some new gap test patterns for the PRINZ group. 2% 950K PMMA d = 971 +- 6 Angstroms thickness at the follwoing doses: Areas 100 uC/cm**2 Single Pixels lines written in a larger than spec. dose at 420 pC/cm Dots arrays starting at 0.05 fAsec SEM Review after metal liftoff pending in a few weeks. JWC JFMACK From armandhr at snf.stanford.edu Fri Oct 22 00:23:13 2010 From: armandhr at snf.stanford.edu (armandhr at snf.stanford.edu) Date: Fri, 22 Oct 2010 00:23:13 -0700 Subject: Problem raith SNF 2010-10-22 00:23:12: outer position not reached error Message-ID: Received "outer position not reached" error. Fixed by moving the chuck to T=0.8. From jwc at snf.stanford.edu Fri Oct 22 11:22:55 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 22 Oct 2010 11:22:55 -0700 Subject: Problem raith SNF 2010-10-22 00:23:12: outer position not reached error Message-ID: reset inner and outer positions the belt has be]come worn with user /abuse by users possible as once an error is encountered it directs user to manually move the T-robot arm to outer position -- but many users cannot perform this task properly. This issue has been resolved in subsequent software versions. RISK -- We really desperately need to consider completing the upgrade to version 5 or 6 to eliminate this concern. a broken robot arm will take many weeks to repair... JWC From jwc at snf.stanford.edu Fri Oct 22 11:24:10 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 22 Oct 2010 11:24:10 -0700 Subject: Problem raith SNF 2010-10-22 11:24:06: worn T robot arm belt -- service is requested Message-ID: Raith field service was contacted at 6 30 am today. Lev Markov will arrive at the site about noon. He has a belt in hand... JWC From jwc at snf.stanford.edu Mon Oct 25 13:01:20 2010 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 25 Oct 2010 13:01:20 -0700 Subject: Problem raith SNF 2010-10-22 11:24:06: worn T robot arm belt -- service is requested Message-ID: