From jwc at snf.stanford.edu Mon Jun 2 15:20:36 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Jun 2003 15:20:36 -0700 Subject: RAITH Daily report and announcement of extended downtime June 16 - 28, 2003 Message-ID: <3EDBCDB4.A1D6A439@snf.stanford.edu> An HTML attachment was scrubbed... URL: From cshen at briontech.com Mon Jun 2 15:55:49 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Mon, 2 Jun 2003 15:55:49 -0700 (PDT) Subject: Raith res partly cancelled Message-ID: <4735.171.64.100.124.1054594549.squirrel@mail.briontech.com> I expect my Raith session to be short today, so I cancelled the time from 6pm-8pm. I may finish around 5:30pm. From cshen at briontech.com Fri Jun 6 12:48:31 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Fri, 6 Jun 2003 12:48:31 -0700 (PDT) Subject: Raith free Message-ID: <61285.171.64.100.112.1054928911.squirrel@mail.briontech.com> Sorry for the late notice. I cancelled part of the reservation this afternoon. From scaccag at stanford.edu Fri Jun 6 15:48:21 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 6 Jun 2003 15:48:21 -0700 (PDT) Subject: reservation removed tomorrow (saturday) Message-ID: sample won't be ready... From ajavey at stanford.edu Sat Jun 7 22:29:59 2003 From: ajavey at stanford.edu (Ali Javey) Date: Sat, 7 Jun 2003 22:29:59 -0700 (PDT) Subject: Sunday reservation removed Message-ID: From dfattal at stanford.edu Sun Jun 8 02:43:52 2003 From: dfattal at stanford.edu (David Fattal) Date: Sun, 8 Jun 2003 02:43:52 -0700 Subject: sunday morning reservation removed Message-ID: sample not ready, sorry for the late notice... David From scaccag at stanford.edu Mon Jun 9 17:55:38 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 9 Jun 2003 17:55:38 -0700 (PDT) Subject: HELP!!! Message-ID: HI all, I just started, but the gun and EHT icons on lower right of LEO terminal are shaded and there is no way to bring up the beam (either with RAITH command or with LEO commands)... I treid to call james, but does not answer. If anybody knows how to fix the problem can please write me or call me here (5-3673). Thanks a lot Gigi From chquay at MtHolyoke.edu Tue Jun 10 10:45:02 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Tue, 10 Jun 2003 13:45:02 -0400 (EDT) Subject: All reservations today cancelled In-Reply-To: Message-ID: gigi, will take your piece out. cqhl. From chquay at MtHolyoke.edu Tue Jun 10 10:45:27 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Tue, 10 Jun 2003 13:45:27 -0400 (EDT) Subject: note In-Reply-To: Message-ID: all reservations includes quay and lsmoore. From dfattal at stanford.edu Tue Jun 10 10:53:56 2003 From: dfattal at stanford.edu (David Fattal) Date: Tue, 10 Jun 2003 10:53:56 -0700 Subject: note In-Reply-To: Message-ID: I'll take it, thanks ! -----Original Message----- From: Charis Quay Huei Li [mailto:chquay at MtHolyoke.edu] Sent: Tuesday, June 10, 2003 10:45 AM To: Luigi Scaccabarozzi Cc: raith at snf.stanford.edu Subject: note all reservations includes quay and lsmoore. From jwc at snf.stanford.edu Tue Jun 10 12:02:01 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 10 Jun 2003 12:02:01 -0700 Subject: REMINDER: RAITH planned downtime for Laser Stage repairs June 17 - 27, 2003 Message-ID: <3EE62B29.1726C709@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 11 13:56:23 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Jun 2003 13:56:23 -0700 Subject: New RAITH User Logins, Please check your magnification display setting on LEO. Message-ID: <3EE79777.9CFA2D0F@snf.stanford.edu> An HTML attachment was scrubbed... URL: From cshen at briontech.com Wed Jun 11 16:27:52 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Wed, 11 Jun 2003 16:27:52 -0700 (PDT) Subject: Raith finish early Message-ID: <61444.171.64.100.112.1055374072.squirrel@mail.briontech.com> I'll finish before 5:30pm. Grab it! From jwc at snf.stanford.edu Wed Jun 11 17:14:47 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Jun 2003 17:14:47 -0700 Subject: Please enter your EBL write information in the NEW RAITH 150 Operations Logbook. Message-ID: <3EE7C5F7.E6F8DBD0@snf.stanford.edu> An HTML attachment was scrubbed... URL: From sandrew at stanford.edu Thu Jun 12 12:33:47 2003 From: sandrew at stanford.edu (Scott D. Andrews) Date: Thu, 12 Jun 2003 12:33:47 -0700 (PDT) Subject: Problems with single-pixel lines Message-ID: Hello, Has anyone else had problems getting single-pixel lines to come out? I can get dots and area to come out great. I am using 100 for areas and 0.4 fAs for dots. For lines, I have tried everything from 200 pAs/cm to 3000 pAs/cm. I only got some lines to come out once and that was with great focus and doses greater than 1200 pAs/cm. My understanding is that 300-360 pAs/cm is the normal range. Does anyone have suggestions for what may be wrong? Thanks, Scott From jwc at snf.stanford.edu Thu Jun 12 14:57:06 2003 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Jun 2003 14:57:06 -0700 Subject: Problems with single-pixel lines References: Message-ID: <3EE8F732.6DB292B6@snf.stanford.edu> Hello RAITH Users: Dfattal has also reported no finding Single Pixel Lines... this week.. 100 nm PMMA What resist type and from what resist bottle are you using? Last month there was a couple of reports of no lines or features resolved on the H-700 (EBEAM) and we were trying to identify a possible bad batch or bottle. Those users queried were not able to cite a specific bottle.... (Keep notes of your resist lot and date in your Lab Notebook folks!) The 2% 950K MW microchem PMMA (bottle No. 4) has been qualified and it was working fine for me... Does anybody else have good or bad results to report? James Conway "Scott D. Andrews" wrote: > Hello, > > Has anyone else had problems getting single-pixel lines to come out? I > can get dots and area to come out great. I am using 100 for areas and 0.4 > fAs for dots. For lines, I have tried everything from 200 pAs/cm to 3000 > pAs/cm. I only got some lines to come out once and that was with great > focus and doses greater than 1200 pAs/cm. My understanding is that > 300-360 pAs/cm is the normal range. Does anyone have suggestions for what > may be wrong? > > Thanks, > Scott From mtopinka at stanford.edu Thu Jun 12 15:25:49 2003 From: mtopinka at stanford.edu (Mark Topinka) Date: Thu, 12 Jun 2003 15:25:49 -0700 Subject: unused reservations anyone? In-Reply-To: Message-ID: <5.2.0.9.0.20030612152402.02159e68@mtopinka.pobox.stanford.edu> I just wanted to request that people be extra sure to alert the raith list of any reservations that open up between now and Tueday, since it's 100% booked until then and I (and probably other people) would love to get on between now and then. Thanks! -Mark From dfattal at stanford.edu Fri Jun 13 03:17:08 2003 From: dfattal at stanford.edu (David Fattal) Date: Fri, 13 Jun 2003 03:17:08 -0700 Subject: reservation cancelled this sunday !! Message-ID: feel free to take it. David From jwc at snf.stanford.edu Fri Jun 13 09:26:19 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Jun 2003 09:26:19 -0700 Subject: RAITH UPDATE...Friday 6-13-2003 Message-ID: <3EE9FB2B.ECDA3D5F@snf.stanford.edu> An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Fri Jun 13 16:58:24 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 13 Jun 2003 16:58:24 -0700 (PDT) Subject: may finish early tonight Message-ID: Just to let you know that I may finish much earlier tonight. I'll send another email after starting the exposure, as soon as I can estimate how long it will take... (the raith estimate is totally screwed up with my sample and I have to measure the time manually at the time of writing of the first feature...) Gigi From jwc at snf.stanford.edu Fri Jun 13 18:36:40 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Jun 2003 18:36:40 -0700 Subject: James Conway cell phone number and times to call... References: <5.2.0.9.0.20030612152402.02159e68@mtopinka.pobox.stanford.edu> <5.2.0.9.0.20030612185133.02167a30@mtopinka.pobox.stanford.edu> Message-ID: <3EEA7C28.F8C2ECC2@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: C:\DOCUME~1\jwc\LOCALS~1\Temp\nsmail5U.gif Type: image/gif Size: 650316 bytes Desc: not available URL: From scaccag at stanford.edu Fri Jun 13 22:04:06 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 13 Jun 2003 22:04:06 -0700 (PDT) Subject: raith free from 3am to 10am tonight Message-ID: HI all, so, according to my estimate my writing should finish around 2-2.30am, instead of tomorrow night, as estimated by raith, so if any brave Raith-er wants to take over, I guess from 2.30-3am it should be fine. If by chance the writing is not done by that time, just stop it: it should be close to the end anyway. Please leave my sample in the chamber (though you can change its position if you need) until tomorrow morning. Hope this time can be useful to someone, though with such a late notice. Good luck. GIgi From altug at stanford.edu Sat Jun 14 20:58:54 2003 From: altug at stanford.edu (Hatice Altug) Date: Sat, 14 Jun 2003 20:58:54 -0700 Subject: RAITH problem References: <5.2.0.9.0.20030612152402.02159e68@mtopinka.pobox.stanford.edu> <5.2.0.9.0.20030612185133.02167a30@mtopinka.pobox.stanford.edu> <3EEA7C28.F8C2ECC2@snf.stanford.edu> Message-ID: <001801c332f2$70b0df60$275540ab@cragganmore> Hi Raith users, I am having a problem while I am unloading my sample. It says "During the last load/unload procedure there was a problem with the loadloack" "loadlock Error is 4" The beam is still on and I can measure the it. Does anybody know how to solve this problem? -Hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Sun Jun 15 13:59:37 2003 From: jwc at snf.stanford.edu (James Conway) Date: Sun, 15 Jun 2003 13:59:37 -0700 Subject: Unqualified access through training login -- passwd has been changed. RAITH IS BACK UP! Message-ID: <3EECDE39.3F234F1@snf.stanford.edu> An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Sun Jun 15 15:46:57 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Sun, 15 Jun 2003 15:46:57 -0700 (PDT) Subject: reservation removed tomorrow night (monday 7-12pm) Message-ID: From cshen at briontech.com Mon Jun 16 11:14:14 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Mon, 16 Jun 2003 11:14:14 -0700 (PDT) Subject: Raith res partly cancelled Message-ID: <61863.171.64.100.112.1055787254.squirrel@mail.briontech.com> From cshen at briontech.com Mon Jun 16 17:52:09 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Mon, 16 Jun 2003 17:52:09 -0700 (PDT) Subject: Raith finished early Message-ID: <61893.171.64.100.112.1055811129.squirrel@mail.briontech.com> free now. From jwc at snf.stanford.edu Mon Jun 23 10:47:53 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 23 Jun 2003 10:47:53 -0700 Subject: RAITH 150 UPDATE Monday June 23, 2003 Message-ID: <3EF73D49.9C000EEC@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 25 10:42:57 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 25 Jun 2003 10:42:57 -0700 Subject: RAITH 150 TESTING UPdate... Application Specific testing / Q&A sessions annoucement. Message-ID: <3EF9DF21.7A14EB55@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 25 11:08:53 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 25 Jun 2003 11:08:53 -0700 Subject: All users take note: Change to FE-GUN alignment procedure...ver.2.0 Message-ID: <3EF9E535.D761121F@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jun 27 22:38:53 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 Jun 2003 22:38:53 -0700 Subject: SPECIAL EDITION: RAITH UPDATE and more: RAITH IS IN SPEC AND AVAILABLE TO USERS! Message-ID: <3EFD29ED.971377AE@snf.stanford.edu> An HTML attachment was scrubbed... URL: From cshen at briontech.com Sun Jun 29 18:36:15 2003 From: cshen at briontech.com (cshen at briontech.com) Date: Sun, 29 Jun 2003 18:36:15 -0700 (PDT) Subject: need help on ebeam liftoff Message-ID: <3510.171.64.101.249.1056936975.squirrel@mail.briontech.com> Has anybody worked on double layer PMMA liftoff process? If so, can I ask you a few questions?I wish to know your recipe and the capability of the process. Is 130nm features achievable with good uniformity?Thanks a lot. Chongfei