From khu834 at snf.stanford.edu Sat Apr 2 16:17:14 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Sat, 2 Apr 2011 16:17:14 -0700 Subject: Comment raith SNF 2011-04-02 16:17:13: Cleared load lock error Message-ID: Cleared load lock error and turbo pump error Pumped down ok, unload/ load sequence normal From jwc at snf.stanford.edu Mon Apr 4 13:16:21 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 4 Apr 2011 13:16:21 -0700 Subject: Comment raith SNF 2011-04-02 16:17:13: Cleared load lock error Message-ID: From jwc at snf.stanford.edu Mon Apr 4 13:16:25 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 4 Apr 2011 13:16:25 -0700 Subject: Problem raith SNF 2011-04-02 15:02:23: Loadlock problem Message-ID: From jwc at snf.stanford.edu Tue Apr 5 17:56:16 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 5 Apr 2011 17:56:16 -0700 Subject: Shutdown raith SNF 2011-04-05 17:56:16: OOF LINE FOR STAGE REPAIRS Message-ID: NO USER ACCESS OR USE OF SYSTEM OR COMPUTERS TEST IN PROGRESS OVERNIGHT PLEASE DO NOT TOUCH THE SYSTEM OR PC'S JAMES From jwc at snf.stanford.edu Wed Apr 6 16:54:20 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 6 Apr 2011 16:54:20 -0700 Subject: Shutdown raith SNF 2011-04-05 17:56:16: OOF LINE FOR STAGE REPAIRS Message-ID: From jwc at snf.stanford.edu Wed Apr 6 19:27:12 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 6 Apr 2011 19:27:12 -0700 Subject: Comment raith SNF 2011-04-06 19:27:12: system is near perfect in test ready for users Message-ID: I tested the stage and imaging sections and everything is nearly perfect. ready for your writing. Beam waist at 5 kV 30 um aperture is 5 nm +- 3 nm emmision levels will improve with time please report your results on this list. From kcbalram at snf.stanford.edu Thu Apr 14 23:23:18 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Thu, 14 Apr 2011 23:23:18 -0700 Subject: Problem raith SNF 2011-04-14 23:23:17: PIezo hardware not connected Message-ID: Tried doing a hardware reset as James had suggested but the problem persists. Releasing my session. Krishna From jwc at snf.stanford.edu Fri Apr 15 11:37:48 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 15 Apr 2011 11:37:48 -0700 Subject: Problem raith SNF 2011-04-14 23:23:17: PIezo hardware not connected Message-ID: no problems found either before or after a both computer hardware reset.. Power supply voltages OK on the new Piezo controller power supply. We are in continuous test mode during my sessions on the tool to evaluate stage leveling and substrate leveling results. Currently testing the USH and have finished the SSH test. This week stage leveling test have passed with values of -0.0034, 0.0012, and 0.008 mm total delta WD leveling results. Optimal leveling result should always be within +- 5 um across a 100 mm wafer. JWC From jwc at snf.stanford.edu Fri Apr 29 12:15:12 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 29 Apr 2011 12:15:12 -0700 Subject: Comment raith SNF 2011-04-29 12:15:11: intermittent IEEE-488 buss communication hangs Message-ID: Since Wednesday evening there have been several reports to me by phone of problems occurring that I believe are intermittent communciation hangs on the IEEE-488 buss. This normally occurs in the wee hours of the morning. These include 'unable to pump load lock' type of messages during the load lock procedures although the Load Lock has reached the 'vacuum ready' status but errored in the Software. (Always press 'RETRY and it might take several times to get through the process, but you should be able to complte the LL procedure...) Today I have encounted Piezo errors whereas we move to center the piezo mounts and it shows in the software but in act the post DO NOT MOVE. I performed a hardware reset by gracefully exiting both the RAITH150.exe and the windows OS then SHUTDOWN THE RAITH PC COMPUTER. Then you can startup as you normally would in the windows OS and RAITH application as normal. Unfortunately this did not resolve the issues with piezo leveling. I am now collecting data and am in communications with RAITH troubleshooting this issue. Please call me if you encounter problems or have any concerns... JWC