From hendrikb at stanford.edu Mon Sep 1 01:33:11 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Mon, 1 Sep 2003 01:33:11 -0700 (PDT) Subject: raith free for rest of night. Message-ID: Done early. Enjoy! --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From chquay at MtHolyoke.edu Wed Sep 3 12:13:20 2003 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Wed, 3 Sep 2003 15:13:20 -0400 (EDT) Subject: reservation removed Message-ID: 5pm today. sample not ready. cqhl. From altug at stanford.edu Wed Sep 3 16:34:50 2003 From: altug at stanford.edu (Hatice Altug) Date: Wed, 3 Sep 2003 16:34:50 -0700 Subject: raith free from 17:00pm-19:00pm today References: Message-ID: <005c01c37273$f8de9c90$685440ab@hatice> Opening for only 2hours! From cquayhl at stanford.edu Thu Sep 4 08:18:37 2003 From: cquayhl at stanford.edu (Charis Quay Huei Li) Date: Thu, 4 Sep 2003 08:18:37 -0700 (PDT) Subject: done with write early Message-ID: started early, done early. 9am to 1pm now free. cqhl. From cshen at briontech.com Fri Sep 5 17:51:21 2003 From: cshen at briontech.com (Chongfei Shen) Date: Fri, 5 Sep 2003 17:51:21 -0700 Subject: Raith res cancelled Monday Message-ID: From scaccag at stanford.edu Fri Sep 5 19:09:43 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 5 Sep 2003 19:09:43 -0700 (PDT) Subject: got chongfei's monday res., cancelled tomorrow (sat.) In-Reply-To: Message-ID: From kcrozier at stanford.edu Fri Sep 5 19:12:23 2003 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Fri, 05 Sep 2003 19:12:23 -0700 Subject: raith reservation cancelled midnight-6am Message-ID: <5.2.0.9.2.20030905191041.015c39d0@kcrozier.pobox.stanford.edu> hi, I am cancelling my reservation for the Raith for midnight-6am tonight (i.e. 00:00 - 06:00 9/6/03). Sorry for the late notice. Ken Crozier From lgx at stanford.edu Fri Sep 5 22:36:35 2003 From: lgx at stanford.edu (Guanxiong Li) Date: Fri, 5 Sep 2003 22:36:35 -0700 Subject: reservation 10am - 1 pm, 9/6, freed Message-ID: <005f01c37438$d64dcf40$0c9f0c80@stanford.edu> Sample not ready. -lgx -------------------------------------------------- Materials Science and Engineering Stanford University Office: 208 McCullough Bldg. Phone: 650-723-2939 --------------------------------------------------- -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtopinka at stanford.edu Sat Sep 6 15:46:55 2003 From: mtopinka at stanford.edu (Mark Allen Topinka) Date: Sat, 6 Sep 2003 15:46:55 -0700 Subject: done early on Raith In-Reply-To: References: Message-ID: <1062888415.3f5a63dfda277@webmail.stanford.edu> Hi- I finished early. Free until atleast 6. -Mark From altug at stanford.edu Sun Sep 7 15:11:19 2003 From: altug at stanford.edu (Hatice Altug) Date: Sun, 7 Sep 2003 15:11:19 -0700 Subject: URGENT RAITH Question/Problem!! References: <005f01c37438$d64dcf40$0c9f0c80@stanford.edu> Message-ID: <008501c3758c$f7942be0$419a0c80@hatice> Hi All, When I am using Raith, LEO computer reboots itself suddenly. I happens about every 15-20 min. Screen goes blank and then restarts again. Did anybody experience this problem or do you know solution. I will really appreciate if you reply me ASAP because I cannot use my spot! Thanks, -Hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: From ajavey at stanford.edu Sun Sep 7 18:48:11 2003 From: ajavey at stanford.edu (Ali Javey) Date: Sun, 7 Sep 2003 18:48:11 -0700 (PDT) Subject: reservation removed 12 am - 6 am Message-ID: sorry for the late note... Ali From scaccag at stanford.edu Mon Sep 8 19:07:47 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 8 Sep 2003 19:07:47 -0700 (PDT) Subject: URGENT RAITH Question/Problem!! In-Reply-To: <008501c3758c$f7942be0$419a0c80@hatice> Message-ID: Hatice, this morning, with David, we had the same problem. Then we checked all the plugs (power supply, wetc...): they looked fine, however after that it worked fine. Another problem we found at the beginning is that the TV and detector were gone. I fixed that too, but it didn't happen when the computer rebooted by itrself with David, so I suspect there was something else wrong with it when you used it. However, I wrote patterns for the entire afternoon and the computer didn't reboot again by itself, so I think the problem someway is fixed. Gigi On Sun, 7 Sep 2003, Hatice Altug wrote: > Hi All, > > When I am using Raith, LEO computer reboots itself suddenly. I happens about every 15-20 min. Screen goes blank and then restarts again. Did anybody experience this problem or do you know solution. I will really appreciate if you reply me ASAP because I cannot use my spot! > > Thanks, > > -Hatice From hungtao at stanford.edu Mon Sep 8 19:56:39 2003 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Mon, 8 Sep 2003 19:56:39 -0700 Subject: time open from 10am-2pm tomorrow Message-ID: <1063076199.3f5d4167a443c@webmail.stanford.edu> my sample is not ready -Hungtao From scaccag at stanford.edu Tue Sep 9 13:28:43 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 9 Sep 2003 13:28:43 -0700 (PDT) Subject: images on LEO computer Message-ID: Hi all, after what happened the two past days, I mean the LEO computer self-rebooting without appearent reason, I talked to Hatice, who suggested that it could be a hard disk problem. I just checked and she may be right, since the hard disk with the sofware (C:) was completely full. It's only 2 GB big, and there is 1GB of software + 1GB of pictures. Pictures should not be left on C:! There is another 16 GB volume mounted (D) which is empty and is for data! So I moved all the pictures from the images folder on C: to the folder D:\imagesbackup. I created a shortcut on the desktop, so please when you take pictures, save them directly on D: or move them afterward on D: Or just burn a CD, but don't leave them on C:! Also, I didn't check if there are other personal folders on C:, and if someone has, please move them on D: as well. Sorry if I took the initiative, but james is not around and I thought that this couldn't hurt anybody and would be beneficial. Gigi From scaccag at stanford.edu Wed Sep 10 17:16:43 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Wed, 10 Sep 2003 17:16:43 -0700 (PDT) Subject: reservation removed tonight Message-ID: Very sorry for late notice, sample was not ready and I forgot to remove it earlier today... From peter at kaos.stanford.edu Thu Sep 11 16:00:48 2003 From: peter at kaos.stanford.edu (Peter Catrysse) Date: Thu, 11 Sep 2003 16:00:48 -0700 Subject: Leo computer suddenly turned off again - Raith available Message-ID: Hi everyone: The Leo computer suddenly turned off again. It happened once before I started my session at 2pm today. I turned the Leo machine back on and it seemed to work fine for about an hour. Then the Leo computer turned off again without any warning. The Raith is currently available, since I decided to interrupt my session as a result of this. Thanks, Peter Catrysse, Ph.D. Dept. of Electrical Engineering Stanford University Stanford, CA 94305 Ph: (650) 725-1255 Fax: (650) 322-5379 From mtopinka at stanford.edu Thu Sep 11 18:57:42 2003 From: mtopinka at stanford.edu (Mark Allen Topinka) Date: Thu, 11 Sep 2003 18:57:42 -0700 Subject: TV/SEM detector error Message-ID: <1063331862.3f612816c324f@webmail.stanford.edu> Hi- does somebody with administrator access know how to fix this? The symptoms are simply that there are no detectors available on the LEO at all (no TV, no SE2, no INLENSE, nothing). Help! Thanks. -Mark 387-6049 From dfattal at stanford.edu Fri Sep 12 16:12:25 2003 From: dfattal at stanford.edu (David Fattal) Date: Fri, 12 Sep 2003 16:12:25 -0700 Subject: RAITH Question/Problem!! In-Reply-To: Message-ID: Hi guys, Raith has been behaving weird this week. The Leo computer reboots itself from time to time (it happened yesterday=thursday again), and it's been hard to get a decent focus (on the 100 nm level) the past two days. Also, a new unloading problem is occuring right now: the load lock arm ('T' degree of freedom) cannot get the stage back to the load lock. Can this all be correlated to a more universal problem ? Any suggestion ? D. From mtopinka at stanford.edu Fri Sep 12 16:39:12 2003 From: mtopinka at stanford.edu (Mark Allen Topinka) Date: Fri, 12 Sep 2003 16:39:12 -0700 Subject: Raith: Palette seems stuck halfway Message-ID: <1063409952.3f6259200602e@webmail.stanford.edu> Anybody know how to fix this one? Happened to the previous use, we (he, me, and Charlie) haven't been able to get it out yet. -Mark From hungtao at stanford.edu Fri Sep 12 16:55:58 2003 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Fri, 12 Sep 2003 16:55:58 -0700 Subject: time free from 21:00 to 24:00 today Message-ID: <1063410958.3f625d0e706b9@webmail.stanford.edu> sorry for the late notice, sample is not ready -hungtao From jiencao at stanford.edu Fri Sep 12 18:15:46 2003 From: jiencao at stanford.edu (Jien Cao) Date: Fri, 12 Sep 2003 18:15:46 -0700 Subject: RAITH Question/Problem!! References: Message-ID: <006b01c37994$8fe38840$fc7840ab@JienLaptop> The rebooting part sounds like the symptom of Blaster worm. Has the operating system been updated? www.windowsupdate.com Jien ----- Original Message ----- From: "David Fattal" To: "Luigi Scaccabarozzi" ; "Hatice Altug" Cc: Sent: Friday, September 12, 2003 4:12 PM Subject: RE: RAITH Question/Problem!! > > Hi guys, > > Raith has been behaving weird this week. The Leo computer reboots itself > from time to time (it happened yesterday=thursday again), and it's been hard > to get a decent focus (on the 100 nm level) the past two days. Also, a new > unloading problem is occuring right now: the load lock arm ('T' degree of > freedom) cannot get the stage back to the load lock. > > Can this all be correlated to a more universal problem ? Any suggestion ? > > D. > From altug at stanford.edu Sat Sep 13 21:21:08 2003 From: altug at stanford.edu (Hatice Altug) Date: Sat, 13 Sep 2003 21:21:08 -0700 Subject: RAITH Problem/ Raith free all night! References: Message-ID: <00f001c37a77$a063fc70$685440ab@hatice> Hi, When I tried to unload sample it gave these errors: Loadlock error:6 Robot Arm error:1 Also when I came in I again found that LEO was down by itself and no detectors were active I and next person after me will not use it all night so you can fix and use it! -hatice From kcrozier at stanford.edu Sun Sep 14 09:13:34 2003 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Sun, 14 Sep 2003 09:13:34 -0700 Subject: reservation cancelled Monday evening Message-ID: <5.2.0.9.2.20030914091238.011b74e8@kcrozier.pobox.stanford.edu> hi, I have cancelled my Monday evening (8pm onwards) - Tuesday morning reservation on the raith. thank you, Ken Crozier From altug at stanford.edu Sun Sep 14 11:55:30 2003 From: altug at stanford.edu (Hatice Altug) Date: Sun, 14 Sep 2003 11:55:30 -0700 Subject: reservation cancelled afternoon 1:30pm-120:00pm References: <5.2.0.9.2.20030914091238.011b74e8@kcrozier.pobox.stanford.edu> Message-ID: <010901c37af1$c5737110$685440ab@hatice> I cancelled my reservation this afternoon since machine looks still down. -hatice From scaccag at stanford.edu Mon Sep 15 08:50:49 2003 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 15 Sep 2003 08:50:49 -0700 (PDT) Subject: error cleared Message-ID: hi all, sorry, I discovered the email I wanted to send yesterday was still in my postponed... and probably now is too late, but... ...I cleared the error and restored the detectors, but didn't use raith or LEO by myself, so it may still give the same problems... Good luck to the next user Gigi PS: Edo, did you try yesterday night? how did it go? From jwc at snf.stanford.edu Mon Sep 15 09:37:36 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 15 Sep 2003 09:37:36 -0700 Subject: RAITH IS DOWN FOR REPAIRS. Message-ID: <3F65EAD0.FF07C3A4@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Sep 17 17:16:50 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 17 Sep 2003 17:16:50 -0700 Subject: Participants please REGISTER TODAY for the RAITH Users Meeting and Lithography Workshop References: <000801c37c1f$b27a0f40$6701a8c0@planck> Message-ID: <3F68F971.81628F24@snf.stanford.edu> Raith Users and Stanford Faculty: Please be so kind as to immediately reply to this email if you desire to join us for any, all, or part of the RAITH Users Meeting and the following RAITH Ebeam Lithography Workshop scheduled for September 29/30 and October 1-3, 2003 respectively. I have attached a draft of the daily schedule for your review. We wish to get an accurate head count of attendees for the RAITH Users Meeting so we can prepare conference materials including a participants list, name cards, and to ensure we order adequate amounts of food for the lunches and the Monday evening Supper. This will also include a Raith information package on CD of additional training materials which will be very useful to Users. Reply now to James Conway email: jwc at snf.stanford.edu or call and leave me a Voicemail at 001-650-725- 7075. Please state your Name | Department affiliation | email address or contact information. The favor of your immediate brief reply is requested. Stanford University RAITH Users whom wish to participate in the Raith Lithography Workshop are also requested to send me a brief email on which day(s) you wish to attend and specific topics you may desire to discuss so we can plan accordingly. Space is limited so please reply today! Thank you, James Conway > Greetings, > > The Schedule for the Raith-SNF Users Meeting are finalizing. Below you > will find a > daily schedule. Please note, those who HAVE REGISTERED for the meeting > are > invited to lunch on Monday and Tuesday, as well as a group Supper on > Monday > evening. It will be a great opportunity to become better acquainted > and > learn more about each other's applications and projects. > > MONDAY, September 29. > ===================== > 9:00 Welcome/Introduction > 9:10 Michael Kahl, Raith; Some results from Raith's Application Lab > in > Dortmund. > 9:35 James Conway, Stanford; Electron Beam Lithography, a critical > enabler towards the integration of Photonic Device Systems. > 10:00 COFFEE BREAK > 10:30 Charles Schaper, Stanford; Pattern Transfer of Metallic Thin > Film > Nanostructures by Water-Soluble Polymer Templates. > 10:55 Hendrik Bluhm, Stanford; Curved Features with Single Pixel > Lines. > 11:20 Short presentations: Applications/Interests of External Users. > > 11:45 LUNCH > 1:15 Luigi Scaccabarozzi, Stanford; AlGaAs waveguides and > micro-cavities > for non-linear optics. > 1:40 Michael Kahl, Raith; Exposing circle arrays. > 2:30 COFFEE BREAK > 3:00 Michael Kahl, Raith; Proximity effect. > 4:30-5:00 adjourn > SUPPER > > TUESDAY, September 30. > ====================== > 9:00 Michael Kahl, Raith; New software features and current > developments. > 9:30 Fred Williamson, Univ of Minnesota; SU-8 as an ebeam resist: > thin > and thick (grey-scale) applications. > 10:10 COFFEE BREAK > 10:40 David Goldhaber-Gordon group, Stanford; Electrons in > semiconductor > nanostructures. > 11:25 Onur Kilic, Stanford; Displacement-sensitive photonic crystal > structures based on guided resonance in photonic crystal slabs. > 11:50 LUNCH > 1:15 Chongfei Shen, Brion Technologies;Postprocess a purchased > finished wafer: promises and challenges" > 1:40 Exposure workshop on the R150 for external participants. > -5:00 adjourn > > > > A LITHOGRAPHY WORKSHOP is scheduled for Wednesday through Friday, > October > 1-3. This is for current qualified users of the Stanford RAITH system > only. > The topic for each day and the format will be flexible, but a general > plan to follow would be to begin each day with a ~ 2 hour > lecture/discussion > session. ALL Raith Users are encouraged to attend the > lecture/discussion > sessions. Following the classroom session will be a 'practical' or > hands-on > session using the R150 tool. Due to limited space in the cleanroom, > people > must SIGN-UP for the practical session in advance. This will be on a > first-come-first-serve basis. > Email or contact James Conway to reserve your spot. > > WEDNESDAY, October 1 > ==================== > Question/answer of exposure problems; tips and tricks. > After 2 days of presentations, and past knowledge of some difficulties > > experienced at SU, we can make general comments and suggestions for > improving exposure results. You should come with questions. To > really > benefit from this, users should come PREPARED in advance with images > and > files that we can load on a laptop and projector and look at the > questions > or problems you are experiencing and talk through the process as > though it > is a 'case study'. > > THURSDAY, October 2 > =================== > Metrology with the R150. > As a basis for this topic we can look at the stitching and overlay > test > pattern. In addition to learning more about stitching and overlay, you > can > learn about setting up measurements and doing statistical analysis on > your > exposure results. > > FRIDAY, October 3 > ================= > More discussion on proximity effects and circle arrays? > Discussions will focus on Photonic crystal devices, but maybe there > are > other areas of interest which users may wish to discuss as well? > - Discussions of any other remaining questions from the week. > Previous annoucement attached. Dated August 21, 2003. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Previous annoucement August 21.doc Type: application/vnd.ms-word Size: 24576 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Sep 18 09:25:50 2003 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Sep 2003 09:25:50 -0700 Subject: RAITH UPDATE :: System remains down for repairs to LEO computer and RAITH Loader Message-ID: <3F69DC8E.8DE13F02@snf.stanford.edu> An HTML attachment was scrubbed... URL: From hendrikb at stanford.edu Fri Sep 19 11:29:19 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Fri, 19 Sep 2003 11:29:19 -0700 (PDT) Subject: Res cancelled tonight Message-ID: --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From jwc at snf.stanford.edu Fri Sep 19 18:10:51 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 19 Sep 2003 18:10:51 -0700 Subject: LEO computer TV/SEM detector configuration error References: <1063331862.3f612816c324f@webmail.stanford.edu> Message-ID: <3F6BA91B.27254DA@snf.stanford.edu> Mark and RAITH Users: We are close to resolving this problem. * A new power supply to LEO PC installed and LEO states it is a bug in their SW * This will be fixed with scheduled SW upgrade -- scheduled next week... JWC Mark Allen Topinka wrote: > Hi- does somebody with administrator access know how to fix this? The > symptoms are simply that there are no detectors available on the LEO at all > (no TV, no SE2, no INLENSE, nothing). Help! Thanks. -Mark 387-6049 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Sep 19 18:18:28 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 19 Sep 2003 18:18:28 -0700 Subject: UVN-30 and GaAs References: Message-ID: <3F6BAAE4.929BDDD0@snf.stanford.edu> Please use HMDS prime on all III-V substrates after complete substrate cleans and careful N2 blow off. Standard practice everywhere... All the best, James Conway SNF Kai-Mei Camilla Fu wrote: > Hello, > > After a bit of frustration with wandering features, someone finally > suggested that I do my process on Si and GaAs at the same time. I did the > SNF process for UVN-30 on raith on Si, GaAs, and GaN this morning and > found that the Si sample did not have any adhesion problems. ON the GaAs > sample I was able to find bits of patterns. On the GaN sample I was able > to find a part of the dose array somewhat intact. I varied the doses from > 2-20 uC/cm^2 and most features were overexposed. > > I feel like this would be interesting information for future users of > UVN30. I am not sure if there is a way to get around this adhesion > problem with GaAs but the current SNF process does not work for GaAs or > GaN. > > If you have any suggestions please let me know. Someone suggested I try > spinning HMDS on myself. Since I thought the YES oven was optimized for > HMDS I am a bit weary of trying this, but if you have had experience with > better adhesion by spinning I will certainly give it a try. > > Kai-Mei From kaimeifu at stanford.edu Fri Sep 19 18:41:45 2003 From: kaimeifu at stanford.edu (Kai-Mei Camilla Fu) Date: Fri, 19 Sep 2003 18:41:45 -0700 (PDT) Subject: UVN-30 and GaAs In-Reply-To: <3F6BAAE4.929BDDD0@snf.stanford.edu> Message-ID: There was HMDS on all samples, deposited using the YES oven. The SNF process sheet was followed for UVN-30 which includes HMDS. On Fri, 19 Sep 2003, James Conway wrote: > Please use HMDS prime on all III-V substrates after complete substrate cleans > and careful N2 blow off. > > Standard practice everywhere... > > All the best, > > James Conway > SNF > > Kai-Mei Camilla Fu wrote: > > > Hello, > > > > After a bit of frustration with wandering features, someone finally > > suggested that I do my process on Si and GaAs at the same time. I did the > > SNF process for UVN-30 on raith on Si, GaAs, and GaN this morning and > > found that the Si sample did not have any adhesion problems. ON the GaAs > > sample I was able to find bits of patterns. On the GaN sample I was able > > to find a part of the dose array somewhat intact. I varied the doses from > > 2-20 uC/cm^2 and most features were overexposed. > > > > I feel like this would be interesting information for future users of > > UVN30. I am not sure if there is a way to get around this adhesion > > problem with GaAs but the current SNF process does not work for GaAs or > > GaN. > > > > If you have any suggestions please let me know. Someone suggested I try > > spinning HMDS on myself. Since I thought the YES oven was optimized for > > HMDS I am a bit weary of trying this, but if you have had experience with > > better adhesion by spinning I will certainly give it a try. > > > > Kai-Mei > From jwc at snf.stanford.edu Fri Sep 19 18:56:10 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 19 Sep 2003 18:56:10 -0700 Subject: RAITH is coming back up. Access for RAITH Champions only, otherwise call me... Message-ID: <3F6BB3BA.110BB43E@snf.stanford.edu> Greetings: The Raith Loader arm has been repaired and recalibrated. The system is available for RAITH CHAMPION USE over the weekend. Those on the current CORAL schedule can access the system over the weekend. Please be very careful and record all errors encountered and call me immediately should you encounter any problems whatsoever. I can be reached as always at 415-412-4825 24/7 Thank you for your support this week! James Conway Stanford Nanofabrication Facility From jwc at snf.stanford.edu Mon Sep 22 09:19:05 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 22 Sep 2003 09:19:05 -0700 Subject: RAITH is back up. Access for all schedule users this week. LEO problems continue. References: <3F6BB3BA.110BB43E@snf.stanford.edu> Message-ID: <3F6F20F9.304FE7C0@snf.stanford.edu> Greetings: Here is a brief RAITH 150 update as of Monday Morning 8:50 AM: Several users were able to get on the system over the weekend and get writes performed. The RAITH Field service team has finished repairs and all RAITH side functions are performing optimally. Thank you, Cole Loomis and Bernd Stegemann for making the most of a short visit here to Stanford! The LEO computer continues to experience intermittent rebooting of its PC for unknown causes. Friday we replaced this PC's power supply with a new supply, but this did not correct the problem as Users observed several reboots over the weekend. LEO will be returning today for continued evaluation. All Users are expected to immediate report problems and all error encountered to both the Coral system and James Conway. Thank you for your support! James Conway Ebeam Technology Group James Conway wrote: > Greetings: > > The Raith Loader arm has been repaired and recalibrated. > The system is available for RAITH CHAMPION USE over the weekend. > Those on the current CORAL schedule can access the system over the > weekend. > > Please be very careful and record all errors encountered and call me > immediately should you encounter any problems whatsoever. I can be > reached as always at 415-412-4825 24/7 > > Thank you for your support this week! > > James Conway > Stanford Nanofabrication Facility From mahnaz at snf.stanford.edu Mon Sep 22 09:26:12 2003 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 22 Sep 2003 09:26:12 -0700 Subject: UVN-30 and GaAs References: Message-ID: <3F6F22A4.E36409A5@snf.stanford.edu> Hi Kai, I have another adhesion promoter , come and see me . It worth trying it. mahnaz Kai-Mei Camilla Fu wrote: > There was HMDS on all samples, deposited using the YES oven. The SNF > process sheet was followed for UVN-30 which includes HMDS. > > On Fri, 19 Sep 2003, James Conway wrote: > > > Please use HMDS prime on all III-V substrates after complete substrate cleans > > and careful N2 blow off. > > > > Standard practice everywhere... > > > > All the best, > > > > James Conway > > SNF > > > > Kai-Mei Camilla Fu wrote: > > > > > Hello, > > > > > > After a bit of frustration with wandering features, someone finally > > > suggested that I do my process on Si and GaAs at the same time. I did the > > > SNF process for UVN-30 on raith on Si, GaAs, and GaN this morning and > > > found that the Si sample did not have any adhesion problems. ON the GaAs > > > sample I was able to find bits of patterns. On the GaN sample I was able > > > to find a part of the dose array somewhat intact. I varied the doses from > > > 2-20 uC/cm^2 and most features were overexposed. > > > > > > I feel like this would be interesting information for future users of > > > UVN30. I am not sure if there is a way to get around this adhesion > > > problem with GaAs but the current SNF process does not work for GaAs or > > > GaN. > > > > > > If you have any suggestions please let me know. Someone suggested I try > > > spinning HMDS on myself. Since I thought the YES oven was optimized for > > > HMDS I am a bit weary of trying this, but if you have had experience with > > > better adhesion by spinning I will certainly give it a try. > > > > > > Kai-Mei > > From lgx at stanford.edu Mon Sep 22 12:32:08 2003 From: lgx at stanford.edu (Guanxiong Li) Date: Mon, 22 Sep 2003 12:32:08 -0700 Subject: Reservation 2:30 - 6 pm, 9/23 removed Message-ID: <00b501c38140$3708cec0$0c9f0c80@stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Sep 22 18:25:04 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 22 Sep 2003 18:25:04 -0700 Subject: Problem raith 2003-09-22 18:22:09: Please inspect your patterns and report Message-ID: <3F6FA0F0.D15CE53A@snf.stanford.edu> Greetings: Please inspect your pattern carefully before pattern transfer. > Sub-field stitching and pattern placement errors were encountered on writes performed over the weekend and this morning. > Please inspect your patterns carefully after development and report to the raith-pcs at snf.stanford.edu list. > LEO computer problems continue but with less frequency than before. We are testing and evaluating both these problems. > James Conway This image should have had the target and the star pattern overlaid on 1,1 U:V. Note the star pattern has been broken up into consistent subfields. Has anyone else seen these type of errors and when did they start to occur. Thank you for your support! JWC [Image] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: C:\DOCUME~1\jwc\LOCALS~1\Temp\nsmailRB.jpeg Type: image/jpeg Size: 136737 bytes Desc: not available URL: From kaimeifu at stanford.edu Tue Sep 23 11:06:15 2003 From: kaimeifu at stanford.edu (Kai-Mei Camilla Fu) Date: Tue, 23 Sep 2003 11:06:15 -0700 (PDT) Subject: cancelled reservation 12:30-2:30 today Message-ID: I mixed up my reservation time and my samples are not ready. I'm very sorry for the late notice. I hope someone can use it. Kai-mei From hendrikb at stanford.edu Tue Sep 23 11:11:15 2003 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Tue, 23 Sep 2003 11:11:15 -0700 (PDT) Subject: 14:30- 18:00 cancelled too Message-ID: --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From charley at snf.stanford.edu Wed Sep 24 09:26:00 2003 From: charley at snf.stanford.edu (Charley) Date: Wed, 24 Sep 2003 09:26:00 -0700 Subject: chairs, etc Message-ID: <3F71C598.F9C1E893@snf.stanford.edu> Raith users, We are having a problem with you folks crowding the ebeam uVax cabinet and the electronics cabinet I'm currently working on. I constantly find chairs jammed into the little recess in front of the uVax. Banging into this cabinet can only have bad results, as can preventing me from accessing the vacuum control and the signals processing cabinet. My oscilloscope was nearly knocked over by this. Pay attention to what you're doing, please. I have asked this of you before, and it is still important and still a problem. chw3 From jwc at snf.stanford.edu Wed Sep 24 11:24:05 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 24 Sep 2003 11:24:05 -0700 Subject: chairs in the Ebeam Lab References: <3F71C598.F9C1E893@snf.stanford.edu> Message-ID: <3F71E145.2550979E@snf.stanford.edu> An HTML attachment was scrubbed... URL: From lgx at stanford.edu Wed Sep 24 14:55:17 2003 From: lgx at stanford.edu (Guanxiong Li) Date: Wed, 24 Sep 2003 14:55:17 -0700 Subject: Resevation free 4-7pm, 9/25 Message-ID: <1064440517.3f7212c507174@webmail.stanford.edu> From jwc at snf.stanford.edu Wed Sep 24 16:19:20 2003 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 24 Sep 2003 16:19:20 -0700 Subject: RAITH UPDATE 1700 hours Wed. Sept. 24, 2003 RAITH is DOWN: Fractured pattern writes. Message-ID: <3F722678.98031BF7@snf.stanford.edu> Greetings Raith Users: I have placed the RAITH 150 in 'Red light' mode: Shutdown. SYSTEM IS NOT AVAILABLE FOR GENERAL USE. We are experiencing intermittent sub field write errors during complex pattern writes on the system. This appears as breaks in the pattern due to fractured sub-fields in the chip pattern. We have ordered and will be receiving a new pattern generator from RAITH USA. This is due to arrive tomorrow. RAITH Champions: Please call me if you wish access to the system tonight overnight. Some users seem to be able to get by without problems and I am trying to figure out if there is a threshold for these events. Thank you for your support! James Conway From jwc at snf.stanford.edu Thu Sep 25 11:03:04 2003 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 25 Sep 2003 11:03:04 -0700 Subject: request for return of dongles and SW disk for RAITH 150 SW so we can upgrade to Version 3.0 SP3 today Message-ID: <3F732DD8.C8076311@snf.stanford.edu> Hello RAITH Users: Please reply to me ASAP and/or return the dongles and CD-R for any RAITH 150 off-line SW packages you may have in your possession. We are in the process and update to the service package and I need to reconfigure and update these packages. (hatice: I know you returned the dongle but did I get the SW on the CD-R back as well?) From jwc at snf.stanford.edu Thu Sep 25 17:58:38 2003 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 25 Sep 2003 17:58:38 -0700 Subject: RAITH IS DOWN AND NOT AVAILABLE TO ANY USERS THIS EVENING Message-ID: <3F738F3E.85271C41@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Sep 26 10:32:23 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 26 Sep 2003 10:32:23 -0700 Subject: Final Annoucement/Reminder: RAITH SNF Users Monday/Tuesday September 29/30, 2003 Message-ID: <3F747827.3C340435@snf.stanford.edu> Greetings Presenters and Participants: The RAITH SNF Users Meeting will be held 9 AM - 5 PM on September 29/30, 2003 at Stanford University. Presentations will start promptly at 9:00 AM and we will adjourn daily at 5:00 PM. Presenters and Registered Participants are also invited to join us for Dinner off campus Monday evening. Attached is the Schedule and Abstracts of the presentations for your review. All presentations will be at: The Paul Allen Center for Integrated Systems Cypress Conference Room (CIS-X 101) Stanford University, 330 Serra Mall, Stanford, CA 94305 The CIS-X is an extension building attached to the North Side of the CIS building and can be accessed by foot off of 420 Via Palou Mall, and it is also just off the corners of Serra Mall and Via Ortega Street intersection. There is a Margarita Bus stop adjacent the intersection. Click here for information on Visiting CIS, Public Transit and Parking Lots available near this building. Public Transit and the Stanford Margarita Campus Transport Buses are the recommended means to get to Stanford, as parking is limited and strictly enforced. Thank you for your interest in E-beam Technologies at SNF, James Conway FYI: If your email address is listed as To: in this email your registration has now been confirmed. If your email address is a CC: you are also invited to attend any, all, or part of this event that your schedule may allow. Errata: If by chance you have fallen through the cracks, my apologizes -- please just send a brief email to jwc at snf.stanford.edu to confirm you are coming. If you must cancel, or do not desire to attend the meals, please also respond to this email so we can get an accurate final head count for our caterers. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Raith Users Meeting presentors list-final.doc Type: application/vnd.ms-word Size: 40960 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Schedule-final.doc Type: application/vnd.ms-word Size: 28672 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Sep 26 11:34:56 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 26 Sep 2003 11:34:56 -0700 Subject: RAITH is under testing may be back on line by 1600 today... Message-ID: <3F7486CF.7A079114@snf.stanford.edu> Greetings Raith Users: We have recovered from a Fatal stage loader error generated by the software yesterday and I am continuing the task to test the pattern generator after my repairs yesterday. We will be either back up and available for users today about 1600 hours (4 PM) or I will return tomorrow for more fun with testing DAC's on a replacement pattern generator just received from RAITH USA. Kudos for the RAITH team in Germany and in the USA, whom worked agilently to get me the information I needed to recover from the Stage loader problem. Never a dull moment! Thank you for your support! James Conway From jwc at snf.stanford.edu Fri Sep 26 15:27:30 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 26 Sep 2003 15:27:30 -0700 Subject: RAITH is back up and available to users -- System is in specification. References: <3F7486CF.7A079114@snf.stanford.edu> Message-ID: <3F74BD52.CE7DA17B@snf.stanford.edu> Greetings Raith Users: As of 1500 hours today we are back up and running on the RAITH 150 system. :-) I recovered from the problem encountered in the software yesterday. Thank you to the RAITH team in Dortmund and N.Y. State for fast response to the problem report last evening. The pattern generator card in the ELPHY Plus was removed, cleaned, inspected, and one connection repaired and reinstalled. Likely it was a cable or pin connection that had been causing the intermittent problem. I reset the calibrations for the X-Y stage and updated positions for the faraday cups, latex spheres on chessy and the chessy grid patterns. I realigned the magnification amplifiers on the LEO for proper centering across the three amplifier ranges. I have tested the system for functionality of the stage control and the pattern generator. I ran the same two exposure sequences that crashed on me Monday AM and PM with no problems. Total write of 208 patterns. Write field to write field stitching is acceptable with a mean + 3 sigma error on the order of 31 nm. Overlay layer1 to layer2 is superb and less than we can measure using verniers = <20 nm. More overlay and stitching test will be conducted next week during the Lithography Workshop. System is available to all users scheduled over the weekend. Users are asked to immediately report problems to both the CORAL system and to James Conway by cell phone and email. Thank you for your support! James Conway SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtopinka at stanford.edu Sat Sep 27 11:55:52 2003 From: mtopinka at stanford.edu (Mark Topinka) Date: Sat, 27 Sep 2003 11:55:52 -0700 Subject: Raith free 6-9pm Message-ID: <5.2.0.9.0.20030927115540.00b2a3e8@mtopinka.pobox.stanford.edu> From jwc at snf.stanford.edu Mon Sep 29 17:25:13 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 29 Sep 2003 17:25:13 -0700 Subject: 5% PMMA Stocked in solvent cabinet -- it is our last bottle. References: Message-ID: <3F78CD69.753A4776@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Sep 29 17:39:31 2003 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 29 Sep 2003 17:39:31 -0700 Subject: Raith Users Meeting has been a great event. Do join us if your schedules will allow. Message-ID: <3F78D0C3.9A2A048D@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Raith Users Meeting presentors list-final.doc Type: application/vnd.ms-word Size: 40960 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Schedule-final.doc Type: application/vnd.ms-word Size: 28672 bytes Desc: not available URL: From jwc at snf.stanford.edu Tue Sep 30 18:18:09 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 30 Sep 2003 18:18:09 -0700 Subject: System free until 2000 hours Message-ID: <3F7A2B50.1057DDD8@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Sep 30 18:52:25 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 30 Sep 2003 18:52:25 -0700 Subject: [Fwd: ebeam disk space] Please check, backup,and delete old files... Message-ID: <3F7A3359.BDB9F19@snf.stanford.edu> Greetings current and past users of EBEAM, our Hitachi H-700 Ebeam Writer: We are performing some System Administration on EBEAM and we request your help to clear up the file system space of obsolete and non used pattern (*.EBMT), job batch (*.JTX) and cmd (*.CMD) files. If you received this message as a TO: your email name: You all have files in abundance on EBEAM VAX host. in either the hl_hlfp or the hl_jtx directories. If you are receiving this as a CC: your email name: This msg. is a call for your action but less urgently and/or FYI. Could you please take a moment from your busy schedules and please review and delete any old files from the BEAMER VAX DUB0 disk for us ASAP. We had run out of file space on the disk last weekend, slowing the system to nearly a halt. I came in Sunday evening and brought the system back up after it crashed hard and cleaned up files pre Jan-01-2001 -- but many files remain that have not been accessed in some time. I also performed the six month accounting and temp file system administration and we hope to do the annual in coming weeks. Remember there is also a PURGE command that you can use to delete old versions of jtx and cmd files. This would help us greatly in our efforts to maintain a properly functioning system. Note: I do not have the time to do this for all of you unless it is a global clean of all your files. Also remember to be sure to use a unique two or three letter identifier such as your login name or initials, so we can ID you to your files during SYS administration. If we cannot identify a file to a user(s) it could be purged... Thank you for your support of the Ebeam area. Sincerely Yours, James Conway Ebeam Technology Group Paul Jerabek wrote: > All Hitachi ebeam users: > please delete and/or move your .ebmt files you no longer need or are not > going to use in near future.Directory hl_hlfp is almost full. I will wait > 1 week and if situation doesn't improve I will have to delete all .ebmt > files older then 1 year. > -Paul -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Sep 30 19:29:47 2003 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 30 Sep 2003 19:29:47 -0700 Subject: Reminder: RAITH Ebeam Lithography Workshop 10 - 5 daily WED/THURS/FRI. Message-ID: <3F7A3C1B.1AD430D5@snf.stanford.edu> Greetings: Just a reminder for the RAITH Ebeam Lithography Workshop we are holding this week. This is your chance to meet and work with the application specialist whom are visiting Stanford this week. It is a great chance to get all your questions answered, and bring to RAITH's and my own attention specific areas of your technical interest in Ebeam Technologies and where you may need more technical support and further training. We will be holding this meeting from 10 - 5 PM daily starting out in CIS 201 (10 - 12) and 1 - 5 PM working in the Ebeam lab. Following up on this effort, I hope to hold an RAITH Advanced Users course early in 2004 for all interested RAITH users. Thank you for your interest in Ebeam Technologies here at SNF. James Conway Previous announcement attached. Dated August 21, 2003 and several other announcements since then. A LITHOGRAPHY WORKSHOP is scheduled for Wednesday through Friday, October 1-3. This is for current qualified users of the Stanford RAITH system only. * The topic for each day and the format will be flexible, but a general plan to follow would be to begin each day with a ~ 2 hour lecture/discussion session. ALL Raith Users are encouraged to attend the lecture/discussion sessions. Following the classroom session will be a 'practical' or hands-on session using the R150 tool. Due to limited space in the cleanroom, people must SIGN-UP for the practical session in advance. This will be on a first-come-first-serve basis. Schedule: WEDNESDAY, October 1 ==================== Question/answer of exposure problems; tips and tricks. After 2 days of presentations, and past knowledge of some difficulties experienced at SU, we can make general comments and suggestions for improving exposure results. You should come with questions. To really benefit from this, users should come PREPARED in advance with images and files that we can load on a laptop and projector and look at the questions or problems you are experiencing and talk through the process as though it is a 'case study'. THURSDAY, October 2 =================== Metrology with the R150. As a basis for this topic we can look at the stitching and overlay test pattern. In addition to learning more about stitching and overlay, you can learn about setting up measurements and doing statistical analysis on your exposure results. FRIDAY, October 3 ================= More discussion on proximity effects and circle arrays? Discussions will focus on Photonic crystal devices, but maybe there are other areas of interest which users may wish to discuss as well? - Discussions of any other remaining questions from the week. * Please Note: If you are in training on the RAITH with me, and not yet a qualified user, you are also cordially invited to attend these sessions and observe if you desire to get a head start on the system. You all are intended to have your RAITH Basic Users training completed in the coming next couple of weeks. This will bring us to over 50 users on the system! JWC