Comment raith SNF 2010-10-20 16:39:12: Suburb results on PCM test 10-19-2010

[jwc at snf.stanford.edu]

excellent stitching focus and resolution to sub 15 nm gaps were acheived on the tool yesterday while writing standard test and some new gap test patterns for the PRINZ group.  2% 950K PMMA d = 971 +- 6 Angstroms thickness at the follwoing doses:
Areas 100 uC/cm**2 
Single Pixels lines written in a larger than spec. dose at 420 pC/cm 
Dots arrays starting at 0.05 fAsec
SEM Review after metal liftoff pending in a few weeks.
JWC
JFMACK