From jwc at snf.stanford.edu Fri Feb 10 15:02:11 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 10 Feb 2012 15:02:11 -0800 Subject: Shutdown raith SNF 2011-12-12 13:36:15: shutdown for PM and SHUTDOWN Message-ID: From jwc at snf.stanford.edu Fri Feb 10 15:02:33 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 10 Feb 2012 15:02:33 -0800 Subject: Problem raith SNF 2012-02-10 15:02:33: SYSTEM IS IN QUALIICATION TESTING Message-ID: From jwc at snf.stanford.edu Fri Feb 10 17:33:04 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 10 Feb 2012 17:33:04 -0800 Subject: Problem raith SNF 2012-02-10 15:02:33: SYSTEM IS IN QUALIICATION TESTING Message-ID: Systems meets acceptance criteria for resolution, vibration, and write field to write field stitching. FBMS functionality passed initial inspection. more imaging and measurements pending I am writing a 20 hr write to repeat all structures written with optimized parameters for this thin film (100 nm 2% 950K PMMA - A) Hundred of addition patterns to write on this job both in normal stitched and FBMS mode short dwell time contamination dot measures 13 nm Image ripple from vibration, acoustic noise and RF summed is 50 % less than before the shutdown! Imgripple measures 3.28 nm normal before it was 5.3 to 7 nm. i am happy with the PM. RAITH FS comes in Monday and Tuesday for final test before workshop If the Lab reopens for Users Tuesday User access commenses at 3 PM for this tool. JWC From jwc at snf.stanford.edu Thu Feb 16 17:29:22 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 16 Feb 2012 17:29:22 -0800 Subject: Comment raith SNF 2012-02-16 17:29:21: system is in excellent state and FBMS works great! Message-ID: I am happy with the systems and all users can return to the system From jwc at snf.stanford.edu Tue Feb 28 09:22:33 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 28 Feb 2012 09:22:33 -0800 Subject: Comment raith SNF 2012-02-28 09:22:33: phone call forever to resolve SEM focusing issues Message-ID: last evening at 11 PM I spent over an hour on the phone supporting a user on the raith tool that was having difficulty focusing and stigmating on teh tool. He indicated the lens was not reponsive and did not change when he tranlated the mouse. Did any other users have problems on the tool? RSVP James