need help on ebeam liftoff

cshen at briontech.com cshen at briontech.com
Sun Jun 29 18:36:15 PDT 2003


Has anybody worked on double layer PMMA liftoff process? If so, can I ask
you a few questions?I wish to know your recipe and the capability of the process. Is 130nm
features achievable with good uniformity?Thanks a lot.
Chongfei





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