From jwc at snf.stanford.edu Fri Aug 1 10:38:52 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 01 Aug 2003 10:38:52 -0700 Subject: REMINDER: Ebeam Technical Advisory Commitee Kick off Meeting TODAY 3 - 5 PM. Message-ID: <3F2AA5AC.F28C783@snf.stanford.edu> Good Morning, Please be reminded that today we are having a Kickoff Meeting to form the Ebeam Technology Group Technical Advisory Committee. This meeting will be held in CIS 101 from 3 - 5 PM. You are invited to participate in helping me develop this group into an effective working group with the goals of: * Improving communications with Faculty and committed members of the Ebeam Community here at Stanford University. * Provide a monthly forum to communicate progress, develop solutions to challenges, and aid in making decisions that influence the larger group of Users on our Beam Tools. * To provide a technical resource and consultancy to the Ebeam Lab members. * Form a strategy to drive an effort to make the SNF Ebeam Lab become a visible and leading influence in Ebeam Lithography improving technical exchange with researchers at other universities and within the NUNN network. * Provide a forum of peer review and support for measurements, metrology, and testing methods to evaluate our Ebeam system's performance. This group will meet monthly and I would expect a one year commitment to attend and participate in these meetings from you. It is hoped that you will be able to attend this and future meetings as your busy schedules will allow. Thank you, JWC Agenda for the Ebeam Technology Advisory Committee Kick Off Meeting. Friday August 1, 2003 3 - 5 PM CIS 101. 3:00 - 3:05 Welcome Scope of the Committee What I hope we can achieve in the short term and long term- brief. 3:05 - 3:15 The Year in Review Equipment Processes People 3:15 - 3:45 Current Issues to Address. Hitachi -- Current Status and Plan to return the system to Specifications. Raith -- Resolution of Stage and Gun issues related to the Write Field Stitching problems experienced. -- Review of measurements and the decision tree to resolve these issues. -- Concerns and issues with regards to LEO Field service. 3:45 - 4:00 Web Based Communications, Logbooks and Reporting criteria for Users of the SNF Ebeam Facility. How to effectively improve reporting and web based dissemination of information to the Ebeam Community. - To Swiki or not to Swiki... - Our Web or Yours... -Improving communications... 4:00 - 4:20 Future Directions of Focus for the Ebeam Technology Group research: Identify the Biggest needs for the Lab. - What must we have to improve the lab in Equipment, Processes, and People? - How can we better meet the expectations and needs for the Ebeam Community? Novel Resist Systems: Positive Tone Materials | PMMA on membranes | UHR Ebeam Lithography | SPL Negative Tone materials | Calixarenes and HSQ | Direct write polymeric systems. Devices and future areas of interest and importance to Lab Users. 4:20 - 5:00 Open Discussions. You are invited to attend any, all, or part, as your time will allow. Thank you, James Conway Announcement June 27, 2003: >>NEW Ebeam Technical Advisory Committee Forming in August: > I am interested in forming a technical advisory committee for the Ebeam > Technology Group here at SU. I would like to identify Faculty, Advanced > Users of Ebeam, and RAITH Champions whom would be interested in forming this > committee. > The kick off meeting will occur Friday August 1, 2003 at 3 PM in CIS 101. > Please reply by email to jwc at snf.stanford.edu, Subject: Ebeam Committee, if > you are interested in participating. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Aug 1 14:18:13 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 01 Aug 2003 14:18:13 -0700 Subject: [Fwd: Invitation RAITH Lithography Training Course 2003] Message-ID: <3F2AD915.60F1520E@snf.stanford.edu> Hello All, Hot of the press from RAITH, for anyone willing or happening to be traveling to Germany in Late August. It is my understanding that both basis and advanced users schools will be conducted in parallel. This is also a excellent opportunity to network with other RAITH Users. All the best in your day, James Conway -------- Original Message -------- Subject: Invitation RAITH Lithography Training Course 2003 Date: Fri, 1 Aug 2003 13:40:17 +0100 From: "R?ckstein, Christel" To: "'jwc at snf.stanford.edu'" As some of our customers has canceled their participation of the training course, we can offer you a free place for the next Raith Lithography Training Course. Dear Sir, We know it is really a short time for registration, but we hope you have the opportunity to take part in one of these courses. We are looking forward meeting you in Dortmund. with best regards / mit freundlichen Gr?ssen Christel Rueckstein Sales Assistant Raith GmbH Hauert 18 44227 Dortmund Germany phone : +49 - 231 - 975000 - 33 Fax : +49 - 231 - 975000 - 5 e-mail : CRueckstein at raith.de web : http://www.raith.com -------------- next part -------------- A non-text attachment was scrubbed... Name: Einladung_Anf_Fort_LTC_Aug26-28_03.pdf Type: application/octet-stream Size: 74696 bytes Desc: not available URL: From kcrozier at stanford.edu Sat Aug 2 08:44:55 2003 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Sat, 02 Aug 2003 08:44:55 -0700 Subject: reservation cancelled today Message-ID: <5.2.0.9.2.20030802084209.015b3368@kcrozier.pobox.stanford.edu> I have cancelled my reservation today from 8am-2pm as I have been feeling unwell. Very sorry for the late notice, unfortunately my first email bounced back. Ken Crozier From scaccag at stanford.edu Sun Aug 3 23:32:01 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Sun, 3 Aug 2003 23:32:01 -0700 (PDT) Subject: reservation removed monday morning Message-ID: very sorry for late notice From jwc at snf.stanford.edu Mon Aug 4 10:36:54 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 04 Aug 2003 10:36:54 -0700 Subject: lost wafer left in the Ebeam Dry box -- Please remove your samples from this box! References: Message-ID: <3F2E99B6.61D49F90@snf.stanford.edu> An HTML attachment was scrubbed... URL: From cshen at briontech.com Mon Aug 4 11:37:20 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Mon, 4 Aug 2003 11:37:20 -0700 (PDT) Subject: Raith free this afternoon Message-ID: <64795.171.64.101.47.1060022240.squirrel@mail.briontech.com> Cancelled my reservation, sorry for the late notice From jwc at snf.stanford.edu Mon Aug 4 12:04:12 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 04 Aug 2003 12:04:12 -0700 Subject: RAITH UPDATE: EHT Problems, Planned Downtime schedule, Back up your LEO files notice. Message-ID: <3F2EAE2C.BBA6A036@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Aug 4 12:04:28 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 04 Aug 2003 12:04:28 -0700 Subject: Beamtools report for Monday August 4, 2003 Message-ID: <3F2EAE3C.866B8A92@snf.stanford.edu> An HTML attachment was scrubbed... URL: From chquay at MtHolyoke.edu Mon Aug 4 16:51:47 2003 From: chquay at MtHolyoke.edu (Something or Other) Date: Mon, 4 Aug 2003 19:51:47 -0400 (EDT) Subject: raith free tonight Message-ID: midnight on. cqhl. From sandrew at stanford.edu Mon Aug 4 19:16:58 2003 From: sandrew at stanford.edu (Scott D. Andrews) Date: Mon, 4 Aug 2003 19:16:58 -0700 (PDT) Subject: Raith free 8am - 1pm on Wednesday Message-ID: From pease at cis.stanford.edu Tue Aug 5 10:57:49 2003 From: pease at cis.stanford.edu (Fabian Pease) Date: Tue, 5 Aug 2003 10:57:49 -0700 Subject: REMINDER: Ebeam Technical Advisory Commitee Kick off Meeting TODAY 3 - 5 PM. References: <3F2AA5AC.F28C783@snf.stanford.edu> Message-ID: <008601c35b7b$17e207e0$0500a8c0@stanford.edu> James: THank you for arranging this. I am afraid I was out of town last Friday but I am glad to see that these will be held each month. That will give us a chance to review in some detail the technical performance of the Raith and, hopefully also, the Hitachi. Fabian ----- Original Message ----- From: James Conway To: raith at snf.stanford.edu ; Mary Tang ; John Shott ; Yoshio Nishi ; 'Fabian Pease' ; Hongjie Dai -- Professer Chemistry Dept. ; David Goldhaber-Gordon ; quate at stanford.edu ; kmoler at stanford.edu ; BEASLEY at stanford.edu ; JHHARRIS at stanford.edu ; PLUMMER at ee.Stanford.EDU ; osheroff at stanford.edu ; solgaard at ee.Stanford.EDU ; SARASWAT at cis.stanford.edu ; peter at snf.stanford.edu ; okilic at stanford.edu ; kcrozier at stanford.edu ; arvisun at stanford.edu ; rohits at stanford.edu ; wkim at snf.stanford.edu ; amol at stanford.edu ; anojeh at stanford.edu ; DaChen.CHU at stanford.edu ; tbilir at stanford.edu ; fumin at stanford.edu ; ychliu at stanford.edu ; shimbo at snf.stanford.edu ; scaccag at stanford.edu ; ajavey at snf.stanford.edu ; chquay at mtholyoke.edu ; lsmoore at stanford.edu ; mtopinka at stanford.edu ; nayoung at stanford.edu ; bubble at snf.stanford.edu ; Paul Jerabek Cc: Nancy Latta ; Mahnaz Mansourpour Sent: Friday, August 01, 2003 10:38 AM Subject: REMINDER: Ebeam Technical Advisory Commitee Kick off Meeting TODAY 3 - 5 PM. Good Morning, Please be reminded that today we are having a Kickoff Meeting to form the Ebeam Technology Group Technical Advisory Committee. This meeting will be held in CIS 101 from 3 - 5 PM. You are invited to participate in helping me develop this group into an effective working group with the goals of: a.. Improving communications with Faculty and committed members of the Ebeam Community here at Stanford University. b.. Provide a monthly forum to communicate progress, develop solutions to challenges, and aid in making decisions that influence the larger group of Users on our Beam Tools. c.. To provide a technical resource and consultancy to the Ebeam Lab members. d.. Form a strategy to drive an effort to make the SNF Ebeam Lab become a visible and leading influence in Ebeam Lithography improving technical exchange with researchers at other universities and within the NUNN network. e.. Provide a forum of peer review and support for measurements, metrology, and testing methods to evaluate our Ebeam system's performance. This group will meet monthly and I would expect a one year commitment to attend and participate in these meetings from you. It is hoped that you will be able to attend this and future meetings as your busy schedules will allow. Thank you, JWC Agenda for the Ebeam Technology Advisory Committee Kick Off Meeting. Friday August 1, 2003 3 - 5 PM CIS 101. 3:00 - 3:05 Welcome Scope of the Committee What I hope we can achieve in the short term and long term- brief. 3:05 - 3:15 The Year in Review Equipment Processes People 3:15 - 3:45 Current Issues to Address. Hitachi -- Current Status and Plan to return the system to Specifications. Raith -- Resolution of Stage and Gun issues related to the Write Field Stitching problems experienced. -- Review of measurements and the decision tree to resolve these issues. -- Concerns and issues with regards to LEO Field service. 3:45 - 4:00 Web Based Communications, Logbooks and Reporting criteria for Users of the SNF Ebeam Facility. How to effectively improve reporting and web based dissemination of information to the Ebeam Community. - To Swiki or not to Swiki... - Our Web or Yours... -Improving communications... 4:00 - 4:20 Future Directions of Focus for the Ebeam Technology Group research: Identify the Biggest needs for the Lab. - What must we have to improve the lab in Equipment, Processes, and People? - How can we better meet the expectations and needs for the Ebeam Community? Novel Resist Systems: Positive Tone Materials | PMMA on membranes | UHR Ebeam Lithography | SPL Negative Tone materials | Calixarenes and HSQ | Direct write polymeric systems. Devices and future areas of interest and importance to Lab Users. 4:20 - 5:00 Open Discussions. You are invited to attend any, all, or part, as your time will allow. Thank you, James Conway Announcement June 27, 2003: >>NEW Ebeam Technical Advisory Committee Forming in August: > I am interested in forming a technical advisory committee for the Ebeam > Technology Group here at SU. I would like to identify Faculty, Advanced > Users of Ebeam, and RAITH Champions whom would be interested in forming this > committee. > The kick off meeting will occur Friday August 1, 2003 at 3 PM in CIS 101. > Please reply by email to jwc at snf.stanford.edu, Subject: Ebeam Committee, if > you are interested in participating. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtopinka at stanford.edu Tue Aug 5 21:06:56 2003 From: mtopinka at stanford.edu (mtopinka at stanford.edu) Date: Tue, 05 Aug 2003 21:06:56 -0700 Subject: raith free tomorrow 9am Message-ID: <1060142816.3f307ee0173d7@webmail.stanford.edu> Very sorry for the late notice! Freed up from 9am to noon, and I think the next person starts at 1pm? -Mark From mtopinka at stanford.edu Wed Aug 6 13:20:35 2003 From: mtopinka at stanford.edu (Mark Topinka) Date: Wed, 06 Aug 2003 13:20:35 -0700 Subject: Moved my Raith slot Message-ID: <5.2.0.9.0.20030806131938.03b36910@mtopinka.pobox.stanford.edu> I moved my Raith spot from 6pm tomorrow to today, so tomorrow evening is now open. -Mark From scaccag at stanford.edu Wed Aug 6 13:22:39 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Wed, 6 Aug 2003 13:22:39 -0700 (PDT) Subject: Moved my Raith slot In-Reply-To: <5.2.0.9.0.20030806131938.03b36910@mtopinka.pobox.stanford.edu> Message-ID: I got it, and now friday overnight is free On Wed, 6 Aug 2003, Mark Topinka wrote: > I moved my Raith spot from 6pm tomorrow to today, so tomorrow evening is > now open. -Mark > From scaccag at stanford.edu Thu Aug 7 17:55:26 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Thu, 7 Aug 2003 17:55:26 -0700 (PDT) Subject: tonight time? Message-ID: Hi all, I reserved from now to midnight, but if nobody needs from midnight to 8 or 9am, I'll keep writing until tomorrow morning. Please let me know asap (within an hour) if anybody needs that time... thanks Gigi From ajavey at stanford.edu Sat Aug 9 22:04:45 2003 From: ajavey at stanford.edu (Ali Javey) Date: Sat, 9 Aug 2003 22:04:45 -0700 (PDT) Subject: reservation removed Sat. 1-5 am Message-ID: From jwc at snf.stanford.edu Tue Aug 12 09:23:44 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 12 Aug 2003 09:23:44 -0700 Subject: IMMEDIATE CALL FOR ABSTRACTS and TITLES: RAITH USERS MEETING SEPT 29/30 and SU RAITH USERS WORKSHOP Oct. 1-3, 2003 Message-ID: <3F391490.6BFBC3E7@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Aug 12 11:37:34 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 12 Aug 2003 11:37:34 -0700 Subject: ALL RAITH USERS: Last call to back up your LEO USER and Image files to CD-R... Message-ID: <3F3933EE.798C2A6D@snf.stanford.edu> An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Tue Aug 12 23:45:37 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 12 Aug 2003 23:45:37 -0700 (PDT) Subject: res cancelled tomorrow afternoon (wed) Message-ID: From okilic at stanford.edu Wed Aug 13 01:11:24 2003 From: okilic at stanford.edu (okilic at stanford.edu) Date: Wed, 13 Aug 2003 01:11:24 -0700 Subject: Urgent Dose Question (Raith) In-Reply-To: References: Message-ID: <1060762284.3f39f2acf046a@webmail.stanford.edu> Dear Raith users, Some unexpected results force me to switch from 340nm PMMA (5%,495K) to 1000nm. Since I need urgently some results I have no time for a dose test. Therefore could you tell: - What spin speed usually gives 1000nm thickness. - What dose (uC), and what acceleration (kV) gives good resolved structures for ~1000nm thick PMMA. - And what developing process you use. (For 1:2 MIBK:IPA that would give 2min:30sec for 400nm/min I guess.) Any help will be appreciated. Please don't hesitate to reply even if you don't know ALL of the answers. Onur From chquay at MtHolyoke.edu Thu Aug 14 12:41:17 2003 From: chquay at MtHolyoke.edu (Something or Other) Date: Thu, 14 Aug 2003 15:41:17 -0400 (EDT) Subject: reservation removed Message-ID: today at 10pm. sample not ready. charis. From hendrikb at stanford.edu Fri Aug 15 16:17:23 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Fri, 15 Aug 2003 16:17:23 -0700 (PDT) Subject: Res canceled tonight on Raith. Message-ID: Sorry for the late notice. Sample not ready. --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From daweiw at uci.edu Fri Aug 15 20:09:29 2003 From: daweiw at uci.edu (daweiw at uci.edu) Date: Fri, 15 Aug 2003 19:09:29 -0800 Subject: reservation canceled Message-ID: <1060999769.smmsdV1.1.2@smtp.uci.edu> Hi, all I canceled my reservation for Raith from 6:30pm to 9:30pm on Friday(8/15). Dawei From mtopinka at stanford.edu Sat Aug 16 12:26:47 2003 From: mtopinka at stanford.edu (Mark Topinka) Date: Sat, 16 Aug 2003 12:26:47 -0700 Subject: reservation moved In-Reply-To: <1060999769.smmsdV1.1.2@smtp.uci.edu> Message-ID: <5.2.0.9.0.20030816122505.022cceb8@mtopinka.pobox.stanford.edu> Hi all- I moved my reservation from tomorrow morning to a spot that relatively recently opened up in the evening, so 8-11am on Sunday is now open. -Mark From mtopinka at stanford.edu Sat Aug 16 13:14:00 2003 From: mtopinka at stanford.edu (mtopinka at stanford.edu) Date: Sat, 16 Aug 2003 13:14:00 -0700 Subject: Raith EHT trips In-Reply-To: <5.2.0.9.0.20030816122505.022cceb8@mtopinka.pobox.stanford.edu> References: <5.2.0.9.0.20030816122505.022cceb8@mtopinka.pobox.stanford.edu> Message-ID: <1061064840.3f3e90883a522@webmail.stanford.edu> Hi everyone- While Dauwei (sp?) was using the Raith this morning, the EHT started to trip badly- it can't stay at its setpoint for more than about a minute. I am cancelling my planned time from now to 4:00- you're welcome to come in alater nd try it to see if it happens to stabilize, but for right now it's unusable. -Mark From chquay at MtHolyoke.edu Sat Aug 16 15:39:52 2003 From: chquay at MtHolyoke.edu (Something or Other) Date: Sat, 16 Aug 2003 18:39:52 -0400 (EDT) Subject: Raith Swiki Comes Online Message-ID: Hi guys, I think it's about time the Raith Swiki came online, in light of the fact that people keep making the same mistakes over and over and over. The Swiki has been in beta for the DGG group for a while now. It is at http://elrey.stanford.edu:8080/Raith Username: wraith Password: nazgul Please use it to report all problems and add yourself to the users page. If you have any ideas for the format of the page, feel free to edit or talk to peopel ni the DGG lab. Thanks. Cheers, Charis. From ajavey at stanford.edu Sat Aug 16 21:40:50 2003 From: ajavey at stanford.edu (Ali Javey) Date: Sat, 16 Aug 2003 21:40:50 -0700 (PDT) Subject: reservation removed midnight --- Message-ID: From hendrikb at stanford.edu Sun Aug 17 16:09:30 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Sun, 17 Aug 2003 16:09:30 -0700 (PDT) Subject: Raith res canceled 5am - 8 am tomorrow Message-ID: --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From chquay at MtHolyoke.edu Sun Aug 17 21:04:46 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Mon, 18 Aug 2003 00:04:46 -0400 (EDT) Subject: reservation removed Message-ID: midnight to 5am. sorry for late notice. charis. From cshen at briontech.com Mon Aug 18 10:23:34 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Mon, 18 Aug 2003 10:23:34 -0700 (PDT) Subject: Raith reservation removed today Message-ID: <4465.171.64.101.249.1061227414.squirrel@mail.briontech.com> sample not ready. From grupp at snowmass.Stanford.EDU Mon Aug 18 10:57:49 2003 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 18 Aug 2003 10:57:49 -0700 (PDT) Subject: I'll take Ratih Res 3-7:30 this afternoon, but... Message-ID: I can't get on my coral account, so time slot is still open! I hope this works! THanks, DAn --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From scaccag at stanford.edu Mon Aug 18 12:58:37 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 18 Aug 2003 12:58:37 -0700 (PDT) Subject: res cancelled tomorrow (big slot) Message-ID: sorry, waiting for a sample, not ready yet From jwc at snf.stanford.edu Tue Aug 19 11:50:58 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 19 Aug 2003 11:50:58 -0700 Subject: Comment raith 2003-08-16 20:09:50: EHT Trips and Gun settings... Message-ID: <3F427192.62DAF097@snf.stanford.edu> Onur and RAITH Users: ALL USERS: Please call me the next time you are tempted to change the gun settings. These parameters are not to be changed by users --- EVER! It takes several hours to a full day for all the gun parameters to stabilize after a significant change is made to the settings. I appreciate what you were trying to achieve but the settings will not render a useful beam from a brightness and source spot size /divergence of the Beam at the source standpoint. The beam I and flux per unit area will be too low! LEO was aware of the situation we were having with EHT I stability on their exit last Friday. We were monitoring the gun parameters using the gun server utility. When the system was reset SAT. the data was lost. Monday, I had LEO come in again and we readjusted the gun back to near the factory determined settings. We also ran emission I up and down hoping to reform and heal the gun tip if possible. This was done in an effort to improve the gun emission stability, and to determine if the tip itself was damaged. (EHT I was wildly fluctuating Friday and Sat. It seems to have stabilized during the last 24 hours.) No trips were experienced overnight or this morning so the tip now seems to be behaving and now the new EHT power supply seems to have run itself into normal service. We will be closely monitoring the system through the week. How did your ebeam writing come out? Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From chquay at MtHolyoke.edu Tue Aug 19 23:23:03 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Wed, 20 Aug 2003 02:23:03 -0400 (EDT) Subject: reservation removed thursday Message-ID: 2pm - 6pm cqhl. From mtopinka at stanford.edu Wed Aug 20 10:48:48 2003 From: mtopinka at stanford.edu (mtopinka at stanford.edu) Date: Wed, 20 Aug 2003 10:48:48 -0700 Subject: 1pm-4:30 slot available today Message-ID: <1061401728.3f43b480f1347@webmail.stanford.edu> I'm very sorry for the extremely late notice. Last step didn't work. - Mark From peter at kaos.stanford.edu Wed Aug 20 10:59:37 2003 From: peter at kaos.stanford.edu (Peter Catrysse) Date: Wed, 20 Aug 2003 10:59:37 -0700 Subject: 1pm-4:30 slot available today In-Reply-To: <1061401728.3f43b480f1347@webmail.stanford.edu> Message-ID: I'll take it. Peter Catrysse, Ph.D. Dept. of Electrical Engineering Stanford University Stanford, CA 94305 Ph: (650) 725-1255 Fax: (650) 322-5379 > -----Original Message----- > From: mtopinka at stanford.edu [mailto:mtopinka at stanford.edu] > Sent: Wednesday, August 20, 2003 10:49 AM > To: raith at snf.stanford.edu > Subject: 1pm-4:30 slot available today > > > I'm very sorry for the extremely late notice. Last step didn't work. - > Mark > > From jwc at snf.stanford.edu Wed Aug 20 11:02:46 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 20 Aug 2003 11:02:46 -0700 Subject: Problem raith 2003-08-18 16:45:09: Raith Coordinates lost or strange coordinate readouts. References: Message-ID: <3F43B7C6.DA7BA118@snf.stanford.edu> Users: Be advised that you should select "reset X-Y coordinates system" when prompted to on the system as the application launches unless you were the last user. This resets X:Y = U:V and gives you a good start. If you are prompted to "Find and home All Positions" this is likely due to the system seeing a delta in the position from where it expected to be upon application launch. It is perfectly fine to 'Find home positions' at the beginning of any critical work. (It is normal to fail motor 5 the loader arm as the limit is set to just before touching the slit valve door.) If you see strange stage moves, a loss of joystick control, or totally ridiculous numbers like Dan experienced a few days ago. Press the STOP SIGN in the stage control window and it may recover then and there -- otherwise perform the "Find Home Positions" (FHP) routine and you should be good to go. Otherwise reset the RAITH computer then perform the FHP when you launch the application. Thank you, James Conway Dan Grupp wrote: > i'll tyr that. i think it was slowly crashing, cursors started going funny > too. > -d > > On Tue, 19 Aug 2003, James Conway wrote: > > > Select Find Home positions and re-find your coordinate system.... > > > > I will watch out for this to reoccur. > > > > JWC > > > > > > > > --------------------------------------------------------------------------- > Dr. Daniel Grupp, Visiting Scholar > Center for Integrated Systems > Stanford University > Stanford, CA 94305 > (650) 724-6911 > FAX: 723-4659 > --------------------------------------------------------------------------- From hungtao at stanford.edu Wed Aug 20 15:38:48 2003 From: hungtao at stanford.edu (hungtao at stanford.edu) Date: Wed, 20 Aug 2003 15:38:48 -0700 Subject: raith time available from 4:30 to 8:30pm Message-ID: <1061419128.3f43f8789acfa@webmail.stanford.edu> Sorry for the late notice! My sample could'nt be ready for the Raith after 7pm. Hungtao From jrgold at stanford.edu Wed Aug 20 20:13:02 2003 From: jrgold at stanford.edu (Jonathan Goldman) Date: Wed, 20 Aug 2003 20:13:02 -0700 Subject: UVN30 & UVN5 Message-ID: <5.1.0.14.2.20030820201000.01cceb80@jrgold.pobox.stanford.edu> Hi ebeam and raith users, I'm doing a process with negative resist and I want to try UVN30 and UVN5. Does anyone know 1. index of refraction of these materials. 2. have thickness versus spin speed curves? 3. dosage information/data thanks, Jonathan jrgold at stanford.edu From hendrikb at stanford.edu Thu Aug 21 14:50:04 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Thu, 21 Aug 2003 14:50:04 -0700 (PDT) Subject: Raith free tonight 19:00-22:00 Message-ID: --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From jwc at snf.stanford.edu Thu Aug 21 16:52:24 2003 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 21 Aug 2003 16:52:24 -0700 Subject: Raith Users Meeting 8-29/30-2003:: Scope, Expectations, and Invitation for your Participation. Message-ID: <3F455B38.C529DEC4@snf.stanford.edu> [Please read and review this entire message...] Greetings RAITH Users: We are planning to have a RAITH Users Meeting (9-29/30-2003) followed by a SU RAITH Users Workshop (October 1/2/3, 2003. This is an invitation for your participation in these meetings. RSVP requested in advance. RAITH Users Meeting: Monday September 29, 2003 9 - 5 PM Tuesday September 30, 2003 9 - 3 PM This will be a informal Users Meeting mainly attended by our RAITH Users here at Stanford, but we wish to also invite other RAITH Users based here in North America. It is intended to be a forum for users to share their experiences and challenges on the Raith 150 system, gaining from the common experience of the Group. Good results and poor we wish to hear from you! This would be a fairly small meeting of 20 - 25 persons, almost all of whom are within the Stanford & NUNN communities. It is hoped that this meeting will be a open sharing of ideas, tips'n'tricks, and a frank sharing of solutions developed while working with the RAITH 150 Ebeam Lithography System. Raith USA will be sponsoring this workshop and will be providing support for this event. Stanford Nanofabrication Facility will provide the venue. There may also be several presentations by the RAITH USA and RAITH GmbH Application Specialist whom will be attending the RAITH Users Meeting. We are continuing to put together a schedule for this event and we wish for all RAITH Champions and interested Raith Users here at Stanford University to have an opportunity to present the results of their work. You are again encouraged to submit a Title and Abstract for your 10 - 15 minute presentation post haste to both myself and Michael Kahl [kahl at raith.de] so we may add your presentation to the User Meeting schedule. I have attended several of these Users Meetings in Germany since I started working here at SNF; most recently presenting in Dresden, DE. at the German Physical Society Meeting. I have found these meetings very useful and informative and a great aid in gaining further expertise and assist in developing my skills on the Raith 150 system. Please RSVP so we know whom is coming: All RAITH Users from Stanford are invited to attend this meeting. Please RSVP to both James Conway and Michael Kahl so we will know whom is participating and we can order sufficient resources and food for you at this Users Meeting. Announcement of the SU RAITH Users Workshop Wednesday October 1, 2003 Thursday October 2, 2003 Friday October 3, 2003 Meeting times to be determined. This is a Stanford Only Raith Users Workshop. No members outside of Stanford will be invited. This is formatted to be Application Specific training on the RAITH 150 system examining topics you most desire to discuss and further develop your skills on using our RAITH platform. This continues to build on a successful training support sessions for RAITH 150 users that we had after we installed the new laser Stage at the end of June. Raith Applications specialist, Michael Kahl, will be returning to Stanford to give you application specific training support in areas of your greatest interest. This will give you an opportunity to meet both in the lab, and in small group forums, to get your questions answered and to get further support in your device applications on problems or challenges you may have encountered during your skills development on the RAITH 150 platform. Persons interested in joining us for this workshop are again requested to RSVP to both James Conway and Michael Kahl. (jwc at snf.stanford.edu and kahl at raith.de) Please also give us some indication on where your specific interest may be, and where you desire the greatest help in using the RAITH 150 tool. We will then put together a application specific schedule for these three days; you are all welcome to attend any all or part as your schedules will allow. Thank you for your interest and participation in Ebeam Technologies here at Stanford. Please help us ensure that this will be a successful group of meetings! Meetings that I hope will become a annual event here at the Stanford Nanofabrication Facility. Sincerely Yours, James W. Conway Ebeam Technology Group 001-650-725-7075 FYI: I will be away on Holiday from 8-21-2003 until September 15, 2003 returning at 8:30 AM for my normal office hours. Please be sure to also send your replies to kahl at raith.de as he is coordinating the schedule in my absence. Thank you! -------------- next part -------------- An HTML attachment was scrubbed... URL: From cshen at briontech.com Sat Aug 23 14:10:27 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Sat, 23 Aug 2003 14:10:27 -0700 (PDT) Subject: Raith free today Message-ID: <51639.171.64.101.47.1061673027.squirrel@mail.briontech.com> I cancelled my reservation. Sorry for the late notice. Couldn't get the samples ready. From peter at kaos.stanford.edu Sat Aug 23 14:17:20 2003 From: peter at kaos.stanford.edu (Peter Catrysse) Date: Sat, 23 Aug 2003 14:17:20 -0700 Subject: Raith free today In-Reply-To: <51639.171.64.101.47.1061673027.squirrel@mail.briontech.com> Message-ID: I am taking it. Thanks, Peter Catrysse, Ph.D. Dept. of Electrical Engineering Stanford University Stanford, CA 94305 Ph: (650) 725-1255 Fax: (650) 322-5379 > -----Original Message----- > From: cshen at briontech.com [mailto:cshen at briontech.com] > Sent: Saturday, August 23, 2003 2:10 PM > To: raith at snf.stanford.edu > Subject: Raith free today > > > I cancelled my reservation. Sorry for the late notice. Couldn't get the > samples ready. > > From cshen at briontech.com Sat Aug 23 16:44:02 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Sat, 23 Aug 2003 16:44:02 -0700 (PDT) Subject: 5% 495K PMMA Message-ID: <54085.171.64.101.47.1061682242.squirrel@mail.briontech.com> I'm in urgent need of some 5% 495K PMMA, there's nothing left in the chemical cabinet. Could anyone lend me some? I'd greatly appreciate.Chongfei From hendrikb at stanford.edu Sun Aug 24 11:02:53 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Sun, 24 Aug 2003 11:02:53 -0700 (PDT) Subject: Done early on raith Message-ID: Expect to be done by noon today. Next user at 2 pm. --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From ajavey at stanford.edu Sun Aug 24 20:53:20 2003 From: ajavey at stanford.edu (Ali Javey) Date: Sun, 24 Aug 2003 20:53:20 -0700 (PDT) Subject: reservation removed midnight - 6 am Message-ID: sample not ready. sorry for the late note. From chquay at MtHolyoke.edu Mon Aug 25 01:17:19 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Mon, 25 Aug 2003 04:17:19 -0400 (EDT) Subject: Switch times Message-ID: Hi guys, Would a kind soul care to switch times with me? I have Tuesday from 12:30pm to 4:30pm but that's barely enough time for me to get my sample ready (and I want to be semi compos mentis when I do my write). If you have a similar block of time later in the week (Tuesday, Wednesday or Thursday) and can switch, please let me know. Much thanks. Cheers, Charis. From hphan at snf.stanford.edu Mon Aug 25 10:26:16 2003 From: hphan at snf.stanford.edu (Henry Phan) Date: Mon, 25 Aug 2003 10:26:16 -0700 Subject: 5% 495K PMMA References: <54085.171.64.101.47.1061682242.squirrel@mail.briontech.com> Message-ID: <3F4A46B8.D1E0384C@snf.stanford.edu> I put a new bottle 5% 495K PMMA in the left chemical cabinat. Feel free to use it. cshen at briontech.com wrote: > I'm in urgent need of some 5% 495K PMMA, there's nothing left in the > chemical cabinet. Could anyone lend me some? I'd greatly appreciate.Chongfei -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu From lgx at stanford.edu Mon Aug 25 13:05:37 2003 From: lgx at stanford.edu (Guanxiong Li) Date: Mon, 25 Aug 2003 13:05:37 -0700 Subject: Reservation 9:30pm-8:30am tonight removed Message-ID: <004801c36b44$40cb0160$0c9f0c80@stanford.edu> Sample not ready. -lgx -------------------------------------------------- Materials Science and Engineering Stanford University Office: 208 McCullough Bldg. Phone: 650-723-2939 --------------------------------------------------- -------------- next part -------------- An HTML attachment was scrubbed... URL: From altug at stanford.edu Wed Aug 27 11:55:41 2003 From: altug at stanford.edu (Hatice Altug) Date: Wed, 27 Aug 2003 11:55:41 -0700 Subject: Reservation from 4:30pm-10:30pm is removed References: <004801c36b44$40cb0160$0c9f0c80@stanford.edu> Message-ID: <0b6201c36ccc$d05deb10$685440ab@hatice> An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Wed Aug 27 20:59:47 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Wed, 27 Aug 2003 20:59:47 -0700 (PDT) Subject: reservation removed tomorrow morning Message-ID: sorry for late notice From chquay at MtHolyoke.edu Thu Aug 28 17:56:31 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Thu, 28 Aug 2003 20:56:31 -0400 (EDT) Subject: reservation cancelled Message-ID: friday morning 4:30am-9am. From chquay at MtHolyoke.edu Fri Aug 29 00:02:55 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Fri, 29 Aug 2003 03:02:55 -0400 (EDT) Subject: e-beam help? Message-ID: Hi guys, I had problems with my alignment a couple of days ago and was wondering if you have any clues. Things were just offset. No rotation or scrunching. I suspect that there are things in the positionlist that I don't understand that are causing this problem. I did make sure that U and V were in the centre of my first writefield, but I don't really know what htings like Attribute and pos1/2/3 mean. Do you? I think I'm going to call Raith tomorrow. Thanks. Cheers, Charis. From chquay at MtHolyoke.edu Fri Aug 29 00:24:25 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Fri, 29 Aug 2003 03:24:25 -0400 (EDT) Subject: thin line results posted on swiki Message-ID: a couple of weeks ago i was able to write <20nm lines. a picture posted on swiki at http://elrey.stanford.edu:8080/Raith/19 if people have got better results, i'd encourage you to share them as well...create a new swiki page! charis. From hendrikb at stanford.edu Fri Aug 29 01:22:32 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Fri, 29 Aug 2003 01:22:32 -0700 (PDT) Subject: e-beam help? In-Reply-To: Message-ID: Charis, I think Pos 1 and 2 is the offset between the LL corner of your working area and the point whose coordinates ae given in the positionlist. Thus, they are normally 1/2 WF size. However, if you change the WF size after copying the entries into the positionlist, this is no longer true. Another possibility is an offset between the LEO image and the Raith coordinates - I always scan with the Raith software if alignment is important. Finally, the WF alignment may easily offset your UV system by up to a few micron - to avoid problems with this, either make sure you see the feature you use for WF alignmet exactly at the current stage position, i.e. the center of a full EF scan with the Raith software when creating the marks, or do the 3-point alignment again after the WF alignment. To get a good WF alignment, you should probably also do the 3-point alignment before to get the scale factors and rotation right. Hendrik On Fri, 29 Aug 2003, Charis Quay Huei Li wrote: > Hi guys, > > I had problems with my alignment a couple of days ago and was > wondering if you have any clues. Things were just offset. No rotation or > scrunching. I suspect that there are things in the positionlist that I > don't understand that are causing this problem. I did make sure that U and > V were in the centre of my first writefield, but I don't really know what > htings like Attribute and pos1/2/3 mean. Do you? I think I'm going to call > Raith tomorrow. Thanks. > > Cheers, > Charis. > > > --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From lgx at stanford.edu Fri Aug 29 15:59:00 2003 From: lgx at stanford.edu (Guanxiong Li) Date: Fri, 29 Aug 2003 15:59:00 -0700 Subject: Reservation removed 5:30pm-8:30pm tonight Message-ID: <001b01c36e81$22afa9c0$966a40ab@babyblues> Not ready yet. Sorry for late notice. -lgx -------------- next part -------------- An HTML attachment was scrubbed... URL: