From michael_kahl at gmx.de Tue Jul 1 18:07:42 2003 From: michael_kahl at gmx.de (Michael Kahl) Date: Wed, 2 Jul 2003 03:07:42 +0200 (MEST) Subject: report on service visit Message-ID: <9117.1057108062@www27.gmx.net> Hello Raith users at Stanford, as James is not in his office at the moment, I would like to send you directly a brief update on the status of the Raith 150 after the Raith service visit. 1.) Problems that have been fixed: 1.a) The laser stage has been exchanged. Stitching tests resulted now in 30 nm stitching accuracy (mean = 3 sigma), and a write field rotation depending on the stage position was no longer observed. Thus, this kind of effect will no longer cause any stitching errors. 1.b) We found that the gun had not been adjusted properly. The former setup caused both a too low, unstable beam current, and high beam position drift. Actually, this position drift might have caused some of the stitching errors that were reported. Anyway, the gun recovered with new settings during the last week and is stable now (beam current drift < 0.5% per hour, beam position drift < 90 nm per hour). 1.c) Some users reported that it is not possible to burn a contamination dot at high magnifcation. We found that an error on the electron optics board caused this problem, and thus this board has been exchanged as well to fix the problem. 2.) Outstanding points: 2.a) We found a new problem which could be described as sudden jumps in the x-direction during SEM imaging (see attached image). We suspect a thermal or contact problem in the column or on related boards as cause for this, because this problem appears suddently and then disappears for most of the time. This is probably also the reason why it has not been reported before. Anyway, we could not yet solve it because we were not prepared for this. We will do this as soon as possible, though. In the meantime, please use the system as usual, as the scanning will be normal most of the time. However, in case you see jumps as in the attached image, you should stop your work and wait until this effect disappears, because it will also result in bad placement accuracy in exposed patterns. Moreover, please report this error to James whenever it comes up, so that I can track it together with him. Nevertheless, I hope that it will not effect much of the work to be done, because the problem occured only twice during the last 2 weeks (one time for 5 hours, the other time for less than 1 hour). 2.b) The piezo elements for levelling are still missing, because we could not get them in time. Therefore, the sample holder is put on Ti posts at the moment. One disadvantage of this is that the sample holder is not well levelled in the y-direction of the stage (3 mum change of working distance per 1 mm travel in y-direction). Please take of this during your exposures. Focus either close to the y position where the pattern is placed, or use the focus control in the AdjustUV window. I expect that the piezos will be installed within the next 6 weeks, and then this will be no longer an issue. Much success with your work! Best regards, Michael Kahl Application scientist Raith GmbH -- +++ GMX - Mail, Messaging & more http://www.gmx.net +++ Bitte l?cheln! Fotogalerie online mit GMX ohne eigene Homepage! -------------- next part -------------- A non-text attachment was scrubbed... Name: noisy image.jpg Type: image/jpeg Size: 252229 bytes Desc: not available URL: From cshen at briontech.com Thu Jul 3 11:08:51 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Thu, 3 Jul 2003 11:08:51 -0700 (PDT) Subject: Raith res cancelled Message-ID: <61136.171.64.100.112.1057255731.squirrel@mail.briontech.com> From altug at stanford.edu Thu Jul 3 21:37:20 2003 From: altug at stanford.edu (Hatice Altug) Date: Thu, 3 Jul 2003 21:37:20 -0700 Subject: Raith res cancelled References: <61136.171.64.100.112.1057255731.squirrel@mail.briontech.com> Message-ID: <003b01c341e5$f4cf04f0$275540ab@cragganmore> From chquay at MtHolyoke.edu Sun Jul 6 00:06:53 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Sun, 6 Jul 2003 03:06:53 -0400 (EDT) Subject: Raith Quirks Alert Message-ID: 1) The CCD camera is no longer working. This problem first reported in the logbook on the 4th of July by cshen. Apprently restarting the comptuer sometimes fixes this but I decided not to try it since I could find my sample anyway. 2) The stage has noticeable drift. About 0.1mm/hour by my estimate. Both cshen and I have found that turning the laser stage off and on again sometimes fixes this problem. cqhl. P.S. Perhaps there needs to be space in the logbook for reporting this sort of thing. From sandrew at stanford.edu Sun Jul 6 11:05:47 2003 From: sandrew at stanford.edu (Scott D. Andrews) Date: Sun, 6 Jul 2003 11:05:47 -0700 (PDT) Subject: Raith Quirks Alert In-Reply-To: Message-ID: > 1) The CCD camera is no longer working. This problem first reported in the > logbook on the 4th of July by cshen. Apprently restarting the comptuer > sometimes fixes this but I decided not to try it since I could find my > sample anyway. This could be from a software error that causes the channel to the TV to be lost by the computer. This happened about a month ago. The FAQ book contains directions on fixing this, but it requires the administrator password, which James would need to give the person who fixes it. -Scott From chquay at MtHolyoke.edu Sun Jul 6 13:10:07 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Sun, 6 Jul 2003 16:10:07 -0400 (EDT) Subject: Small Request In-Reply-To: Message-ID: Hi guys, when you cancel your resrvation and e-mail the list, would you mind terribly stating when the reservation was? Sometimes I have trouble figuring out if I should be looking for a blank space in Coral or for a block with your name on it. Much thanks. Charis. From jwc at snf.stanford.edu Tue Jul 8 13:03:26 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 08 Jul 2003 13:03:26 -0700 Subject: Raith problems and possible web page ideas for RAITH group References: Message-ID: <3F0B238D.BF5D1385@snf.stanford.edu> Greetings, Just returned... for one day! RAITH 150 System is up and running! Only need the time to do the task... I have no problem if someone wished to pick up the 'Tip'n'Tricks' and FAQ task. Any volunteers? I have it scheduled for completion into context sensitive HTML format by August 15, 2003. Sections planned Normal Operations procedures | Operations Tips'n'Tricks | Common Problems | FAQ Note that many FAQ's are in the email archives for the RAITH mail list. I will check with John Shott to ensure the link was added to the archive pages as per my request last month. Menwhile CORAL continues to be the place for problem reports, discussions can be done at raith at snf.stanford.edu. Back next Monday July 14, 2003 to reenter the fray! James Conway Charis Quay Huei Li wrote: > Thanks, Scott. Is that the 'Tips and Tricks' book? I have always had > trouble reading it; it is difficult to find specific things in it as > entries are organised chronologically. If enough people feel the same way, > James, do you think we could institute an organised-by-topic system for > reporting common errors and how to fix them? Our group has been using this > thing called a Swiki for our internal page with quite a lot of success > (see http://minnow.cc.gatech.edu/swiki) and I think it might work for this > as well. I would be happy to show you how to set it up and so - I'm > guessing - would Lindsay. I may stop by on Monday afternoon after my > e-beam session or if not then definitely on Tuesday probably in the > morning. > > Cheers, > Charis. From jwc at snf.stanford.edu Tue Jul 8 17:47:36 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 08 Jul 2003 17:47:36 -0700 Subject: RAITH UPDATE 7-8-2003 Message-ID: <3F0B6628.4518C626@snf.stanford.edu> Greetings: The new Laser stage works perfectly. If you are seeing drifting images likely it is charging! Check the Picoammeter specimen current when applying beam to your sample surface. Users are reminded to report all problems encountered to the raith-pcs at snf.stanford.edu mail list or from CORAL: Report Problem, using CORAL application. ALL USERS ARE REMINDED TO BE CAREFUL WITH THE LOAD AND UNLOAD SEQUENCE TO AVOID THE 'EVIL' LOAD LOCK ERROR NO. 4. WHICH REQUIRED A SYS. ADMIN. LOG IN TO CLEAR. RAITH Admin. if you DO run into problems: Luigi S. gigi at snf.stanford.edu Arvind S. arvind at stanford.edu Paul Jerabek jerabek at snf.stanford.edu I will be away on Stanford Business and will return on Monday July 14, 2003 at 8 AM. I should be reachable on cell phone evenings after 4 PM: 415-412-4825 leave VM if I don't pick up... Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From sandrew at stanford.edu Wed Jul 9 16:36:03 2003 From: sandrew at stanford.edu (Scott D. Andrews) Date: Wed, 9 Jul 2003 16:36:03 -0700 (PDT) Subject: Raith free, Thurs. 4:00 - 8:00 Message-ID: The subject says it all. -Scott From altug at stanford.edu Wed Jul 9 19:19:56 2003 From: altug at stanford.edu (Hatice Altug) Date: Wed, 9 Jul 2003 19:19:56 -0700 Subject: Thursday 12:00am-9am is free References: <3F0B6628.4518C626@snf.stanford.edu> Message-ID: <007001c34689$c154cd50$275540ab@cragganmore> Also saturday 6:00am-9:00am is free -hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: From okilic at stanford.edu Fri Jul 11 16:41:30 2003 From: okilic at stanford.edu (Onur KILIC) Date: Fri, 11 Jul 2003 16:41:30 -0700 Subject: Raith free, Monday 8AM-4PM Message-ID: <1057966890.3f0f4b2ab236e@webmail.stanford.edu> Raith free, Monday 8AM-4PM Onur KILI? ??????????????????????????????? PhD candidate Applied Physics Stanford University ??????????????????????????????? http://www.stanford.edu/~okilic From chquay at MtHolyoke.edu Fri Jul 11 17:08:45 2003 From: chquay at MtHolyoke.edu (Something or Other) Date: Fri, 11 Jul 2003 20:08:45 -0400 (EDT) Subject: Raith Free Wed 6am-noon In-Reply-To: <1057966890.3f0f4b2ab236e@webmail.stanford.edu> Message-ID: From altug at stanford.edu Fri Jul 11 18:49:18 2003 From: altug at stanford.edu (Hatice Altug) Date: Fri, 11 Jul 2003 18:49:18 -0700 (PDT) Subject: Raith free now from 6:30pm-12:00pm In-Reply-To: <1057966890.3f0f4b2ab236e@webmail.stanford.edu> Message-ID: wafer is not ready! ========================================================== Hatice Altug altug at stanford.edu www-miller.stanford.edu Applied Physics Department Solid State & Photonics Lab Stanford University Ginzton Lab AP-227 Stanford, CA 94305 (650) 725-2291 (office) (650) 725-7509 (fax) From ajavey at stanford.edu Wed Jul 16 22:31:52 2003 From: ajavey at stanford.edu (Ali Javey) Date: Wed, 16 Jul 2003 22:31:52 -0700 (PDT) Subject: reservation removed midnight - 6 am Message-ID: sorry for the late note. the sample is not ready.... From jwc at snf.stanford.edu Fri Jul 18 13:31:59 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 18 Jul 2003 13:31:59 -0700 Subject: RAITH UPDATE FOR FRIDAY JULY 18, 2003 Message-ID: <3F18593F.D67B013B@snf.stanford.edu> An HTML attachment was scrubbed... URL: From ajavey at stanford.edu Fri Jul 18 20:22:45 2003 From: ajavey at stanford.edu (Ali Javey) Date: Fri, 18 Jul 2003 20:22:45 -0700 (PDT) Subject: reservation removed midnight - 6 am Message-ID: sorry for the late note. sample is not ready... From ACREMANN at SSRL.SLAC.STANFORD.EDU Fri Jul 18 20:51:02 2003 From: ACREMANN at SSRL.SLAC.STANFORD.EDU (ACREMANN at SSRL.SLAC.STANFORD.EDU) Date: Fri, 18 Jul 2003 20:51:02 -0700 (PDT) Subject: raith free Monday 0930-1300 Message-ID: <01KYF1O1TUR69ESK3G@SSRL.SLAC.STANFORD.EDU> sample not ready... Yves From ACREMANN at SSRL.SLAC.STANFORD.EDU Fri Jul 18 20:53:32 2003 From: ACREMANN at SSRL.SLAC.STANFORD.EDU (ACREMANN at SSRL.SLAC.STANFORD.EDU) Date: Fri, 18 Jul 2003 20:53:32 -0700 (PDT) Subject: correction, Tuesday Message-ID: <01KYF1R5IPG29ESK3G@SSRL.SLAC.STANFORD.EDU> sorry for the last email, raith is free on Tuesday 0930-1300, not Monday Yves From altug at stanford.edu Sat Jul 19 04:08:50 2003 From: altug at stanford.edu (Hatice Altug) Date: Sat, 19 Jul 2003 04:08:50 -0700 Subject: raith free Sunday 0130-0900 References: <01KYF1O1TUR69ESK3G@SSRL.SLAC.STANFORD.EDU> Message-ID: <005101c34de6$225c0a60$275540ab@cragganmore> From cshen at briontech.com Sat Jul 19 15:10:52 2003 From: cshen at briontech.com (Chongfei Shen) Date: Sat, 19 Jul 2003 15:10:52 -0700 Subject: Raith free from 6pm-9:30pm today Message-ID: From cshen at briontech.com Sat Jul 19 20:17:31 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Sat, 19 Jul 2003 20:17:31 -0700 (PDT) Subject: Raith res cancelled Message-ID: <64911.171.64.100.112.1058671051.squirrel@mail.briontech.com> sample not ready, sorry for the late notice. From chquay at MtHolyoke.edu Sun Jul 20 20:26:40 2003 From: chquay at MtHolyoke.edu (Something or Other) Date: Sun, 20 Jul 2003 23:26:40 -0400 (EDT) Subject: Monday (tomorrow) reservation cancelled Message-ID: 8am - 2pm. Sorry for late notice. cqhl. From arvisun at stanford.edu Mon Jul 21 11:50:41 2003 From: arvisun at stanford.edu (arvind sundaramurthy) Date: Mon, 21 Jul 2003 11:50:41 -0700 Subject: Raith Res. Cancelled Message-ID: <001301c34fb8$fc659b80$8a5540ab@quateweb> Raith free from 6:00pm-2:00am today(monday). Sorry for the late notice. arvind -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Wed Jul 23 19:09:28 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Wed, 23 Jul 2003 19:09:28 -0700 (PDT) Subject: reservation removed tomorrow morning 7.30am-10am Message-ID: sorry for late notice From chquay at MtHolyoke.edu Thu Jul 24 17:16:01 2003 From: chquay at MtHolyoke.edu (Something or Other) Date: Thu, 24 Jul 2003 20:16:01 -0400 (EDT) Subject: Friday (tomorrow) reservation cancelled In-Reply-To: Message-ID: 4am - 10am. Sorry for late notice. Not feeling well. cqhl. From lgx at stanford.edu Thu Jul 24 17:28:05 2003 From: lgx at stanford.edu (lgx at stanford.edu) Date: Thu, 24 Jul 2003 17:28:05 -0700 Subject: Raith free 7:30pm - 10 pm tonight Message-ID: <1059092885.3f207995c1cb0@webmail.stanford.edu> Samples not ready. Sorry for late notice. From altug at stanford.edu Thu Jul 24 19:07:09 2003 From: altug at stanford.edu (Hatice Altug) Date: Thu, 24 Jul 2003 19:07:09 -0700 Subject: Raith free FRIDAY 17:00 - 24:00 References: <1059092885.3f207995c1cb0@webmail.stanford.edu> Message-ID: <000a01c35251$74f4ba50$275540ab@cragganmore> From charley at snf.stanford.edu Mon Jul 28 09:50:48 2003 From: charley at snf.stanford.edu (charley) Date: Mon, 28 Jul 2003 09:50:48 -0700 Subject: Chairs! Message-ID: <3F255468.94843734@snf.stanford.edu> Raith Folks, PLEASE do not jam up the little cubbyhole by the VAX with chairs. This makes it impossible to access the vac control (the little window really doesn't allow a good view of the vac control) and it is a danger to the VAX. The chair arms are just about the right height to push the WRONG buttons on the VAX and create a major disaster. Thanks for your consideration of others. chw3 From cshen at briontech.com Mon Jul 28 23:21:44 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Mon, 28 Jul 2003 23:21:44 -0700 (PDT) Subject: Raith free now Message-ID: <1730.171.64.100.35.1059459704.squirrel@mail.briontech.com> finished early From lsmoore at stanford.edu Tue Jul 29 11:22:16 2003 From: lsmoore at stanford.edu (Lindsay Moore) Date: Tue, 29 Jul 2003 11:22:16 -0700 Subject: free today 5-8pm In-Reply-To: <3ED3E7D8.38224DA5@snf.stanford.edu> Message-ID: <5.1.1.5.2.20030729112147.035402f0@lsmoore.pobox.stanford.edu> hi all, the raith is free from 5-8pm today. From scaccag at stanford.edu Tue Jul 29 21:30:30 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 29 Jul 2003 21:30:30 -0700 (PDT) Subject: reservation cancelled tomorrow morning Message-ID: sample not ready... sorry From mtopinka at stanford.edu Wed Jul 30 16:30:01 2003 From: mtopinka at stanford.edu (Mark Topinka) Date: Wed, 30 Jul 2003 16:30:01 -0700 Subject: Raith open Message-ID: <5.2.0.9.0.20030730162705.00b3c888@mtopinka.pobox.stanford.edu> If anybody wants to use the Raith, something has come up and I have to be gone until about 8. Just unload my samples and go ahead. -Mark From cshen at briontech.com Thu Jul 31 19:17:36 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Thu, 31 Jul 2003 19:17:36 -0700 (PDT) Subject: Raith free now Message-ID: <2834.171.64.100.35.1059704256.squirrel@mail.briontech.com>