need help on ebeam liftoff

cshen at cshen at
Sun Jun 29 18:36:15 PDT 2003

Has anybody worked on double layer PMMA liftoff process? If so, can I ask
you a few questions?I wish to know your recipe and the capability of the process. Is 130nm
features achievable with good uniformity?Thanks a lot.

More information about the raith mailing list