From jwc at snf.stanford.edu Wed Jan 5 17:52:50 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 5 Jan 2011 17:52:50 -0800 Subject: Shutdown raith SNF 2010-12-20 06:56:58: power off for electrical work Message-ID: From jwc at snf.stanford.edu Wed Jan 5 17:52:56 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 5 Jan 2011 17:52:56 -0800 Subject: Comment raith SNF 2010-12-09 14:26:59: Problem w/ TV signal - resolved Message-ID: From jwc at snf.stanford.edu Wed Jan 5 17:53:00 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 5 Jan 2011 17:53:00 -0800 Subject: Comment raith SNF 2010-10-20 16:39:12: Suburb results on PCM test 10-19-2010 Message-ID: From jwc at snf.stanford.edu Wed Jan 5 17:56:20 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 5 Jan 2011 17:56:20 -0800 Subject: Comment raith SNF 2011-01-05 17:56:20: system is in qualification Message-ID: Initial EBl results show excellent resolution and acceptable stitching between write fields. We ran out of time today after encountering problems performing the metrology of the Stitching Overlay test pattern. quick inspections by SEM yielded dot features down to 8.5 nm and SPLines in the 10 to 20 nm linewidth range. More test and measurements in the queue. JWC From jwc at snf.stanford.edu Thu Jan 6 09:13:59 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 6 Jan 2011 09:13:59 -0800 Subject: Comment raith SNF 2011-01-05 17:56:20: system is in qualification Message-ID: From jwc at snf.stanford.edu Thu Jan 6 14:21:14 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 6 Jan 2011 14:21:14 -0800 Subject: Comment raith SNF 2011-01-06 14:21:14: OUTSTANDING RESULTS ON QUAL WRITES Message-ID: I am happy to report that initial measurements of patterns written during the qualification run yesterday exhibited outstanding results for pattern linewidth and dot diameters. All areas across the wafer were in fine focus and showed near perfect stitching. Min dot diameter at threshold to clear dose 7 - 8.5 nm at ~ 0.05 fAsec dose. Single Pixel Lines in the range of 10 - 12 nm at 260 - 280 pC/cm dose We are currently setting up ebeam line scan files to measure write field to write field stitching accuracy as it is smaller than the verniers normally used to measure stitching by SEM inspection. So far all measurements are exceeding system manufacturers specificiations. At 10 kV 30 um aperture beam waist FWHM 50% = 2- 3 nm on Au on Carbon thin films. More system measurements and characterization is in the queue. Have a nice day JWC From jwc at snf.stanford.edu Thu Jan 13 17:52:11 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 13 Jan 2011 17:52:11 -0800 Subject: Problem raith SNF 2011-01-13 17:52:10: user reports of not being able to reach 5 mm WD Message-ID: I was alerted to an issue where the Z motor virtual motor control would not allow the Z axis to reach 5 mm WD -- the normal working distance for exposure. reset the RAITH hardware and windows application; reinit IEE-488 buss; rehomed Z coders and examined min. Z motor limit which is set to 1.o mm. Tried a number of times to reach 5 mm WD under software control with no sucess. Finally we unloaded the standard sample holder and examined it for flatness on the granite slab and it appears OK. Transfered the substrate to the Universal Sample holder and reloaded. nothing unusual was found in the std. sample holder or its placement in the Robot arm, but suspect the holder may have had a bad landing on the Stage mounts. The USH landed fine and but the problem seems to not be resolved. I have attempted to contacted raith to check for changes in the VBD over the holidays and for advice or items to check but did not reach anyone. ALL USERS WILL NEED TO OPERATE ABOVE 5.350 MM WD UNTIL I CAN GET FURTHER SUPPORT SYSTEM IS IN YELLOW MODE SO USERS READ THIS MESSAGE.... JWC 17:52 HOURS From jwc at snf.stanford.edu Fri Jan 14 12:32:15 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 14 Jan 2011 12:32:15 -0800 Subject: Problem raith SNF 2011-01-13 17:52:10: user reports of not being able to reach 5 mm WD Message-ID: Needed to perform a find home Z axis within the service login to recalibrate the coder, reducing offset for Z stage. Tested and teh Z axis find its actual position and now think we have resolved the problem. Were just 0.178 mm outside of the allowable Z stage travel limit last evening. now Z axis coder reads accurately every time to within one to two coder pulses. (0.015 to 0.030 mm) Tested the system in three load uload cycles to confirm that the Universal Sample Holder was landing properly on piezo mounts as well. This problem surfaced on lsf's account whom had not been on the system in some time and he likely needed to home the Z axis to update his user.VBD which concatenates over the RAITH150.vbd read on application launch. back to green light status If any user runs into this please call me immediately or home your Z axis to reset coder counts in your user.vbd jwc From jwc at snf.stanford.edu Mon Jan 24 17:54:59 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 24 Jan 2011 17:54:59 -0800 Subject: Comment raith SNF 2011-01-24 17:54:58: LIS piezo post slightly off position Message-ID: Last week I was unable to successfully level samples on either Standard sample holder or the Universal sample holder. Today I measured Working distance to the Piezo post and then reloaded Std. Sample Holder and then Universal Sample Holder and measured the Working distane deltas before and after leveling attempts using the height control software. All test FAILED. This indicates either a change in the piezo post referencec height mechanically, possibly due to repairs made during PM. or a change in the Piezo movement characteristic indicating a need to recalibrate the piezo post movement. Next steps are to evaluate the leveling control using the Electrostatic chuck with a 150 mm double polished B prime reference wafer and recalibrate the piezo post travel range and calibration. I will speak with RAITH Fields service tomorrow... JWC