Comment raith SNF 2010-10-20 16:39:12: Suburb results on PCM test 10-19-2010

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Oct 20 16:39:13 PDT 2010


excellent stitching focus and resolution to sub 15 nm gaps were acheived on the tool yesterday while writing standard test and some new gap test patterns for the PRINZ group.  2% 950K PMMA d = 971 +- 6 Angstroms thickness at the follwoing doses:
Areas 100 uC/cm**2 
Single Pixels lines written in a larger than spec. dose at 420 pC/cm 
Dots arrays starting at 0.05 fAsec
SEM Review after metal liftoff pending in a few weeks.
JWC
JFMACK




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